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SEMI F14-93 © SE MI 1993, 1999 1 SEMI F14-93 (Reapproved 0699) GUIDE FOR THE DESIGN OF GA S SOURCE EQUIPM ENT ENCLOSURES This standard w as technically reapproved by the G lobal Facilities Com mitte e and is the direct r…
SEMI F13-1101 © SEMI 1993, 2001 6
APPENDIX 1
NOTE: The material in this appendix is an official part of SEMI F13 and was approved by full letter ballot
procedures on August 27, 2001.
A1-1 Scope
A1-1.1 Under special circumstances, it may be
necessary to cease using a product and remove it from
the cabinet to a safer and/or less populated
environment. This can be done in a number of ways.
A1-1.2 If the cylinder valve cannot be opened or
closed, the gas supplier must be notified. Prior
arrangements between the supplier and user of
procedures should be in place, so that the required
actions can be readily accomplished.
A1-2 Transfer Out of Cylinder
A1-2.1 Close the low pressure isolation valve,
disconnect at the downstream side of either of the vent
valves and connect to a suitable receiver with means of
pumping if required. This depends upon knowledgeable
operators, and the procedure to be followed must reflect
the features of the particular GSCE and the product to
be transferred. Extreme caution must be observed.
A1-3 Removal of the Cylinder
A1-3.1 A cylinder with a faulty or questionable
cylinder valve may have to be removed. When a
redundant valve and disconnect is installed in the
pigtail, it may be closed, disconnected, and removed
with the cylinder with relative ease and security. When
a redundant valve is not present and a particular design
allows it, the purge inlet valve, vent valve, and the HP
isolation valve may be closed and removed with the
pigtail still connected to the questionable cylinder.
Adequate purging should precede this procedure.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F14-93 © SEMI 1993, 19991
SEMI F14-93 (Reapproved 0699)
GUIDE FOR THE DESIGN OF GAS SOURCE EQUIPMENT
ENCLOSURES
This standard was technically reapproved by the Global Facilities Committee and is the direct responsibility
of the North American Facilities Committee. Current edition approved by the North American Regional
Standards Committee on December 18, 1998. Initially available on www.semi.org February 1999; to be
published June 1999. Originally published in 1993.
Editorial changes were made to sections 3.1.1, 6.2.1, and 6.2.2.
1 Purpose
1.1 This document summarizes gas source equipment
enclosure design considerations. It is intended for use
by manufacturers and purchasers.
2 Scope
2.1 Design considerations pertaining to gas source
equipment enclosures are described herein.
Modifications required to accommodate specific gases,
cylinders, or unusual applications (e.g., process
equipment) are not addressed.
3 Referenced Documents
3.1 Various codes and ordinances apply in different
municipalities. These documents must be followed for
the installation and operation of these systems. These
codes may include:
3.1.1 NFPA Standards
1
NFPA 13 Installation of Sprinkler Systems
NFPA 69 Explosion Prevention Systems
NFPA 70 National Electrical Code
NFPA 91 Exhaust Systems for Air Conveying
Materials
3.1.2 ICBO Model Code
2
Uniform Fire Code, 1991 Edition
3.1.3 SEMI Safety Guideline
SEMI S4 Safety Guideline for the Segregation/
Separation of Gas Cylinders Contained in Cabinets
3.1.4 Other Publications
Industrial Ventilation, A Manual of Recommended
Practice
3
1
National Fire Protection Association, Batterymarch Park, Quincy,
MA 02269
2
International Conference of Building Officials, 5360 South
Workman Mill Road, Whittier, CA 90601
BOCA National Building Code
4
BOCA National Fire Prevention Code
4
Standard Building Code
5
3.1.5 Local Ordinances
As applicable.
4 Terminology
4.1 gas cylinder Usually means a high pressure
compressed gas cylinder governed by Department of
Transportation (DOT) regulations. It also refers to non-
DOT low pressure containers used for liquid product
having low vapor pressure.
4.2 gas source equipment enclosure (enclosure)
An enclosure for the storage of gas containers and
associated equipment.
5 Functions
5.1 Five important functions are provided by an
enclosure and its associated safety devices.
5.1.1 Leaking Gas Containment Personnel, equip-
ment, and the immediate working environment are
protected from the hazards of leaking gases.
5.1.2 Fire Protection Personnel and equipment are
protected from the consequences of internal and
external fires.
5.1.3 Mechanical Protection The cylinder and
associated equipment are protected from impact and
seismic forces. (For further information, see UFC 51,
Workstations and Fabrication Areas.)
