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SEMI E20-0697 © SEMI 1991, 2002 1 SEMI E20-0697 (Reapproved 1102) CLUSTER TOOL MODULE INTERF ACE: ELECTRIC AL POWER AND EMERGENCY OFF STANDARD This standard was technicall y approved by the Global Physical In terfaces an…

SEMI E19.5-0996 © SEMI 1978, 2003 4

5.1.1 Port Door — Dimension Al specifies the port

door radius. The gap between port door and port plate is

not specified, but should be kept to a minimum distance

to restrict particle transport.

5.1.2 Pod Guide Rails — The inside feature of the pod

guides rails of the port are specified by B1, B2, and B3.

The features provide alignment for the pod top.

5.1.3 Pod Hold-Down Latches — The available latch

area is specified by dimensions B1, B4, and B5 in

Figure 2. Latch detail dimensions are specified by D1

and D2 in Figure 3.

5.1.4 Pod Door Latch Pins — Two latch pins are

located around the port door center and are specified by

C1, C2, and C3.

5.1.5 Kinematic Pins — Three kinematic pins provide

registration of the pod door to port plate. Details and

locations of the kinematic pins are not specified in this

standard. They are being addressed in a separate

document currently under development.

5.1.6 Pod in Place Sensor — An optional sensor, for

the sensing of proper pod placement shall be located on

the port door as specified by E1 and E2. The sensor

shall have a minimum activation height of E3 and full

travel to the port plate.

5.2 Pod — The bottom surfaces of the pod body and

pod door shall conform to the specified port

dimensions. Although the pod dimensions are not

explicitly specified by this standard, the following

requirements apply. (Pod dimensions are being

addressed in a separate document currently under

development.)

5.2.1 The upper part of the pod body and the top

surface of the pod door must fit and hold in place the

wafer cassette, which will be specified in a separate

document currently under development.

5.2.2 The center of the wafers and pod door shall

coincide. The top surface of the pod door incorporates

kinematic features that position the cassette on the pod

door.

5.2.3 The bottom surface of the pod door at its

perimeter shall match the radius of the port door top

(dimension Al). The tolerances shall be chosen so that

the pod door does not extend over the port door in any

instance, even when the port door is built to its minimal

acceptable dimensions and potential variance between

kinematic pins and socket is considered. This is to

ensure an interference-free passage of the pod door

through the port opening.

5.2.4 The base of the pod body shall fit freely but with

close tolerance between the pod guide rails, which not

only hold the pod in place while the port is open, but

also provide proper alignment for closure of the pod at

the end of the open/close cycle.

6 Related Documents

The following articles describe the standard mechanical

interface concept:

6.1 “The Challenge to Control Contamination: A

Novel Technique for the IC Process,” The Journal of

Environmental Sciences, (May/June, 1984), page 23.

6.2 “SMIF, A Technology for Wafer Cassette Transfer

in VLSI Manufacturing,” Solid State Technology,

(July, 1984), page l11.

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E20-0697 © SEMI 1991, 2002 1

SEMI E20-0697 (Reapproved 1102)

CLUSTER TOOL MODULE INTERFACE: ELECTRICAL POWER AND

EMERGENCY OFF STANDARD

This standard was technically approved by the Global Physical Interfaces and Carriers Committee and is the

direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition

approved by the North American Physical Interfaces and Carriers Committee on July 21, 2002. Initially

available at www.semi.org October 2002; to be published November 2002. Orignally published in 1991;

previously published June 1997.

1 Purpose

1.1 The purpose of the standard is to specify the

Emergency Off capability to the modules of a cluster

tool; to allow module Emergency Off disconnect and

reconnect in a safe manner without removing power

from the rest of the tool; and to prevent power from

being applied to a module when its Emergency Off is

non-functional.

2 Scope

2.1 The standard deals with the delivery and

emergency interruption of electrical power to the

modules of a cluster tool.

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety health practices and determine the

applicability or regulatory limitations prior to use.

3 Impact

3.1 The standard requires that power can be delivered

to an individual module only if its Emergency Off is

functional. This does not preclude removal of power

from the module by non-emergency means.

3.2 The standard specifies the Emergency Off circuit

functions that must be provided at the Emergency Off

interfaces of a cluster tool, including the plug,

momentary bypass switch and bypass jumper plug.

Pinouts for the Emergency Off plug and bypass jumper

plug are specified.

