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SEMI E38-1296 © SEMI 1995 , 1996 22 3. a verif icat ion phase to determine that actual handoff took place. This action completes the hando ff. The transport module is responsi ble for man aging constr aints on t he sim u…

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SEMI E38-1296 © SEMI 1995, 199621
• Reject incomplete, invalid, and unsupported
requests.
Transfer resource capabilities permitted, but not to be
required, by a service-user:
• Stop, Pause, and Resume of a transfer job.
• Manual atomic transfer start.
• Transfer job queuing and queued job Cancel.
• Transferring of material groups.
• Multiple concurrent transfer jobs.
• Notification of transfer events.
Cluster Controller to Attached Module Interface — The
AM transfer job creation is requested by the cluster
controller using the TRJobCreate service. If the
intratool port resource accepts the job, it coordinates
with and directs the transport module to achieve the
material handoff. The AM transfer job comprises an
atomic transfer for material which is to receive it from,
or send it to, the transport module.
The intratool port resource shall support the
TRJobCommand Abort service, which ceases any
transfer activity and terminates the job. The intratool
port resource reports transfer job milestones achieved to
the cluster controller using the TRJobAlert service.
The intratool port resource coordinates material handoff
with the transport module through the transport module
to attached module interface, described below.
AM transfer job object attributes required to be
accessible through object services:
Attribute Name Description: Requirements
ObjType The object type: transfer job.
TRJobID Identifier for the transfer job.
(Ordered list of)
TRAtomicID
Ordered list of identifiers for the
atomic transfers in the transfer job:
one atomic transfer for each material.
(List of)TRJobState All concurrent substates of the
transfer job.
AM atomic transfer object attributes required to be
accessible through object services:
Attribute Name Description: Requirements
ObjType The object type: atomic transfer.
TRAtomicID Identifier for the atomic transfer.
TRLink Identifier to coordinate handoff.
TRPort AMPort through which transfer
occurs.
TRObjType Material type.
Attribute Name Description: Requirements
TRObjName Material identifier.
TRRole Role in transfer control: primary.
TRPartner Identifies partner transport module.
TRDirection Handoff direction: receive or send.
TRType Active/passive in transfer.
(List
of)TRAtomicState
All concurrent substates of the atomic
transfer.
Note that TRLocation is not required to be supported as
it is the responsibility of the attached module to
determine the appropriate location to be used based on
the material identifier.
Material movement messaging services required:
Message Name Description: Requirements
TRJobCreate Create transfer job: single material,
send or receive, auto-start.
TRJobCommand Command on transfer job: abort.
TRJobAlert Notification: started, complete.
Transfer resource capabilities required, but not already
specified above:
• Detect and report success or failure of a transfer
job.
• Reject incomplete, invalid, and unsupported
requests.
Transfer resource capabilities permitted, but not to be
required, by a service-user:
• Stop, Pause, and Resume of a transfer job.
• Manual atomic transfer start.
• Transfer job queuing and queued job Cancel.
• Transferring of material groups.
• Multiple concurrent transfer jobs.
• Notification of transfer events.
Transport Module to Attached Module Interface — The
control interface for the handoff of material between the
end effector of a transport module and any attached
module supports a sequence of three phases:
1. a synchronization phase that establishes that both
the attached module intratool port resource and the
transport module transfer resource are ready to
handoff the material.
2. a physical handoff phase controlled by the intratool
port resource.
SEMI E38-1296 © SEMI 1995, 1996 22
3. a verification phase to determine that actual
handoff took place. This action completes the
handoff.
The transport module is responsible for managing
constraints on the simultaneous opening of isolation
valves as it relates to contamination of the transport
module's environment by that of an attached module, as
well as cross-contamination between modules. The
attached module ensures that its environment will not
contaminate the transport module before synchronizing.
The rules for re-establishing isolation at verification are
determined by the transport module.
The synchronization between the transfer resource and
the intratool port resource is achieved by each,
indicating readiness to transfer the material, using the
HOReady service. Once both partners have received the
HOReady, the intratool port resource directs the
physical handoff. The intratool port resource commands
the transfer resource using the defined HOCommand
services. Once the physical handoff is complete, the
intratool port resource requests verification using the
HOVerify service.
The transfer resource and intratool port resource shall
support the HOCancelReady service which cancels a
previously sent HOReady while still in the
synchronization phase. The transfer resource shall
support the HOHalt service, which ceases any transfer
activity and terminates the handoff.
Material movement messaging services required:
Message Name Description: Requirements
HOReady Synchronize with partner.
HOCommand Command to the transport resource to
perform an activity in the transfer
envelope. Detailed below.
HOVerify Verification of handoff completion
with transfer resource.
HOCancelReady Rescinds previous HOReady
message.
HOHalt Command to the partner to stop all
action.
HOCommands to be supported by the transfer resource:
Command Description: Requirements
Pick Commands the transfer resource to
take all actions necessary to remove
the material from the intratool port.
