semi合集-English.pdf - 第1715页
SEMI E40.1-0705 © SEMI 1996, 2005 2 Service Message Name Stream, Function SECS-II Name PRJobDequeue S16F17/F18 PRJobDequeue PRGetAllJobs S16F19/F20 PRGetAllJobs PRGetSpace S16F21/F22 PRGetSpace PRJobSetRecipeVariable S16…
SEMI E40.1-0705 © SEMI 1996, 2005 1
SEMI E40.1-0705
SECS-II SUPPORT FOR PROCESSING MANAGEMENT STANDARD
This standard was technically approved by the global Information & Control Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available
at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1995; last published in
2004.
1 Purpose
1.1 This document maps the services and data of SEMI E40 to SECS-II streams and functions and data definitions.
2 Scope
2.1 This is the standard way to implement the Processing Management, which provides remote control of wafer
processing, using the SECS-II message protocol.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards and Documents
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E40 — Standard for Processing Management
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Terminology
4.1 None.
5 Mapping of Processing Services
Table 1 Processing Management Messages Mapping
Service Message Name Stream, Function SECS-II Name
PRJobCreate request S16F3,F4 Process Job Create Request/Acknowledge
PrJobCommand request S16F5,F6 Process Job Command Request/Acknowledge
PRJobAlert notify If E30 style events:
S6F11,F12
If E40 style alerts:
S16F7,F8
If E53 style events:
S6F11,F12
S6F13,F14
If E30 style events:
Event Report Send/Acknowledge
If E40 style alerts:
Process Job Alert Notify/Confirm
If E53 style events:
Event Report Send/Acknowledge
Annotated Event Report Send/Ack
PRJobEvent notify If E30 style events:
S6F11,F12
If E40 style events:
S16F9,F10
If E53 style events:
S6F11,F12
S6F13,F14
If E30 style events:
Event Report Send/Acknowledge
If E40 style events:
Process Job Event Notify/Confirm
If E53 style events:
Event Report Send/Acknowledge
Annotated Event Report Send/Ack
PRSetMtrlOrder request S16F29,30 Process Job Set Material Order
PRJobCreateEnh S16F11/F12 PRJobCreateEnh
PRJobMultiCreate S16F15/F16 PRJobMultiCreate
SEMI E40.1-0705 © SEMI 1996, 2005 2
Service Message Name Stream, Function SECS-II Name
PRJobDequeue S16F17/F18 PRJobDequeue
PRGetAllJobs S16F19/F20 PRGetAllJobs
PRGetSpace S16F21/F22 PRGetSpace
PRJobSetRecipeVariable S16F23/F24 PRJobSetRecipeVariable
PRJobSetStartMethod S16F25/F26 PRJobSetStartMethod
6 Mapping of Processing Parameter
Table 2 Data Item Mapping
Service Parameter SECS-II Data Item
PrJobID PRJOBID
PRMtlType MF
PRMtlName MID
PRAck ACKA
PRRecipeMethod PRRECIPEMETHOD
RecID RCPSPEC
RecipeVarName RCPPARNM
RecipeVarValue RCPPARVAL
PRProcessStart PRPROCESSSTART
PRCmdName PRCMDNAME
PRJobMilestone If E30 style events:
CEID
If E40 style alerts:
PRJOBMILESTONE
If E53 style events:
CEID
PRJobState PRSTATE
Timestamp TIMESTAMP
PREventID If E30 style events:
CEID
If E40 style events:
PREVENTID
If E53 style events:
CEID
CmdParmName CPNAME
CmdParmVal CPVAL
PRMtrlOrder PRMTRLORDER
ErrorCode ERRCODE
ErrorText ERRTEXT
PREventData V (SV, ECV, DVVAL)
PRJobSpace PRJOBSPACE
PRPauseEvent PRPAUSEEVENT
7 Variable Data Item Mapping
7.1 This section shows the specific SECS-II data classes, and formats needed for SECS-II implementations of
SEMI E40 variable data. According to SEMI E40 §11, all ProcessJob object attributes are to be available as
variables for Process Job state transition events. These variables will be of SEMI E5 data item DVVAL.
SEMI E40.1-0705 © SEMI 1996, 2005 3
8 Implementation Details
8.1 Use of Object Services — Several capabilities of the Processing Management Services are accessed through the
Object Services Standard. Whan a Process Job has been created, (PRJOBID is valid), then its attributes can be read
and written using the Object Services GetAttr and SetAttr messages.
8.1.1 E39 Object Services shall be used for access to ProcessJob attributes. The GetAttr service may be used for all
ProcessJob attributes and the SetAttr service may be used on only those attributes whose Access is set to RW.
8.2 Multi-Block Messages — Processing Management Services is protocol independent and therefore, makes no
mention of SECS-II multi-block access and grant messages. When these Service use the SECS-II protocol, then
S16F3,F5 shall be preceded by an S16F1/S16F2 access request/grant message exchange when the message will be
multi-block.
9 SECS-II Attribute Definitions
9.1 Process Job Object SECS-II Attributes Definitions — The following are the SECS-II structure definitions for
the E40 ProcessJob object.
Table 3 Process Job SECS-II Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjID” <PRJOBID> (Conforms to the restrictions of ObjID as specified in SEMI E39.1, §6.)
“ObjType” “ProcessJob”
“PauseEvent” L,n n=number of collection events
1. <CEID
1
>
…
n. <CEID
n
>
CEID restricted to format U()
“PRJobState” <PRSTATE> PRJobState
PRSTATE enumerated as follows:
51 (U1)
Enumerations:
0 – QUEUED/POOLED
1 – SETTING UP
2 – WAITING FOR START
3 – PROCESSING
4 – PROCESS COMPLETE
5 – (Reserved)
6 – PAUSING
7 – PAUSED
8 – STOPPING
9 – ABORTING
10 – STOPPED
11 – ABORTED