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SEMI E82-0705 © SEMI 1999, 2005 11 Transition # Previous State Trigger New State Actions Comment 7 ACQUIRING The carrier handoff parallel I/O completes for the vehicle to acquire (load) the transfer unit and starts for t…

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SEMI E82-0705 © SEMI 1999, 2005 10
7.4.3 Vehicle State Definitions
7.4.3.1 INSTALLED — The vehicle is available or being used for TRANSFER commands. All enabled collection
events and alarms will be sent to the Host for vehicles in this state.
7.4.3.2 REMOVED — The vehicle is not available for Host initiated TRANSFER commands. No collection events
or alarms will be sent to the Host for vehicles in this state.
7.4.3.3 ASSIGNED (INSTALLED sub-state) — Vehicle is allocated to a TRANSFER command.
7.4.3.4 NOT ASSIGNED (INSTALLED sub-state) — Vehicle is not allocated to a TRANSFER command. The
vehicle may contain a carrier as the result of a command being aborted.
7.4.3.5 ENROUTE (ASSIGNED sub-state) — The vehicle is on its way to a transfer port. This is the default entry
into the ASSIGNED state since it must be entered for the host to track vehicle metrics completely and adequately.
7.4.3.6 PARKED (ASSIGNED sub-state) — This state occurs when the vehicle is in the following conditions:
After the arrival of the vehicle is completed and before the action of the transfer agent is started.
After the action of the transfer agent has completed and before the departure of the vehicle.
After continuous actions of the transfer agent (e.g., acquire/acquire and deposit/deposit) are completed.
7.4.3.7 ACQUIRING (ASSIGNED sub-state) — The vehicle is currently involved in carrier acquire (one or more
carriers possible depending on vehicle limitations).
7.4.3.8 DEPOSITING (ASSIGNED sub-state) — The vehicle is currently involved in carrier deposit (one or more
carriers possible depending on vehicle limitations).
7.4.4 Vehicle State Transition Table
Table 3 Vehicle State Transition Table
Transition # Previous State Trigger New State Actions Comment
1 ENROUTE Vehicle arrives at a
transfer port associated
with an ACTIVE transfer
command.
PARKED S6F11
VehicleArrived
TransferPort may be an
internal transfer port.
2 PARKED Vehicle departs a transfer
port associated with an
ACTIVE transfer
command.
ENROUTE S6F11
VehicleDeparted
TransferPort may be an
internal transfer port.
3 PARKED The carrier handoff
parallel I/O starts for the
vehicle to acquire (load)
the transfer unit.
ACQUIRING S6F11
VehicleAcquire-
Started
If the vehicle is a passive
type then the acquire
occurs by the robot on the
other equipment loading
the transfer unit to the
vehicle.
4 ACQUIRING The carrier handoff
parallel I/O completes for
the vehicle to acquire
(load) the transfer unit.
PARKED S6F11
VehicleAcquire-
Completed
5 PARKED The carrier handoff
parallel I/O starts for the
vehicle to deposit (unload)
the transfer unit.
DEPOSITING S6F11
VehicleDeposit-
Started
If the vehicle is a passive
type then the deposit
occurs by the robot on the
other equipment unloading
the transfer unit from the
vehicle.
6 DEPOSITING The carrier handoff
parallel I/O completes for
the vehicle to deposit
(unload) the transfer unit.
PARKED S6F11
VehicleDeposit-
Completed
SEMI E82-0705 © SEMI 1999, 2005 11
Transition # Previous State Trigger New State Actions Comment
7 ACQUIRING The carrier handoff
parallel I/O completes for
the vehicle to acquire
(load) the transfer unit and
starts for the vehicle to
deposit (unload) the
carrier.
DEPOSITING S6F11
VehicleDeposit-
Started
Carrier Replace
See scenario for an
example.
8 DEPOSITING The carrier handoff
parallel I/O completes for
the vehicle to deposit
(unload) the transfer unit
and starts for the vehicle
to acquire (load) the
carrier.
ACQUIRING S6F11
VehicleAcquire-
Started
Carrier Replace
See scenario for an
example.
9 ASSIGNED Vehicle is no longer being
utilized for the specified
command.
NOT ASSIGNED S6F11
Vehicle-Unassigned
This could be the result of
the command being
completed or aborted. It
could also be the result of
the TSC scheduling
algorithms assigning this
vehicle to another
command and/or another
vehicle being assigned to
this command.
10 NOT
ASSIGNED
Vehicle is allocated to a
TRANSFER command.
ASSIGNED S6F11
VehicleAssigned
11 INSTALLED Vehicle is removed from
use of transfer commands.
REMOVED S6F11
VehicleRemoved
12 REMOVED Vehicle is installed for use
of transfer commands.
INSTALLED S6F11
VehicleInstalled
7.5 IBSEM Carrier State Model
7.5.1 IBSEM Carrier State Model Requirements
7.5.1.1 The purpose of the carrier state model is to provide information to the host regarding carrier tracking (the
Host will not control carriers). Each carrier must comply with the carrier state model.
7.5.2 IBSEM Carrier State Model
INSTALLED
12
Figure 5
Generic IBSEM Carrier State Model Diagram
7.5.3 Carrier State Definitions
7.5.3.1 INSTALLED — The carrier is in the physical domain of the TSC.
SEMI E82-0705 © SEMI 1999, 2005 12
7.5.4 Carrier State Transition Table
Table 4 Carrier State Transition Table
Transition # Previous State Trigger New State Actions Comments
1 None The carrier enters the
physical domain of the TSC.
INSTALLED S6F11 CarrierInstalled
2 INSTALLED The carrier is removed from
the physical domain of the
TSC.
None S6F11 CarrierRemoved
7.6 Port Transfer State Model
7.6.1 Port Transfer State Model Requirements
7.6.1.1 The purpose of the port transfer state model is to provided information to the host for the use in accessing
ports. This may permit the host and stocker to utilize ports that are in service while avoiding the use of ports that are
not in service.
7.6.2 Port Transfer State Model
IN SERVICE
C
READY TO
LOAD
READY TO
UNLOAD
TRANSFER
BLOCKED
5
6
7
8
4
C
1
OUT OF
SERVICE
2 3
Figure 6
Port State Model Diagram