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SEMI D18-0299 E © SEMI 19 99, 2001 12 Figure 5 Cassette Physical Alignm ent Interface-Type A Coupling Pin S hape
SEMI D18-0299
E
© SEMI 1999, 200111
Figure 4
Cassette Vertical Dimensions
SEMI D18-0299
E
© SEMI 1999, 2001 12
Figure 5
Cassette Physical Alignment Interface-Type A
Coupling Pin Shape
SEMI D18-0299
E
© SEMI 1999, 200113
Figure 6
Cassette Physical Alignment Interface-Type B
Roller Position
Figure 7
Cassette Physical Alignment Interface-Type B
Roller Shape