5.1.4 Access Control Unauthorized persons are
inhibited from using gases and operating associated
3
American Conference of Governmental Industrial Hygienists, 6500
Glenway Avenue, Building D-7, Cincinnati, OH 45211
4
Building Officials & Code Administrators International, Inc., 4051
West Flossmoor Road, Country Club Hills, IL 60477
5
Southern Building Code Congress International, 900 Montclair
Road, Birmingham, AL 35213
SEMI F14-93 © SEMI 1993, 1999 2
equipment.
5.1.5 Gas Separation Gases that are chemically
incompatible or belong to dissimilar hazard classes
should be separated.
6 Design Considerations
6.1 Regulatory Requirements T he enclosure should
conform to local, state, and federal regulations.
6.2 Materials
6.2.1 Enclosure top, sides, and doors should be
constructed of 2.7 mm (12 gage) or thicker cold-rolled
sheet steel or other suitable material so as to provide
adequate mechanical stability.
6.2.2 Floors should be constructed of cold-rolled sheet
steel or other suitable material, typically 3.4 mm (10
gage) or thicker, so as to adequately resist deformation
by the heaviest intended cylinder.
6.2.3 Windows and skylights should be 6.5 mm (0.25
in) thick wired safety glass or other suitable material.
6.2.4 All materials should be noncombustible.
6.3 Dimensions The enclosure should completely
surround the gas cylinders and requisite accessory
equipment. The design should incorporate minimum
internal dimensions while still allowing safe and easy
access to cylinders and equipment.
6.3.1 Heights of shelves for short cylinders should be
adjustable so that cylinder valves and associated
equipment are readily accessible through the limited-
area access port.
6.3.2 Distances above cylinders should be adequate
for installation and operation of associated equipment.
6.4 Enclosure Interior Access
6.4.1 Door A gasketed door should enable safe and
convenient installation and removal of intended
cylinders, and installation, removal, and maintenance of
associated equipment. The door should be self-closing
and self-latching. The threshold should not interfere
with cylinder installation and removal.
6.4.2 Limited-Area Access Port The enclosure
should have one or more limited-area ports that enable
access to controls and associated equipment within the
enclosure without compromising the air velocity across
the face of the access port(s). The average air velocity
across the faces of access ports should not be less than
1 m/s (200 fpm); a minimum air velocity of 0.75 m/s
(150 fpm) should exist at any point.
6.4.2.1 Access ports should be self-closing.
6.4.3 Window One or more windows should be
provided to enable observation of equipment within the
enclosure without compromising enclosure integrity.
6.4.4 Security Lockable doors and access ports
should be provided when unauthorized access to the
enclosure interior must be precluded.
6.5 Ventilation The enclosure should enable
removal of leaking gas by local exhaust ventilation.
The advantages of local exhaust ventilation over
general ventilation are more fully described in NFPA
69, NFPA 91, and in Industrial Ventilation.
6.5.1 Exhaust Connection The enclosure should
enable connection to an exhaust system that will handle
the required exhaust at an average duct velocity that
does not exceed 8.5 m/s (1,700 fpm). The total exhaust
flow includes that across open access ports as well as
that through any supplementary air inlets.
6.5.2 Air Flow Path In addition to access ports, the
enclosure should include an air inlet located at the
extremity of the enclosure opposite from the exhaust
connection, so that ventilation of the entire enclosure is
provided. The air flow path should adequately
scavenge gas from all regions within the enclosure.
6.5.2.1 Structures (e.g., brackets or shelves) within the
enclosure should not adversely affect exhaust
capability.
6.5.2.2 Gaskets should be provided on all doors,
access ports, and other penetrations.
6.6 Fire Protection
6.6.1 Sprinklers Provisions for internal sprinklers
should be made when necessary.
6.6.1.1 Sprinklers should be capable of providing
adequate cooling to maintain cylinders and associated
equipment at a temperature that will not actuate relief
devices in the event of an internal or external fire.
6.6.1.2 Sprinkler actuation temperature should be
greater than the anticipated maximum operating
temperature of the enclosure interior under typical
operating conditions, but less than the cylinder pressure
relief device actuation temperature.
6.6.1.3 When the enclosure may be exposed to
corrosive atmospheres, corrosion-resistant sprinklers
should be provided. (For further information, see
NFPA 13, Corrosion-Resistant, Wax-Coated, or
Similar Sprinklers.)