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SEMI M23-0703 © SEMI 1993, 2003 6 Figures 1A and 1B Both Diagr ams show a n InP Wafer w ith Surface Ori entation A and Fl at Option Dove-Tail

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SEMI M23-0703 © SEMI 1993, 2003 5
Table 1 Equivalent Orientations — Dove-Tail Option
Surface orientation:
(100) (100)
)001( )001(
Primary flat location:
)110(
(011)
)101( )110(
Secondary flat location:
)110( )101(
(011)
)110(
For Surface orientation B, the off-orientation tilt direction
is toward: (See NOTE 1)
)011(
(110)
)101( )011(
Table 2 Equivalent Orientation — V-Groove Option
Surface orientation:
(100) (100)
)001( )001(
Primary flat location:
)101( )110( )110(
(011)
Secondary flat location:
(011)
)110( )110( )101(
For Surface orientation B, the off-orientation tilt direction
is toward:
(110)
)011( )011( )101(
The Symmetry of InP crystal structure allows other Miller indices to be used for identifying surface and flat orientations. This table lists various
possibilities that meet requirements for the above specific option.
NOTE 1: For Dove-Tail Option, any of the 110 tilt directions are considered equivalent.
SEMI M23-0703 © SEMI 1993, 2003 6
Figures 1A and 1B
Both Diagrams show an InP Wafer with Surface Orientation A and Flat Option Dove-Tail
SEMI M23-0703 © SEMI 1993, 2003 7
Figures 2A and 2B
Both Diagrams show an InP Wafer with Surface Orientation A and Flat Option V-Groove