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SEMI E88-1104 E © SEMI 1999, 2004 8 8.3.3.4 PAUSED (ACTIVE sub-state) — The Transfer command is not actively being exec uted by the stocker. This may be due to an i nternal equi pment error that does not immediately term…

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8.2.4 SC State Transition Table
Table 1 SC State Transition Table
Transition
#
Previous State Trigger New State Actions Comments
1 none SC Initiation. SC INIT S6F11
SCAutoInitiated
System runs through its startup
sequence.
2 SC INIT System started up
successfully. All carrier
movement stopped.
PAUSED S6F11
SCPaused
System ready.
3 PAUSED RESUME command. AUTO S6F11
SCAutoCompleted
System can now execute
remote commands based upon
other internal conditions
(Alarm, GEM ONLINE, etc).
4 AUTO PAUSE command. PAUSING S6F11
SCPauseInitiated
Carriers that are not moving
remain there. Carriers that are
moving must stop at the next
logical stopping point.
5 PAUSING RESUME command. AUTO S6F11
SCAutoCompleted
System can now execute
remote commands based upon
other internal conditions
(Alarm, GEM ONLINE, etc).
6 PAUSING All carrier movement has
completed.
PAUSED S6F11
SCPauseCompleted
System will accept and queue
new commands but will not
execute them.
No new movement will occur.
Outstanding Transfer
Commands will remain NOT
ACTIVE.
7 NO ALARMS Alarm Set. ALARMS S6F11
AlarmSet
8 ALARMS All Alarms cleared. NO
ALARMS
S6F11
AlarmCleared
9 ALARMS Alarm Set. ALARMS S6F11
AlarmSet
Alarm occurs when there is
already an outstanding alarm.
8.3 TRANSFER Command State Model
8.3.1 TRANSFER Command State Model Requirements
8.3.1.1 The TRANSFER command state model serves as the SEMI E30 Processing State Model. The purpose of the
TRANSFER command state model is to provide information to the host regarding the control of the TRANSFER
command. The TRANSFER command allows the host to manage carrier movement and scheduling. The control of
each TRANSFER command must independently support the TRANSFER command state model.
8.3.2 TRANSFER Command State Model Diagram
8.3.2.1 The TRANSFER command state model is detailed for Stocker SEM equipment in Figure 4.
8.3.3 TRANSFER Command State Definitions
8.3.3.1 QUEUED — SC has acknowledged and queued the TRANSFER command. TRANSFER command has not
been initiated.
8.3.3.2 ACTIVE — The carrier is involved in the physical aspect of the TRANSFER command. It is denoted by the
time spanned by command initiation to command completion.
8.3.3.3 TRANSFERRING (ACTIVE sub-state) — The transfer command is actively being executed by the stocker.
SEMI E88-1104
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© SEMI 1999, 2004 8
8.3.3.4 PAUSED (ACTIVE sub-state) — The Transfer command is not actively being executed by the stocker. This
may be due to an internal equipment error that does not immediately terminate the Transfer command
unsuccessfully. This would allow the Host or Operator the opportunity to retry the transfer.
8.3.3.5 CANCELING — The TRANSFER command cancel procedure is being performed to terminate a transfer
command which never entered the ACTIVE state (currently QUEUED). This state is entered via a CANCEL
remote command.
8.3.3.6 ABORTING — The TRANSFER command abort procedure is being performed to terminate a transfer
command which has entered the ACTIVE state. This state can only be entered via an ABORT remote command.
An unsuccessful transfer command completion will ultimately result from this state.
CANCELING
A
BORTING
A
CTIVE
TRANSFERRING
PAUSED
TRANSFERRING
PAUSED
45
6
7
QUEUED
3
8
9
2
1
H*
10
11
Figure 4
Generic Stocker SEM TRANSFER Command State Model Diagram
8.3.4 TRANSFER Command State Transition Table
Table 2 Transfer Command State Transition Table
Transition # Previous State Trigger New State Actions Comments
1 QUEUED The TRANSFER
command has been
initiated by the SC.
TRANSFER-
RING
S6F11
TransferInitiated
2 QUEUED Host sends CANCEL
command for a specified
TRANSFER command to
SC.
CANCELING S6F11
TransferCancel-
Initiated
TRANSFER command is to
be removed from the
TRANSFER command queue.
3 CANCELING The cancel procedure for
the TRANSFER command
has completed by the
stocker and the SC.
None S6F11
TransferCancel-
Completed
The carrier will still be
situated at the transfer source
location. The carrier may
now be included in a future
transfer.
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© SEMI 1999, 2004 9
Transition # Previous State Trigger New State Actions Comments
4 TRANSFER-
RING
The SC pauses execution
of the TRANSFER
command due to an
anomaly condition.
PAUSED S6F11
TransferPaused for
a specific
CommandID
It is an important distinction
to make that the TRANSFER
command is paused and not
just the transfer agent.
The Stocker Controller state
will be ALARM.
5 PAUSED The SC resumes execution
of the TRANSFER
command since the
anomaly condition has
been cleared.
TRANSFER-
RING
S6F11
TransferResumed
for a specific
CommandID
If this was the only remaining
stocker alarm, the Stocker
Controller state will transition
to NO ALARMS.
6 ACTIVE The TRANSFER
command has completed
by the stocker and SC
(either successfully or
unsuccessfully).
None S6F11
TransferComplete
d sent to Host with
appropriate
ResultCode
ResultCode = 0 if
successful
ResultCode is
nonzero if
unsuccessful
Carrier(s) could be located at
any location or port located
along the path of the transfer,
if the TRANSFER command
completed unsuccessfully.
Supplier Option — The
location of the carrier(s)
associated with an
unsuccessful transfer
command must be a legal
SourcePort for a new
TRANSFER command.
7 ACTIVE Host sends ABORT
command for a specified
TRANSFER command to
SC.
ABORTING S6F11
TransferAbort-
Initiated
8 ABORTING The abort procedure for
the TRANSFER command
has completed by the
stocker and SC.
None S6F11
TransferAbort-
Completed
Carrier could be located at
any location or port located
along the path of the ACTIVE
transfer.
Supplier Option — The
location of the carrier
associated with the aborted
transfer command must be a
legal SourcePort for issuing a
new TRANSFER command.
9 ABORTING TRANSFER command
cannot be aborted.
ACTIVE S6F11
TransferAbort-
Failed
TRANSFER command could
not be aborted due to the
physical state of the
equipment. Such conditions
must be documented by the
Stocker SEM equipment
Supplier.
10 CANCELING Transport system is unable
to cancel the TRANSFER
command because the
transfer is now ACTIVE.
TRANSFER-
RING
S6F11
TransferInitiated
11 CANCELING Transport system is unable
to cancel the TRANSFER
command and it is still
queued.
QUEUED
S6F11
TransferCancel-
Failed