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SEMI E98-1102 © SEMI 2000, 2002 1 SEMI E98-1102 PROVISIONAL STANDARD FOR TH E OBJECT- BASED EQUIPMENT MODEL (OBEM) This provisional standard was technicall y approved by th e Global Information and Control Committee and …

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SEMI E97-0200A © SEMI 200055
string eventSubject;
Global::TimeStamp eventTimeStamp;
ComponentManagerStateChangedFilters eventFilterData;
Global::Properties eventNews;
ComponentManager aComponentManager;
};
const string ComponentManagerRegistrationChangedSubject =
“/Factory/ComponentManager/ComponentManagerRegistrationChanged”
;
enum RegistrationState {
RegistrationUndefined,
Registered,
NotRegistered };
void makeRegistered (in MESFactory aFactory)
raises (Global::FrameworkErrorSignal,
Global::InvalidStateTransitionSignal);
void makeNotRegistered (in MESFactory aFactory)
raises (Global::FrameworkErrorSignal,
Global::InvalidStateTransitionSignal);
void makeStartingUp ( )
raises (Global::FrameworkErrorSignal,
Global::InvalidStateTransitionSignal);
void makeShuttingDown ( )
raises (Global::FrameworkErrorSignal,
Global::InvalidStateTransitionSignal);
void makeStopped ( )
raises (Global::FrameworkErrorSignal,
Global::InvalidStateTransitionSignal);
boolean isStopped ( )
raises (Global::FrameworkErrorSignal);
boolean isStartingUp ( )
raises (Global::FrameworkErrorSignal);
boolean isShuttingDown ( )
raises (Global::FrameworkErrorSignal);
boolean isNotRegistered ( )
raises (Global::FrameworkErrorSignal);
boolean isRegistered ( )
raises (Global::FrameworkErrorSignal);
}; // ComponentManager
}; // module FactoryOperations
#endif // _CIMFW_FACTORY_OPERATIONS_
}; // module CIMFW
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particular application. The determination of the suitability of the standard is solely the responsibility of the user.
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standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E98-1102 © SEMI 2000, 2002 1
SEMI E98-1102
PROVISIONAL STANDARD FOR THE OBJECT- BASED EQUIPMENT
MODEL (OBEM)
This provisional standard was technically approved by the Global Information and Control Committee and is
the direct responsibility of the North American Information and Control Committee. Current edition
approved by the North American Regional Standards Committee on November 27, 2001. Initially available
at www.semi.org December 2001; to be published March 2002. Originally published February 2000;
previously published March 2002.
NOTICE: The designation of SEMI E98 was updated during the 1102 publishing cycle to reflect revisions to
SEMI E98.1.
1 Purpose
1.1 Purposes of the Object-Based Equipment Model
include the following:
• Define a standard model for interfacing to multi-
process equipment and other complex equipment.
• Define standard equipment components so that
communications can “discuss” component-related
issues.
• Provide an equipment model that can be easily
integrated with SEMI E81 CIM Framework
systems by connecting an OBEM-compliant
equipment to a Machine object.
1.2 The purpose of the Object-Based Equipment Model
(OBEM) standard is to provide definitions, services,
and behavior, as seen through communications with the
factory, for the common types of physical and logical
objects of which equipment is typically composed,
including the equipment itself. The definition of
standardized objects allows the equipment to describe
its makeup to the factory and provides the factory
visibility into the equipment.
2 Scope
2.1 This is a provisional standard that defines con-
cepts, behavior, and services to support the integration
of production equipment within a semiconductor fac-
tory. The scope of this standard includes all semicon-
ductor manufacturing equipment that provides an inter-
face to the factory host systems. Some services may
not be applicable to some material handling systems.
2.2 Sections that must be completed in order for the
provisional status of OBEM to be removed include the
following:
1. Section 11.2 — Access Management
2. Section 14 — OBEM Compliance
2.3 Detail standards will also be added in the future to
specify OBEM mappings to different protocols such as
SECS-II, CORBA IDL, and DCOM.
2.4 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 This standard is not intended to define the
attributes, behavior, or services of systems that are
aggregates of equipment, such as cells.
3.2 The decomposition of equipment into different
objects is chosen by the equipment supplier to map the
physical equipment to the characteristics of the objects
defined by this standard.
3.3 Object-oriented technology is not required for
implementations of OBEM. However, object-oriented
implementations should be compatible with OBEM.
4 Referenced Standards
4.1 This section lists documents referenced by this
standard.
4.2 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E10 — Standard for Definition and Measurement
of Equipment Reliability, Availability, and
Maintainability (RAM)
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Provisional Specification for 300 mm
Tool Load Port
SEMI E30 — Generic Model for Communications and
Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
SEMI E98-1102 © SEMI 2000, 2002 2
SEMI E40 — Standard for Processing Management
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard:
Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting
SEMI E54 — Sensor/Actuator Network Standard
SEMI E58 — Automated Reliability, Availability, and
Maintainability Standard (ARAMS): Concepts,
Behavior, and Services
SEMI E81 — Provisional Specification for CIM
Framework Domain Architecture
SEMI E87 — Provisional Specification for Carrier
Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Provisional Specification for Control Job
Management
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 AGV — Automated Guided Vehicle
5.1.2 AMHS — Automated Material Handling System
5.1.3 APC — Advanced Process Control
5.1.4 ARAMS — Automated Reliability, Availability,
and Maintainability Standard (SEMI E58)
5.1.5 CIM — Computer Integrated Manufacturing
5.1.6 CJM — Control Job Management
5.1.7 CMS — Carrier Management Standard
5.1.8 FDC — Fault Detection Control
5.1.9 FIMS — Front-Opening Interface Mechanical
Standard (reference SEMI E62)
5.1.10 FOUP — Front-Opening Unified Pod
5.1.11 FPD — Flat Panel Display
5.1.12 OBEM — Object-Based Equipment Model
5.1.13 OSS — Object Services Standard (SEMI E39)
5.1.14 PGV — Personal Guided Vehicle
5.1.15 R2R — Run-to-Run Control
5.1.16 RMS — Recipe Management Standard (SEMI
E42)
5.1.17 SMIF — Standard Mechanical Interface (SEMI
E19)
5.1.18 STS — Specification for Substrate Tracking