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SEMI E30-1103 © SEMI 1992, 2003 37 Host Equipment Constant Nam elist Request: COMMENTS HOST EQUIPMENT COMMENTS Host constant namelist S2,F29--> request <-- S2,F30 Equipment constant namelist Operator Changes Equipm…

SEMI E30-1103 © SEMI 1992, 2003

4.4.5.2 Enhanced Remote Command Scenario

COMMENTS HOST EQUIPMENT COMMENT

Enhanced Remote Command S2,F49-->

<--S2,F50 EnhancedRemote Command

Acknowledge

[IF] Command Accepted

(HCACK = 0 or 4)

<--S6,F11 [THEN] Event Report-state

change or other collection

event occurrence.

Event Report Acknowledge S6,F12-->

4.5 Equipment Constants

4.5.1 Purpose — This capability provides a method for

the host to read and to change the value of selected

equipment constants on the equipment.

4.5.2 Definitions — None.

4.5.3 Description — This capability allows the host to

reconfigure equipment constants to support a variety of

situations. The following functions are included:

Host Sends Equipment Constants — Allows the host to

change the value of one or more equipment constants.

Host Equipment Constant Request — Allows the host

to determine the current value of equipment constants.

Host Equipment Constant Namelist Request — Allows

the host to retrieve basic information about the

equipment constants available at the equipment.

4.5.4 Requirements

— Equipment constants must be stored in non-volatile

memory.

— The equipment must be in a “safe” condition to

accept new constant(s) settings as defined by the

equipment manufacturer.

— The equipment must provide a collection event to

alert the host whenever an equipment constant is

changed by the operator. Information indicating

which constant was changed shall be available for

the event report.

4.5.5 Scenarios

Host Sends Equipment Constants:

COMMENTS HOST EQUIPMENT COMMENTS

Host sends S2,F15-->

equipment constants <-- S2,F16 EAC = 0 equipment sets

constants

Host Equipment Constants Request:

COMMENTS HOST EQUIPMENT COMMENTS

Host constant request S2,F13-->

<-- S2,F14 Equipment constant data

NOTE: This capability also can be accomplished using S6,F19 & S6,F20. See Section

4.2.

SEMI E30-1103 © SEMI 1992, 2003

Host Equipment Constant Namelist Request:

COMMENTS HOST EQUIPMENT COMMENTS

Host constant namelist S2,F29-->

request <-- S2,F30 Equipment constant namelist

Operator Changes Equipment Constant

COMMENTS HOST EQUIPMENT COMMENTS

Operator changes equipment

constant at equipment

operator console.

<-- S6,F11 Equipment reports equipment

constant change.

Host acknowledges event S6,F12-->

4.6 Process Program Management — Process

programs and recipes must be managed through

interaction between the equipment and the host system.

4.6.1 Purpose — Process program management

provides a means to transfer process programs or

recieps, and to share the management of those process

programs or recipes, between the host and equipment.

4.6.2 Definitions

PPError  A text data value with information about

verification errors of a process program that failed

verification. If the equipment provides an event for

recipe verification and/or recipe verification failure,

then PPError shall be a DVVAL. Otherwise, PPError

shall be an SV.

PPFormat  A variable (SV) indicating the type or

types of process programs and recipes that are

supported.

1 = Unformatted process programs

2 = Formatted process programs

3 = Both unformatted and formatted process programs

4 = Execution recipes

5 = Large unformatted process programs

6 = Large formatted process programs

7 = Both large unformatted and large formatted process

programs

8 = Large execution recipes

and a combination of these formats. See SEMI E5 for a

compete list.

4.6.2.1 Definitions for Process Programs

Process Program — A process program is the pre-

planned and reusable portion of the set of instructions,

settings, and parameters under control of the equipment

that determine the processing environment seen by the

manufactured object and that may be subject to change

between runs or processing cycles.

Process Program Identifier — A text string (PPID)

used to identify a process program.

Formatted Process Program — A process program that

is presented as an ordered sequence of command codes

with their associated parameters as dictated by S7,F23,

and S7,F26. Where formatted process programs are

supported, equipment must also provide information

sufficient to allow a user at the host to create, display,

modify, and partially verify their contents (for example,

that information provided in S7,F22).

Unformatted Process Program — An unformatted

process program is transferred without structure as the

single data item PPBODY (refer to SEMI E5 for a

complete description of PPBODY).

