semi合集-English.pdf - 第2332页

SEMI E82-0705 © SEMI 1999, 2005 28 STEP COMMENTS HOST TSC COMMENTS 3. <-S2,F50 Enhanced Remote Command Acknowledge (ERCA) 4. <-S6,F11 Event Report Send (ERS) TransferInitiated . CommandID = “111111” 5. Event Report…

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SEMI E82-0705 © SEMI 1999, 2005 27
Vehicle States and Carrier States are independent from the IBSEM remote commands). “NA” (Not Applicable)
means that States and Remote Commands have no direct relationship.
Table 13 Remote Commands versus TSC and TRANSFER Command States
COMMAND
TRANSFER
RESUME
PAUSE
CANCEL
ABORT
INFOUPDATE
STAGE
STAGEDELETE
TSC STATE
AUTO X X X X X X X
ALARMS X X X X X X X X
NO ALARMS X X X X X X X X
INIT
PAUSED X X X X X X X
PAUSING X X X X X X X
TRANSFER COMMAND STATE
QUEUED N/A N/A N/A X N/A N/A N/A
WAITING N/A N/A N/A X N/A N/A N/A
ACTIVE (PAUSED or TRANS.) N/A N/A N/A X N/A N/A N/A
ABORTING N/A N/A N/A N/A N/A N/A
CANCELING N/A N/A N/A N/A N/A N/A
12 Scenarios
12.1 The following scenarios represent Application Notes. In the scenarios, all unique Remote Command IDs must
initially be created and sent by the Host. Subsequent event reports sent from the equipment referring to the status of
a particular remote command must return the applicable CommandID. All collection events identified in Table 6 are
assumed to be enabled (per the SEMI E30 definition/scenario) throughout the following scenarios. Variable data
specified in the Host commands has been chosen arbitrarily for the purpose of demonstrating message
structure/content. The Collection Event Report definitions contained in the scenarios are examples that could be
defined by the Host.
12.2 Normal Transport
12.2.1 Single Carrier Transfer — Transfer Unit Size is Equal to 1 Carrier
12.2.1.1 A carrier is transported from a source port to a destination port.
STEP COMMENTS HOST TSC COMMENTS
1. Carrier 123456 is sitting
at PORTXX prepared for a
TRANSFER command.
2. Enhanced Remote Command
(ERC)
TRANSFER
. COMMANDID = “111111”
. PRIORITY = 5
. REPLACE = 0
. TRANSFERINFO
1
- L,3
1. CARRIERID = “123456”
2. SOURCEPORT = “PORTXX”
3. DESTPORT = “PORTYY”
S2,F49->
SEMI E82-0705 © SEMI 1999, 2005 28
STEP COMMENTS HOST TSC COMMENTS
3. <-S2,F50 Enhanced Remote Command
Acknowledge (ERCA)
4. <-S6,F11 Event Report Send (ERS)
TransferInitiated
. CommandID = “111111”
5. Event Report Acknowledge
(ERA)
S6,F12->
6. <-S6,F11 Event Report Send (ERS)
VehicleAssigned
. VehicleID = “CARXX”
/* Actual VehicleID used
for the transfer may be
different due to TSC
scheduling optimizations
*/
CommandID = “111111”
7. Event Report Acknowledge
(ERA)
S6,F12->
8. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “CARXX”
. TransferPortList -
L,1
1. TransferPort =
“PORTXX”
9. Event Report Acknowledge
(ERA)
S6,F12->
10. <-S6,F11 Event Report Send (ERS)
Transferring
. CommandID = “111111”
11. Event Report Acknowledge
(ERA)
S6,F12->
12. <-S6,F11 Event Report Send (ERS)
VehicleAcquireStarted
. VehicleID = “CARXX”
. TransferPort =
“PORTXX”
. CarrierID = “123456”
13. Event Report Acknowledge
(ERA)
S6,F12->
14. <-S6,F11 Event Report Send (ERS)
CarrierInstalled
. VehicleID = “CARXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
15. Event Report Acknowledge
(ERA)
S6,F12->
16. <-S6,F11 Event Report Send (ERS)
VehicleAcquireCompleted
. VehicleID = “CARXX”
. TransferPort =
“PORTXX”
. CarrierID = “123456”
17. Event Report Acknowledge
(ERA)
S6,F12->
SEMI E82-0705 © SEMI 1999, 2005 29
STEP COMMENTS HOST TSC COMMENTS
18. <-S6,F11 Event Report Send (ERS)
VehicleDeparted
. VehicleID = “CARXX”
. TransferPortList -
L,1
1. TransferPort =
“PORTXX”
19. Event Report Acknowledge
(ERA)
S6,F12->
20. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “CARXX”
. TransferPortList -
L,1
1. TransferPort =
“PORTYY”
21. Event Report Acknowledge
(ERA)
S6,F12->
22. <-S6,F11 Event Report Send (ERS)
VehicleDepositStarted
. VehicleID = “CARXX”
. TransferPort =
“PORTYY”
. CarrierID = “123456”
23. Event Report Acknowledge
(ERA)
S6,F12->
24. <-S6,F11 Event Report Send (ERS)
CarrierRemoved
. VehicleID = “CARXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
25. Event Report Acknowledge
(ERA)
S6,F12->
26. <-S6,F11 Event Report Send (ERS)
VehicleDeposit-Completed
. VehicleID = “CARXX”
. TransferPort =
“PORTYY”
. CarrierID = “123456”
27. Event Report Acknowledge
(ERA)
S6,F12->
28. <-S6,F11 Event Report Send (ERS)
VehicleUnassigned
. VehicleID = “CARXX”
. CommandID = “111111”
29. Event Report Acknowledge
(ERA)
S6,F12->