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SEMI F97-0305 © SEMI 2005 17 Table 12 Status Field Values Field Bit Meaning Mandatory/optional Watchdog-Toggle 0 0/1 mandatory OP-Mode 1 0: Manual 1: Automatic mandatory Control-Mode 2 0: Local (default, when not support…

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SEMI F97-0305 © SEMI 2005 16
Table 9 State Transition Table Simulation-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Simulation or
Simulation
None. Dependent on local
operator action.
2 No_Simulation Local or remote
operator action.
Simulation FPU simulates parts
of FPU or the entire
FPU functions.
3 Simulation Local or remote
operator action.
No_Simulation FPU disables
simulation of parts of
the FPU or the entire
FPU functions.
9.5 Operations Between FMCS and FPUs
9.5.1 The Table below lists the operations between the FMCS and the FPU.
Table 10 Operation Definition
Operation Description Mandatory/Optional
Get Status FMCS requests status data from FPU. mandatory
Set Data FMCS requests FPU to update data in the FPU. optional
Get Data FMCS requests to retrieve data from the FPU. optional
9.5.2 Get Status — Is used by the FMCS to request the status of the FPU.
Table 11 Status Parameters
Parameter Description Direction Data Type
Tag Local identifier for the FMCS. FMCS ->
FPU
Out of scope.
Status value Status field values of the FPU. FPU ->
FMCS
See Table 12 for details.
SEMI F97-0305 © SEMI 2005 17
Table 12 Status Field Values
Field Bit Meaning Mandatory/optional
Watchdog-Toggle 0 0/1 mandatory
OP-Mode 1 0: Manual
1: Automatic
mandatory
Control-Mode 2 0: Local (default, when not
supported)
1: Remote (FMCS)
optional
Run-Mode 3-4 0: Down (unscheduled)
1: Down (scheduled)
2: Stand by
3: Run
mandatory
Alarm-Mode 5 0: No_Alarm (default, when not
supported)
1: Alarm
optional
Warning-Mode 6 0: No_Warning (default, when not
supported)
1: Warning
optional
Error-Mode 7 0: No_Error
1: Error
mandatory
Maintenance-Mode 8 0: No_Maintenance (default, when
not supported)
1: Maintenance
optional
Simulation-Mode 9 0: No_Simulation (default, when
not supported)
1: Simulation
optional
Lock-Mode 10 0: Not_Locked (default, when not
supported)
1: Locked
optional
Reserved 11-15 none optional
9.5.3 Set Data — Is used by the FMCS to set data in the FPU. Upon receiving this, the FPU shall update the data
with the Set value.
Table 13 Set Data Parameter
Parameter Description Direction Data Type
Tag Local identifier for the FMCS. FMCS ->
FPU
Out of scope.
Set value Value of the Set parameter field. FMCS ->
FPU
Must be agreed between suppliers and purchasers.
See Related Information 2.
9.5.4 Get Data — Is used by the FMCS to get data from the FPU. Upon receiving this from the FPU, the FMCS
shall update its data cache.
Table 14 Get Data Parameter
Parameter Description Direction Form
Tag Local identifier for the FMCS. FMCS ->
FPU
Out of scope.
Get Parameter value Value of the Get parameter field. FPU ->
FMCS
Must be agreed between suppliers an purchasers.
See Related Information 2.
SEMI F97-0305 © SEMI 2005 18
10 Mapping to Various Communication Solutions
10.1 This standard does not make any assumptions about how the mapping to the communications protocols is
made.
11 Test Methods and Compliance
11.1 Overall Precondition — The precondition for testing the FPU (and the FMCS) is the agreement between
supplier and purchaser on a common set of issues which include:
communication hardware and protocols to be used for the integration between FMCS and FPU,
data formats and semantics to be transferred between FMCS and FPU,
FMCS and FPU are initialized, the FPU reflects already a valid run state,
FMCS shall be able to issue a Get Status, and
FMCS shall be able to visualize the results of the tests.
11.1.1 See ordering information (§7) and Related Information 2 (§R2).
11.2 Tests
11.2.1 Get Status Test
11.2.1.1 Preconditions:
FMCS and FPU are connected.
FMCS is ready to issue a Get Status.
11.2.1.2 Test Operations:
Operation 1: The FMCS shall issue a Get Status against the FPU.
Operation 2: The FMCS shall issue a Get Status against the FPU. The FPU shall alternate the Watchdog-
Toggle.
Operation 3..n: The status of all status variables at the FPU is forced at least to change once; after each status
change a new Get Status request shall be issued against the FPU.
11.2.1.3 Post Conditions:
Post condition 1: The FPU shall respond with all requested parameters in the Status Response. The result shall
be visualized by the FMCS and show the returned values of all supported status variables.
Post condition 2: The FMCS shall visualize that the FPU is still alive or not alternating the Watchdog-Toggle
within the specified time window.
Post condition 3..n: The FPU shall respond with the changed status variable values. In each case the result of
all supported status variables shall be visualized by the FMCS.
11.2.1.4 All status values of the Run-Mode shall be used at the FPU to show that state changes are correctly
maintained and transmitted to the FMCS.
11.2.2 Set Data Test (if supported by FPU)
11.2.2.1
Preconditions:
FMCS and FPU are connected.
FMCS is ready to issue a Set Data.
FMCS shall be able to enter the data to be transmitted by Set Data.
11.2.2.2 Test Operations:
Operation 1..n: The FMCS shall issue a Set Data against the FPU.