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SEMI M17-0704 © SEMI 1990, 2004 4 Figure 1 Grid Layout for Wafers Without a Primary Flat Figure 2 Grid Layout for W afers With a Primary Fl at

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SEMI M17-0704 © SEMI 1990, 2004 3
Table 1 Grid Element Scheme
Circle
Number
Number
of Divisions
Included
Angle
Total
Number
of Divisions
Included
Area Ratio
Relative
Diameter
01 4 90.0° 4 0.004 0.0632
02 8 45.0° 12 0.012 0.1095
03 16 22.5° 28 0.028 0.1673
04 24 15.0° 52 0.052 0.2280
05 30 12.0° 82 0.082 0.2864
06 36 10.0° 118 0.118 0.3435
07 40 9.0° 158 0.158 0.3975
08 48 7.5° 206 0.206 0.4539
09 50 7.2° 256 0.256 0.5060
10 60 6.0° 316 0.316 0.5621
11 72 5.0° 388 0.388 0.6229
12 72 5.0° 460 0.460 0.6782
13 80 4.5° 540 0.540 0.7348
14 80 4.5° 620 0.620 0.7874
15 90 4.0° 710 0.710 0.8426
16 90 4.0° 800 0.800 0.8944
17 100 3.6° 900 0.900 0.9487
18 100 3.6° 1000 1.000 1.0000
Table 2 Grid Circle Diameters (in mm) for Various Standard Wafer Sizes with Nominal Edge Exclusion, E.
Nominal Wafer Diameter
E = 3 mm E = 4 mm
Circle Number
Relative
Diameter
100 mm 125 mm 150 mm 200 mm 150 mm 200 mm
01 0.0632 5.94 7.52 9.10 12.26 8.97 12.13
02 0.1095 10.29 13.03 15.77 21.24 15.55 21.02
03 0.1673 15.73 19.91 24.09 32.46 23.76 32.12
04 0.2280 21.43 27.13 32.83 44.23 32.38 43.78
05 0.2864 26.92 34.08 41.24 55.56 40.67 54.99
06 0.3435 32.29 40.88 49.46 66.64 48.78 65.95
07 0.3975 37.37 47.30 57.24 77.12 56.45 76.32
08 0.4539 42.67 54.01 65.36 88.06 64.45 87.15
09 0.5060 47.56 60.21 72.86 98.16 71.85 97.15
10 0.5621 52.84 66.89 80.94 109.05 79.82 107.92
11 0.6229 58.55 74.13 89.70 120.84 88.45 119.60
12 0.6782 63.75 80.71 97.66 131.57 96.30 130.21
13 0.7348 69.07 87.44 105.81 142.55 104.34 141.08
14 0.7874 74.02 93.70 113.39 152.76 111.81 151.18
15 0.8426 79.20 100.27 121.33 163.46 119.65 161.78
16 0.8944 84.07 106.43 128.79 173.51 127.00 171.72
17 0.9487 89.18 112.90 136.61 184.05 134.72 182.15
18 1.0000 94.00 119.00 144.00 194.00 142.00 192.00
SEMI M17-0704 © SEMI 1990, 2004 4
Figure 1
Grid Layout for Wafers Without a Primary Flat
Figure 2
Grid Layout for Wafers With a Primary Flat
SEMI M17-0704 © SEMI 1990, 2004 5
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