Place Commands the transfer resource to
take all actions necessary to place the
material in the intratool port.
Command Description: Requirements
Extend Commands the transfer resource to
reach into the intratool port to a
predefined position at which the
material can be accepted or released.
Retract Commands the transfer resource to
withdraw from the intratool port.
Where the robotic hardware does not provide for
vertical motion, Pick and Place are not required to be
supported.
Transfer partner capabilities required, but not already
specified above:
• Detect and report success or failure of handoff
commands.
• Detect and report success or failure of the handoff,
through the verification.
• Reject incomplete, invalid, and unsupported
requests.
Transfer resource capabilities permitted, but not to be
required, by either partner:
• Multiple concurrent handoffs.
• Additional handoff commands.
8.3.2 Intertool Material Movement Services —
Factory-to-cluster tool carrier or single material
input/output management across a cluster tool module
communications interface is achieved using the
intertool material movement services. These services
provide the communications and behavior required of
the intertool port resource by the intertool material
movement models through defining the CM
input/output transfer job object and its operations.
This standard specifies only the required
communication between the cluster controller and the
cassette module and does not assume automated
material movement in the factory. The CM input/output
transfer job is compliant with SEMI E32 (Material
Movement Management) and may be extended to
support automated material movement in the factory.
The CM input/output transfer job creation is requested
by the cluster controller using the TRJobCreate service.
If the intertool port resource accepts the job, it
coordinates with the operator or some entity to achieve
the material handoff. The CM input/output transfer job
comprises an atomic transfer for a cassette or single
material which is to receive it from, or send it to, the
factory.
The intertool port resource shall support the
TRJobCommand Abort service, which ceases any
SEMI E38-1296 © SEMI 1995, 199623
transfer activity and terminates the job. The intertool
port resource reports transfer job milestones achieved to
the cluster controller using the TRJobAlert service.
CM input/output transfer job object attributes required
to be accessible through object services:
Attribute Name Description: Requirements
ObjType The object type: transfer job.
TRJobID Identifier for the transfer job.
(Ordered list of)
TRAtomicID
Ordered list of identifiers for the
atomic transfers in the transfer job:
one atomic transfer for each material.
(List of)TRJobState All concurrent substates of the
transfer job.
Atomic transfer object attributes required to be
accessible through object services:
Attribute Name Description: Requirements
ObjType The object type: atomic transfer.
TRAtomicID Identifier for the atomic transfer.
TRLink Identifier to coordinate handoff: none.
TRPort CMPort through which transfer
occurs.
TRObjType Material Type: cassette or single
material.
TRObjName Material identifier.
TRRole Role in transfer control: secondary.
TRPartner Identifies partner if automated: none.
TRDirection Handoff direction: receive or send.
TRType Active/passive in transfer: passive.
(List
of)TRAtomicState
All concurrent substates of the atomic
transfer.
The requirements above indicate the settings if the
transfer is to be manual, with the operator. The
attributes TRLink, TRRole, TRPartner, and TRType are
not significant in this situation. These become
significant in automated material transfer.
Material movement messaging services required:
Message Name Description: Requirements
TRJobCreate Create transfer job: single material
send or receive, auto-start.
TRJobCommand Command on transfer job: abort.
TRJobAlert Notification: started, complete.
Intertool port resource capabilities required, but not
already specified above:
• Detect and report success or failure of a transfer
job.
• Reject incomplete, invalid, and unsupported
requests.
Intertool port resource capabilities permitted, but not to
be required, by a service-user:
• Automated transfer of material within factory.
• Stop, Pause, and Resume of a transfer job.
• Manual atomic transfer start.
• Transfer job queuing and queued job Cancel.
• Transferring of material groups.
• Multiple concurrent transfer jobs.
• Notification of transfer events.
8.3.3 Carrier Mapping Services — Mapping of
material in carriers across a cluster tool module
communications interface is achieved using the carrier
mapping services. These services provide the
communications required of the appropriate module
resources by the material models through defining the
material slot object.
The carrier-mapping services are fully specified in
terms of the material slot attributes accessed through
the get and set services of SEMI E39 (Object Services
Standard: Concepts, Behavior, and Services). Cluster
tool module communications require full compliance
with the information, behavior, and messaging services
of the fundamental requirements of that standard.
The mapping information is only of interest to the
cluster tool for a carrier contained in the module
resource. The material slot objects are, therefore,
associated with, and managed by, the module resource
which uniquely identifies all of its material slots. The
carrier-mapping services provide for communication of
material slot information in both directions between the
cluster controller and the module resource. The
information communicated is material presence and
material identification. Whether the material presence is
detected by the module resource or determined by the
cluster controller is application-specific. This is also the
case for material identification.
A material slot may be assigned the identifier of
material which is not yet occupying the material slot.
This provides for determination by the cluster controller
of which material slot the material is to be moved into
when it arrives at the module.
Material slot object attributes required to be accessible
through object services are detailed in Table 2.