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SEMI E54.15-0305 © SEMI 2005 16 9.2.3 Sensor-AI-A T — The presentation of the Sensor Analog I n pu t Ambient Temperature (S ensor-AI-AT) object instance attributes and services are as indicated in Table 17. Table 17 Sens…

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9.1.2 The instance identifier of 1 through s, assigned to an object type, refers to the possibility of multiple
instantiations of the object type. Refer to Table 2 of this document and the CDM document for a further explanation
of object instance identifier assignments.
9.2 Specific Device Model for Mass Flow Device
9.2.1 These sections detail the network mapping required to support the Specific Device Model for Mass Flow
Device (see SEMI E54.3 ¶4.1). Table 15 summarizes the Mass Flow Device Object types. Subsequent Tables 16 to
25 details the instance attributes and services associated with each Mass Flow Device object type.
Table 15 Mass Flow Device Object Types
SDM Object
Identifier
Object
Name
SafetyBUS p Class
ID
MFD1 (DM) Device Manager 1
MFD2 (SAC) Sensor Actuator Controller 2
MFD3 Sensor-AI-MF 129
MFD4 Sensor-AI-AT 130
MFD5 Assembly-MFM 131
MFD6 Sensor-AI-Aux 132
MFD7 Actuator-AO-MF 133
MFD8 Controller 39
MFD9 Local Link 4
MFD10 SISO 134
MFD11 SISO-Setpoint 135
MFD12 Assembly-MFC 136
9.2.2 Sensor-AI-MF — The presentation of the Sensor Analog Input Mass Flow (Sensor-AI-MF) object instance
attributes and services are as indicated in Table 16.
Table 16 Sensor-AI-MF Object Instance Attributes and Services
Sensor-AI-MF
Class ID = 129, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
128 Flow Totalizer A1
129 Flow Hours A2
130 Zero Offset Mode A5
131 Zeroing Status A6
132 Autorange Status A7
Services
ID Service Name SDM Tag
129 Perform Zero Offset S1
131 Query-Supported Gas Types S2
133 Selected Programmed Gas Type S3
135 Insert Gas Type S4
137 Delete Gas Type S5
139 Get Gas Calibration Data Value S6
141 Set Gas Calibration Data Value S7
143 Autorange S8
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9.2.3 Sensor-AI-AT — The presentation of the Sensor Analog Input Ambient Temperature (Sensor-AI-AT) object
instance attributes and services are as indicated in Table 17.
Table 17 Sensor-AI-AT Object Instance Attributes and Services
Sensor-AI-AT
Class ID = 130, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.2.4 Assembly-MFM –– The presentation of the Assembly Mass Flow Meter (Assembly-MFM) object instance
attributes and services are as indicated in Table 18.
Table 18 Assembly-MFM Object Instance Attributes and Services
Assembly-MFM
Class ID = 131, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.2.5 Sensor-AI-Aux –– The presentation of the Sensor Analog Input Auxiliary (Sensor-AI-Aux) object instance
attributes and services are as indicated in Table 19.
Table 19 Sensor-AI-Aux Object Instance Attributes and Services
Sensor-AI-Aux
Class ID = 132, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.2.6 Actuator-AO-MF –– The presentation of the Actuator Analog Output Mass Flow (Actuator-AO-MF) object
instance attributes and services are as indicated in Table 20.
Table 20 Actuator-AO-MF Object Instance Attributes and Services
Actuator-AO-MF
Class ID = 133, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
128 Valve Type A1
129 Override A2
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Services
ID Service Name SDM Tag
-- No additional services defined --
9.2.7 Controller –– The presentation of the extended Controller (C) object instance attributes and services are as
indicated in Table 21.
Table 21 Controller Object Instance Attributes and Services
Controller
Class ID = 39, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
128 Alarm Settling Time CA21
129 Warning Settling Time CA24
Services
ID Service Name SDM Tag
-- No additional services defined --
9.2.8 Local Link –– The presentation of the extended Local Link (Lnk) object instance attributes and services are as
indicated in Table 22.
Table 22 Local Link Object Instance Attributes and Services
Local Link
Class ID = 4, Instance ID = 01 through j
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.2.9 SISO –– The presentation of the Single Input Single Output (SISO) object instance attributes and services are
as indicated in Table 23.
Table 23 SISO Object Instance Attributes and Services
SISO
Class ID = 134, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
128 Input A1
129 Output A2
130 Data Type A3
Services
ID Service Name SDM Tag
-- No additional services defined --
9.2.10 SISO-Setpoint –– The presentation of the Single Input Single Output Setpoint (SISO-Setpoint) object
instance attributes and services are as indicated in Table 24.