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SEMI E130-1104 © SEMI 2003, 2004 14 90 deg. 270 deg. 180 de g. 0 deg. Figure 6 Orientation of the Substr ate Notch 18.8 Orientation Attributes 18.8.1 Orientation — Ide ntifies the orientation of th e fiducial when defini…

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18.5.2.3 ReferenceDeviceX — This is the Column number corresponding to the Reference Device. This value is
dependent upon the Orientation and OriginLocation recipe attributes but not the OrientationOnChuck attribute.
18.5.2.4 ReferenceDeviceY — This is the Row number corresponding to the Reference Device. This value is
dependent upon the Orientation and OriginLocation recipe attributes but not the OrientationOnChuck attribute.
18.5.2.5 RefDeviceMatrixX — This is the Column number corresponding to the Reference Device within a given
exposure field. This value is dependent upon the Orientation and OriginLocation recipe attributes but not the
OrientationOnChuck attribute. For non-matrix substrates, this attribute is 1.
18.5.2.6 RefDeviceMatrixY — This is the Row number corresponding to the Reference Device within a given
exposure field. This value is dependent upon the Orientation and OriginLocation recipe attributes but not the
OrientationOnChuck attribute. For non-matrix substrates, this attribute is 1.
18.6 Coordinate Origin — The Coordinate Origin identifies the axis quadrant occupied by the substrate for
addressing devices on the substrate.
+
y
+x
Type: "BottomLeft"
+y
+x
Type: "TopLeft"
+x
Type: "TopRight"
+y
+x
Type: "BottomRight"
+y
+x
Type: "Center"
+y
0
0
0
0
0
Figure 5
Coordinate Origin (OriginLocation)
18.6.1 Origin Recipe Attributes
18.6.1.1 OriginLocation — Coordinate system on substrate to address devices. Enumerated:
0 = Center, 1 = Upper Right, 2 = Upper Left 3 = Lower Left (default), 4 = Lower Right.
18.7 Orientation
18.7.1 Orientation addresses the location of the substrate primary fiducial (flat or notch).
SEMI E130-1104 © SEMI 2003, 2004 14
90 deg. 270 deg.
180 deg.
0 deg.
Figure 6
Orientation of the Substrate Notch
18.8 Orientation Attributes
18.8.1 Orientation — Identifies the orientation of the fiducial when defining the coordinate system on a substrate.
This parameter in conjunction with the OriginLocation recipe attribute determines the coordinate and size attributes
of devices on a substrate.
18.8.2 OrientationOnChuck — Identifies the orientation of a substrate loaded on the chuck. This attribute does not
affect the coordinate and size attributes of devices on a substrate.
18.9 Example Coordinate References — The values presented in this section are for demonstration purposes
(measurements are not exact).
18.9.1 Orientation — The recipe attributes presented in Figure 7 reflect an Orientation attribute setting of 0º. The
recipe attributes presented in Figure 8 reflect an Orientation attribute setting of 90º.
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1234567891011121314151617
A
B
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DEF
OriginLocation = 3
Orientation = 0
ReferenceDeviceX = 5
ReferenceDeviceY = 15
RefDeviceMatrixX=1
RefDeviceMatrixY=2
ReferenceDevicePosX = -64,646.45
ReferenceDevicePosY = 113,131.13
DeviceSizeX = C
DeviceSizeY = D
MatrixSizeX = A
MatrixSizeY = F
MatrixDeviceRows = 2
MatrixDeviceCols = 3
StepSizeX = B
StepSizeY = E
Rows = 16
Columns = 17
Figure 7
Example Coordinates Orientation = 0
123456789
1011 1213 1415 16
1
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D
E
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ABC
OriginLocation = 3
Orientation = 90
ReferenceDeviceX = 15
ReferenceDeviceY = 13
RefDeviceMatrixX = 2
RefDeviceMatrixY = 3
ReferenceDevicePosX = -64,646.45
ReferenceDevicePosY = 113,131.13
DeviceSizeX = D
DeviceSizeY = C
MatrixSizeX = F
MatrixSizeY = A
MatrixDeviceRows = 3
MatrixDeviceCols = 2
StepSizeX = E
StepSizeY = B
Rows = 17
Columns = 16
Figure 8
Example Coordinates Orientation = 90
18.9.2 Orientation on Chuck — The following example demonstrates the effect of probing a substrate with different
settings of the OrientationOnChuck recipe attribute. The OrientationOnChuck attribute has no impact on the
coordinate values communicated between the host and the equipment.