4 Referenced Standards

4.1 SEMI Standards

SEMI E21 — Cluster Tool Module Interface:

Mechanical Interface and Wafer Transport Standard

4.2 Military Standards

1 Available through the Naval Publications and Forms Center, 5801

Tabor Avenue, Philadelphia, PA 19120-5099, USA. Telephone:

215.697.3321

MIL-C-26500E — General Specification for

Connectors — General Purpose, Electrical, Miniature,

Circular, Environmental Resisting

5 Terminology

5.1 Definitions

5.1.1 daisy-chained — Connected so that the removal

of one component causes the interruption of the circuit

to another component.

5.1.2 emergency off (EMO) — Fail-safe control switch

or circuit which, when de-energized, will stop the

operation of associated equipment and will shut off all

potential hazards outside the main power enclosure.

5.1.3 EMO interface — The location at which a

process or cassette module EMO cable is connected

into the cluster tool circuit.

6 Requirements

6.1 Power Distribution

6.1.1 Mains — Each cluster tool (as defined in SEMI

E21) shall have its power provided by one or more

contactors enabled by the EMO. The power is to be

delivered to one or more power distribution enclosures,

where voltage transformation may take place before

distribution to the module (as defined in SEMI E21).

6.1.2 Module Power Distribution — The power

distribution to each module is provided through a

dedicated circuit breaker in the power distribution

enclosure. The rated current and voltage in each circuit

is determined by the tool configuration. A discussion of

how this standard may be implemented is given in

Related Information R1-1.

6.1.3 Operation of the EMO — Activation of the EMO

shall not cause or allow an unsafe condition to exist

(see Related Information R1-2).

6.2 EMO Circuit

6.2.1 Description — Each module attached to the

cluster tool is to have at least one EMO button

operating an EMO switch (see Related Information R1-

3). The switches are daisy chained into a circuit, or

circuits, that disconnect the main power and any backup

power sources. The 24 VAC power to energize this

circuit is provided from within a main power enclosure,

so that the EMO circuit is independent of module

power. Each module EMO is connected to the chain at

its EMO interface. A momentary bypass switch, also

located at each module EMO interface, allows

separation of the module from the cluster tool without

tripping the EMO, provided that electrical power is

removed from the module by turning off the dedicated

circuit breaker (see Related Information R1-4). Jumpers

in the bypass jumper plug connect the EMO circuit in

series with contacts that open if the dedicated circuit

breaker is turned on.

6.2.2 Wiring — Copper wire used in the EMO circuits

shall be 0.82 mm

cross-section (#18 AWG) or larger.

6.2.3 Labeling — A label with the following legend is

to be affixed to the power distribution enclosure near

each module circuit breaker: Caution: Energizing this

circuit with the associated EMO bypass jumper plug

installed will interrupt power to the entire cluster tool.

6.3 Connection at EMO Interface

6.3.1 EMO Connector — The connector at the EMO

interface is reserved for EMO functions only. Metal

shell bayonet-type connectors are specified per MIL-C-

26500E as follows: MS24265R16B10SN on the panel,

and MS24266R16B10PN on the cable and on the EMO

bypass jumper plug. The receptacle is panel mounted at

the EMO interface and the plug is mounted on the

module EMO cable.

6.3.2 Module EMO Connector Pinouts — Pins 1 and 2

of the EMO cable plug connect across contacts in the

module EMO switch. In the receptacle, pins 1 and 2

connect to the EMO circuit and pins 3 and 4 connect

across the contacts specified in Section 6.2.1.

6.3.3 EMO Bypass Jumper Plug — Pin 1 is jumpered

to pin 4 and pin 2 is jumpered to pin 3 in the plug. This

will result in placing the contacts specified in Section

6.2.1 into the EMO circuit when the plug is installed.

NOTICE: The user’s attention is called to the

possibility that compliance with this standard may

require use of an invention covered by patent rights. By

publication of this standard, Semiconductor Equipment

and Materials International (SEMI) takes no position

respecting the validity of any patent rights asserted in

connection with any item mentioned in this standard. In

particular, users of the specification should be aware

that Drytek, Inc., A Unit of General Signal, 16 Jonspin

Road, Wilmington, MA 01887-1087, Phone: (508) 657-

3933, has neither claimed nor disclaimed that

compliance with this specification would require use of

an invention covered by one or more of its patents.

Users of this standard are expressly advised that

determination of any such patent rights, and the risk of

the infringement of such rights, are entirely their own

responsibility.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.