Process Program Change Event — The collection

event associated with the occurrence of the creation,

modification, or deletion of a process program by the

operator.

PPChangeName — A data value (DVVAL) containing

the PPID of the process program affected by the event

Process Program Change Event. See SEMI E5 for a full

definition of this variable data item.

PPChangeStatus — The action taken on the process

program named by PPChangeName. This variable is

valid for the collection event Process Program Change

Event. See SEMI E5 for a full definition of this variable

data item.

SEMI E30-1103 © SEMI 1992, 2003

PPExecName — The status variable containing the

PPID(s) of the currently selected process program(s).

See SEMI E5 for a full definition of this variable data

item.

PP-SELECT — The remote command used to select

one or more process programs for execution. The

process programs are specified by PPID via the

command parameter list.

Process Program Verification — Verification is syntax

checking of a process program. Verification ensures

only that a process program is structured correctly. It

does not ensure that the program has the correct

parameters to run a particular process or product (see

Process Program Validation). Equipment supporting

unformatted process programs should provide a

variable DVVAL PPError that provides information to

the user concerning the error or errors when an attempt

to verify a process program fails.

NOTE 14: It may not be possible for the equipment to verify

unformatted process programs other than to check the size of

the program and internal program checksums. Equipment has

no standard means of indicating the type of error encountered

in an unformatted process program.

Process Program Validation — Validation is type-and-

range checking of parameters in a process program, and

is performed after verification.

4.6.2.2 Definitions for Recipes

Execution recipe — A type of recipe stored by the

equipment for purposes of editing, verification, and

execution.

For complete definitions of execution recipes and their

standard attributes, see SEMI E42, Section 6.

Execution Recipe Change Event — The collection event

associated with the occurrence of the modification or

deletion of an execution recipe stored by the equipment.

Note 15: A recipe is modified whenever its body is changed.

New Execution Recipe Event — The collection event

associated with the creation of a new execution recipe at

the equipment.

Object form recipe — A recipe with body in a

proprietary format that may be presented without

structure.

RcpChangeName — A data value (DVVAL) containing

the identifier of the recipe affected by the event

Execution Recipe Change Event or New Execution

Recipe Event. See the SEMI E5 Standard for a full

definition of this variable data item.

RcpChangeStatus — The action taken on the recipe

named by RcpChangeName. This variable is valid for the

collection event Execution Recipe Change Event or New

Execution Recipe Event. See the SEMI E5 Standard for

a full definition of this variable data item.

RcpExecName — The status variable containing the

specifiers of the currently selected recipe(s). See the

SEMI E5 Standard for a full definition of this variable

data item.

RCP-SELECT — The remote command used to select

one or more recipes for execution. See Section 4.4.3.

Recipe Attribute — Information about the recipe that is

transferred with the recipe as a name/value pair. The

value may be a single item or a list.

Recipe — A recipe contains both a set of instructions,

settings, and parameters that the equipment uses to

determine the processing environment (its body or

process program) and a set of attributes that provide

information about the recipe, such as the date and time

the body was last changed.

SEMI E42 defines two types of recipes: managed

recipes and execution recipes. For purposes of GEM,

the term recipe refers to an execution recipe only.

Recipe identifier — A recipe identifier is a formatted

text string (RCPID) used to identify the recipe.

Recipe specifier — A formatted text string (RCPSPEC)

used in messages to indicate a specific recipe. A recipe

specifier includes the recipe identifier. It may also

include additional information, such as the name of the

specific component of the equipment where the recipe

is to be executed (e.g. a process chamber) and the name

of a recipe repository on the host.

Recipe Verification — Verification is syntax checking of

a recipe’s body. Verification ensures that a recipe body is

structured correctly and has the correct syntax. It may

also provide a check of semantics. It does not ensure

that the body has the correct parameters to run a

particular process or product (see Recipe Validation).

NOTE 16: Unverified recipes shall be verified upon download.

Recipe Validation — Validation is type-and-range

checking of parameters in a recipe, and is performed

when the recipe is selected for execution. The recipe

may be correct in its syntax and semantics but should fail

validation if it can not be executed with the current

equipment configuration.

Source form recipe — A recipe with a body that is

presented as an ordered sequence of text. A source form

recipe may be created and edited off-line to the

equipment. Definition of syntax requirements shall be

documented, in order to allow proper off-line editing.