semi合集-English.pdf - 第3646页

SEMI E142-0705 © SEMI 2005 8 Attribute Name Definition Access Reqd Form Orientation Coordinate sy stem attri bute that defines the orientation of the substrate in relation to the map data. This variable will increase in …

SEMI E142-0705 © SEMI 2005 7

Attribute Name Definition Access Reqd Form

GoodDevices The total number of “good” devices on the substrate. The

definition of “good” is beyond the scope of this document.

RO N Positive Integer

SupplierName Name of the supplier of the substrate. RO N Text

CreateDate Date and time when the map data is acquired: formatted a

YYYYMMDDhhmmsscc (year-month-date-hour-minute-

second-centisecond).

RO N Text

LastModified Date and time when the map data was last modified:

formatted as YYYYMMDDhhmmsscc (year-month-date-

hour-minute-second-centisecond).

RO N Text

Status Status of map data supplying process or preceding

process.

RO N Text

11.2 AliasId

11.2.1 The AliasId object contains other substrate identifiers that may be used to trace the substrate throughout the

substrate’s life cycle.

Table 7 AliasId Attributes

Attribute Name Definition Access Reqd Form

Type Type of identifier, e.g. “FrontsideId”, “BacksideId”,

“WaferId”, “FrameId” .

RO Y Text

Value Value of the identifier. RO Y Text 1 to 32 characters

12 SubstrateMap

12.1 The SubstrateMap object relates to a single substrate and layout and contains a list of one or more Overlay

objects. It may also include a substrate type specific object depending on the value of [SubstrateType].

12.2 If there are more than one SubstrateMap assigned to a Substrate and Layout combination they should differ in

either their Orientation, OriginLocation or both. For example there may be a map for the top side and one for the

bottom side of a Layout.

Table 8 SubstrateMap Attributes

Attribute Name Definition Access Reqd Form

SubstrateType A reference to the type of substrate to which the map data

applies.

RO Y Text

SubstrateId A reference to the substrate identifier to which the map

data applies.

RO Y Text 1 to 32 characters

LayoutSpecifier A reference to the layout to which the map data applies.

The LayoutSpecifier defines the full path, using / as a

delimiter from the top level layout to the layout to be

specified for example; ”WaferLayout/L1/DeviceLayout”.

RO Y Text

SubstrateSide Coordinate system attribute that defines the side of the

substrate. Restricted to the values;

TopSide*

Bottom Side

* Default value if this item is not present.

RO N Text

SEMI E142-0705 © SEMI 2005 8

Attribute Name Definition Access Reqd Form

Orientation Coordinate system attribute that defines the orientation of

the substrate in relation to the map data. This variable

will increase in the right (clockwise) direction from 0°. It

is restricted to values from 0°-359°.

* Default value if this item is not present is 0°..

RO N Integer

OriginLocation Coordinate system attribute that defines location of the

coordinate system origin. Restricted to the values (see

Figure A2-1 for an example);

LowerLeft*

UpperLeft

LowerRight

UpperRight

Center

* Default value if this item is not present.

RO N Text

AxisDirection Coordinate system attribute that defines direction in whic

the Y and X axis, respectively increase. Restricted to the

values (see Figure A2-1 for an example);

UpRight*

DownRight

UpLeft

DownLeft

* Default value if this item is not present.

RO N Text

13 Overlay

13.1 The Overlay object is an array of data that corresponds to the dimensions on the Layout to which the

containing SubstrateMap is assigned. The specialized objects (e.g. BinCodeMap, DeviceIdMap, TransferMap) are

extensions of the Overlay object which each define a different type of data. See the definitions of the specialized

objects in the sections below. An Overlay object may have one or more ReferenceDevice objects.

Table 9 Overlay Attributes

Attribute Name Definition Access Reqd Form

MapName A name that describes the purpose of the bin codes in the

map. Possible examples include: “CellStatus”,

“DefectCode”, “MarkGrade”, “PackageGrade”,

“SortGrade”, DeviceId”, “Transfer”.

RO Y Text

MapVersion The version is used to distinguish between multiple versions

of maps for the same substrate with the same MapName.

RO N Text

13.2 ReferenceDevice

13.2.1 The ReferenceDevice object defines a reference device on the substrate.

Table 10 ReferenceDevice Attributes

Attribute Name Definition Access Reqd Form

Coordinates X and Y coordinate of the reference device to align device

matrix on physical substrate with the map data.

RO Y LogicalCoordinates

(see Table 3)

Position Offset of the center of a reference device in the X and Y

directions from the center of substrate.

RO N XYDimensions

(see Table 4)

SEMI E142-0705 © SEMI 2005 9

Attribute Name Definition Access Reqd Form

Name Descriptive name for the reference, e.g. “First Device”,

“Prober Origin”

RO N Text

13.3 BinCodeMap

13.3.1 The BinCodeMap object contains a list of zero or more BinDefinition objects and a list of one or more

BinCode objects.

Table 11 BinCodeMap Attributes

Attribute Name Definition Access Reqd Form

BinType

#1, #2

The format in which the each device will be represented.

The following values are reserved:

BinType = ‘Ascii’: Single ASCII character (1 byte per

device)

BinType = ‘Decimal’: 3 digit integer from 000 to 255 (1

byte per device)

BinType = ‘HexaDecimal’: 2 digit Hexadecimal value from

00 to FF (1 byte per device)

BinType = ‘Integer2’: 4 digit Hexadecimal value from 0000

to FFFF (2 bytes per device)

RO Y Text

NullBin Code to indicate no device or not measured device in

BinCode.Values. It should be represented according to

BinType.

RO Y Text

For readability when BinType = ‘Decimal’ there must be spaces added between each device and each row of devices should be on a new line.

When BinType = ‘Ascii’ or ‘Hexadecimal’ or ‘Integer2’ there must not be spaces between each device and for readability, each row should be

on a new line.

13.3.2 BinCode

13.3.2.1 The BinCode contains the actual bin code values.

Table 12 BinCode Attributes

Attribute Name Definition Access Reqd Form

Values The concatentation of bin code values represented according

to the value of BinCodeMap.BinType. [Values] may contain

just one bin code, a row of bin codes or the entire map of bin

codes.

RO Y Text

X The X coordinate of the device to which the first bin code

applies, according to the values of SubstrateMap coordinate

attributes; SubstrateSide, Orientation, OriginLocation, and

AxisDirection.

If omitted X = 0.

RO N Integer

Y The Y coordinate of the device to which the first bin code

applies, according to the values of SubstrateMap coordinate

attributes; SubstrateSide, Orientation, OriginLocation, and

AxisDirection.

If omitted Y is derived from the ordinal position of the

BinCode object in the parent BinCodeMap object. The first

BinCode object is the top row.

RO N Integer