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SEMI E54.9-0303 © SEMI 2000, 2003 13 Table 32 A ssembly-ISPM#1 Object In stance Attributes and Services Assembly-ISPM#1 Class ID = 141, Instance ID = 01 through r Attributes ID Attribute Name SDM Tag -- No a dditional at…
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9.3.2 Sensor Actuator Controller (SAC) –– The
presentation of the extended ISPM Sensor Actuator
Controller (SAC) object attributes and services are as
indicated in Table 27.
Table 27 SAC Object Instance Attributes and
Services
Sensor, Actuator, Controller Object (SAC)
Class ID = 02, Instance ID = 01
Attributes
ID Attribute Name CDM Tag
65 Number of Bins SacA65
66 Count Mode SacA66
67 Duration SacA67
Services
ID Service Name CDM Tag
33 Clear Counts SacS33
9.3.3 Sensor-AI-LCS –– The presentation of the Sensor
Analog Input Laser Current Sensor (Sensor-AI-LCS)
object attributes and services are as indicated in Table
28.
Table 28 Sensor-AI-LCS Object Instance Attributes
and Services
Sensor-AI-LCS
Class ID = 137, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid LcsA1
129 Full Scale LcsA2
130 Alarm Settling Time LcsA3
131 Warning Settling Time LcsA4
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.4 Sensor-AI-SLS –– The presentation of the Sensor
Analog Input Stray Light Sensor (Sensor-AI-SLS)
object attributes and services are as indicated in Table
29.
Table 29 Sensor-AI-SLS Object Instance Attributes
and Services
Sensor-AI-SLS
Class ID = 138, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid SlsA1
129 Full Scale SlsA2
130 Alarm Settling Time SlsA3
Sensor-AI-SLS
Class ID = 138, Instance ID = 1 through r
131 Warning Settling Time SlsA4
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.5 Sensor-AI-MNS –– The presentation of the
Sensor Analog Input Medium Noise Sensor (Sensor-AI-
MNS) object attributes and services are as indicated in
Table 30.
Table 30 Sensor-AI-MNS Object Instance Attributes
and Services
Sensor-AI-MNS
Class ID = 139, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid MnsA1
129 Full Scale MnsA2
130 Alarm Settling Time MnsA3
131 Warning Settling Time MnsA4
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.6 Sensor-AI-Counter –– The presentation of the
Sensor Analog Input Counter (Sensor-AI-Counter)
object attributes and services are as indicated in Table
31.
Table 31 Sensor-AI-Counter Object Instance
Attributes and Services
Sensor-AI-Counter
Class ID = 140, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid CounterA1
129 Full Scale CounterA2
130 Alarm Settling Time CounterA3
131 Warning Settling Time CounterA4
132 Upper Size CounterA5
133 Lower Size CounterA6
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.7 Assembly-ISPM#1 –– The presentation of the
Assembly #1 In-Situ Particle Monitor (Assembly-
ISPM#1) object attributes and services are as indicated
in Table 32.
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Table 32 Assembly-ISPM#1 Object Instance
Attributes and Services
Assembly-ISPM#1
Class ID = 141, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.8 Assembly-ISPM#2 –– The presentation of the
Assembly #2 In-Situ Particle Monitor (Assembly-
ISPM#2) object attributes and services are as indicated
in Table 33.
Table 33 Assembly-ISPM#2 Object Instance
Attributes and Services
Assembly-ISPM#2
Class ID = 142, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.9 Assembly-ISPM#3 –– The presentation of the
Assembly #3 In-Situ Particle Monitor (Assembly-
ISPM#3) object attributes and services are as indicated
in Table 34.
Table 34 Assembly-ISPM#3 Object Instance
Attributes and Services
Assembly-ISPM#3
Class ID = 143, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.10 Assembly-ISPM#4 –– The presentation of the
Assembly #4 In-Situ Particle Monitor (Assembly-
ISPM#4) object attributes and services are as indicated
in Table 35.
Table 35 Assembly-ISPM#4 Object Instance
Attributes and Services
Assembly-ISPM#4
Class ID = 144, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.11 Assembly-ISPM#5 –– The presentation of the
Assembly #5 In-Situ Particle Monitor (Assembly-
ISPM#5) object attributes and services are as indicated
in Table 36.
Table 36 Assembly-ISPM#5 Object Instance
Attributes and Services
Assembly-ISPM#5
Class ID = 145, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.12 Assembly-ISPM#6 –– The presentation of the
Assembly #6 In-Situ Particle Monitor (Assembly-
ISPM#6) object attributes and services are as indicated
in Table 37.
Table 37 Assembly-ISPM#6 Object Instance
Attributes and Services
Assembly-ISPM#6
Class ID = 146, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.13 Assembly-ISPM#7 –– The presentation of the
Assembly #7 In-Situ Particle Monitor (Assembly-
ISPM#4) object attributes and services are as indicated
in Table 38.
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Table 38 Assembly-ISPM#7 Object Instance
Attributes and Services
Assembly-ISPM#7
Class ID = 147, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.14 Assembly-ISPM#8 –– The presentation of the
Assembly #8 In-Situ Particle Monitor (Assembly-
ISPM#8) object attributes and services are as indicated
in Table 39.
Table 39 Assembly-ISPM#8 Object Instance
Attributes and Services
Assembly-ISPM#8
Class ID = 148, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.15 Assembly-ISPM#9 –– The presentation of the
Assembly #9 In-Situ Particle Monitor (Assembly-
ISPM#9) object attributes and services are as indicated
in Table 40.
Table 40 Assembly-ISPM#9 Object Instance
Attributes and Services
Assembly-ISPM#9
Class ID = 149, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4 Specific Device Model for Endpoint Device
These sections detail the network mapping required to
support the Specific Device Model for Endpoint
Devices. Table 41 summarizes the Endpoint Device
object types. Subsequent Tables 42 to 48 detail the
attributes and services associated with each Endpoint
Device object type.
Table 41 Endpoint Device Object Types
SDM Object
Identifier
Object Name Modbus
Class ID
EPD1 (DM) Device Manager 1
EPD2 (SAC) Sensor Actuator
Controller
2
EPD3 Sensor-BI-TH-EP 150
EPD4 Assembly-EPD#1 151
EPD5 Assembly-EPD#2 152
EPD6 Assembly-EPD#3 153
EPD7 Assembly-EPD#4 154
9.4.1 Device Manager The presentation of the
Device Manager object attributes and services that are
specified in the CDM is specified in Section 7. The
presentation of the extended Device Manager object
attributes and services that are specified in the SDM for
Endpoint Devices is specified in Table 42.
Table 42 DM Object Instance Attributes and
Services
Device Manger (DM)
Class ID = 0001, Instance ID = 0001
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4.2 Sensor Actuator Controller The presentation
of the Sensor Actuator Controller object attributes and
services that are specified in the CDM is specified in
Section 7. The presentation of the extended Sensor
Actuator Controller object attributes and services that
are specified in the SDM for Endpoint Devices is
specified in Table 43.
Table 43 SAC Object Instance Attributes and
Services
Sensor Actuator Controller (SAC)
Class ID = 0002, Instance ID = 0001
Attributes
ID Attribute Name SDM Tag
65 Number of Endpoint Objects SacA65
Services
ID Service Name SDM Tag
33 Reset Endpoint S33
34 Download Recipe S34
35 Upload Recipe S35
36 Calibrate S36