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SEMI S13-0305 © SEMI 1998, 2005 13 RELATED INFORMATION 3 DOCUMENT CRITERIA INCLUDED IN SEMI S8 NOTICE : This rel ated inform ation is not an official part of SEMI S 13 and was derived from SEMI S8. T h is related informa…

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SEMI S13-0305 © SEMI 1998, 2005 12
instructions for energy isolation (“lockout/tagout”) (refer to ¶17.2);
descriptions of the emergency off (EMO) and interlock functions;
a list of hazardous materials (e.g., lubricants, cleaners, coolants) required for maintenance, ancillary equipment
or peripheral operations, including anticipated change-out frequency, quantity, and potential for contamination
from the process;
a list of items that become solid waste as a result of the operation, maintenance, and servicing of the equipment,
and that are constructed of or contain substances whose disposal might be regulated (e.g., beryllium-containing
parts, vapor lamps, mercury switches, batteries, contaminated parts, maintenance wastes); and
maintenance and troubleshooting procedures needed to maintain the effectiveness of safety design features or
devices (i.e., engineering controls).
R2-8.1.4 ¶9.6.4 — Information should be provided regarding potential routes of unintended releases (see ¶21.2.4).
R2-8.1.5 ¶9.6.5 — Recommended decontamination and decommissioning procedures should be provided in
accordance with SEMI S12, and should include the following information:
identity of components and materials of construction, in sufficient detail to support recycling, refurbishment,
and reuse decisions (see ¶8.5.3); and
residual hazardous materials, or parts likely to become contaminated with hazardous materials, that may be in
the equipment prior to decommissioning.
NOTE 6: It is recommended that the manual state that changes to the typical process chemistry or to the equipment could alter
the anticipated environmental impact.
R2-8.1.6 ¶9.6.6 — Maintenance Procedures with Potential Environmental Impacts — The supplier’s recommended
maintenance procedures should:
R2-8.1.6.1 Identify procedural steps during which releases might occur, and the nature of the releases; and identify
waste characteristics and methods to minimize the volume of effluents, wastes, or emissions generated during
maintenance procedures.
SEMI S13-0305 © SEMI 1998, 2005 13
RELATED INFORMATION 3
DOCUMENT CRITERIA INCLUDED IN SEMI S8
NOTICE: This related information is not an official part of SEMI S13 and was derived from SEMI S8. This
related information was approved for publication by a letter ballot on November 24, 2004.
R3-1 Purpose of this Related Information
R3-1.1 This related information contains criteria for documents that are presented in SEMI S8.
R3-1.2 The criteria in this related information are included in SEMI S8 as of the time this related information was
written, and are included herein for the convenience of users of this document.
NOTE 1: The information in this related information may not be current with the source document. The source document
contains the actual documentation criteria.
R3-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S8.
NOTE 2: It was the intent of the Task Force responsible for SEMI S13 that this related information be updated to incorporate
future revisions of SEMI S8 related to criteria for documents.
R3-2 Documentation
R3-2.1 SEMI S8-0701, ¶7.2 — Supplier provided documentation should include administrative controls intended
by the supplier to mitigate ergonomic risks.
R3-2.2 SEMI S8-0701, ¶7.3 — Supplier provided documentation should illustrate any installation requirement
necessary to meet SEMI S8 guidelines (e.g., Diagram should show clearance area required for opening hinged
panels, operator working area, allowable range of vertical foot adjustment to keep ergonomic measurements within
SESC acceptable limits, etc.).
SEMI S13-0305 © SEMI 1998, 2005 14
RELATED INFORMATION 4
DOCUMENT CRITERIA INCLUDED IN SEMI S16
NOTICE: This related information is not an official part of SEMI S13 and was derived from SEMI S16. This
related information was approved for publication by a letter ballot on November 24, 2004.
R4-1 Purpose of this Related Information
R4-1.1 This related information contains criteria for documents that are presented in SEMI S16.
R4-1.2 The criteria in this related information are included in SEMI S16 as of the time this related information was
written, and are included herein for the convenience of users of this document.
NOTE 1: The information in this related information may not be current with the source document. The source document
contains the actual documentation criteria.
R4-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S16.
NOTE 2: It was the intent of the Task Force responsible for SEMI S13 that this related information be updated to incorporate
future revisions of SEMI S16 related to criteria for documents.
R4-2 Information Provided by the Supplier
R4-2.1 SEMI S16-0600, §7 ¶7.1 — The supplier should provide the equipment owner with operation and/or
maintenance manuals or similar documents drafted according to SEMI S13, which include the following information
on the materials used in equipment, subassemblies and components upon the delivery of the equipment.
NOTE 3: The supplier may gather appropriate information at the time of design in conjunction with a disposal party.
R4-2.1.2 ¶7.1.1 — Primary materials of appropriate disassembleable unit in consideration with reuse, refurbishing,
recycling and disposal of each component such as chemicals (e.g., mercury), metals (e.g., stainless steel, steel, or
copper), plastics (e.g., ABS - i.e. Acrylonitrile Butadiene Styrene plastics - or non-combustible ABS), glass, or
ceramics.
R4-2.1.3 ¶7.1.2 — Describe opportunities for reuse, refurbishing or material recycling of every component or
recyclable subassembly. If there are no opportunities, a waste disposal method should be recommended based on
assumption of usage with baseline process by the supplier. (e.g. ABS can be recycled after decontamination as
class X plastic and mercury requires reclaim or hazardous waste disposal.)
R4-2.1.4 ¶7.1.3 — Disassembly procedure
R4-2.1.4.1 ¶7.1.3.1 — A disassembly procedure should be recommended by the supplier to the level required to
facilitate complete decontamination and material separation for waste disposal.
R4-2.1.4.2 ¶7.1.3.2 — The disassembly procedure should include procedures to remove all hazardous energies.
R4-2.1.4.3 ¶7.1.3.3 — The disassembly procedure should prevent the mixture of incompatible chemicals. If it is
not feasible, administrative control procedures should be included.
R4-2.1.4.4 ¶7.1.3.4 — If the chemicals/materials described in ¶¶7.1.3.4.1 to 7.1.3.4.4 are hazardous, the
disassembly procedure should prevent the release of them to the environment. The chemicals include:
NOTE 4: Byproducts are changeable according to several kinds of conditions such as exhaust diameter/length/volume, chamber
volume/pressure/configuration, maintenance method/cycle, and evacuation frequency.
R4-2.1.4.5 ¶7.1.3.4.5 — The disassembly procedure should address any hazards of ionizing radiation sources, if
they are present, and address safe removal and storage procedures.
R4-2.1.5 ¶7.1.4 — Disposal procedure should be described by a safer way based on the result of risk assessment
such as SEMI S10 or EN 1050 and job hazard analysis.