semi合集-English.pdf - 第1653页
SEMI E38-1296 © SEMI 1995 , 1996 42 At this point, it is as sumed that the cassette module performs actions su ch as loadlock ventin g, door opening, and initiating co mmunication with the user (human or host) to perform…
SEMI E38-1296 © SEMI 1995, 199641
When the putting of the wafer is now successful, the
PM commands the transport module to Retract.
PM2 TM
>>------------------------------------->>
HORetract.Req(Port=Port1,AmID="PM2")
PM2 TM
<<-------------------------------------<<
HORetract.Rsp(Port=Port1,AmID="PM2",
Status=OK)
Upon successful completion of the handoff, a verify
sequence is used to complete the transaction.
PM2 TM
>>------------------------------------->>
HOVerify.Req(Port=Port1,AmID="PM2")
PM2 TM
<<-------------------------------------<<
HOVerify.Rsp(Port=Port1,AmID="PM2",
Status=OK)
CC PM2
<<-------------------------------------<<
TRJobComplete.Req(JobID=IOJob6,
TimeStamp)
The cluster controller is informed that the processing
job in PM2 is complete.
CC PM2
<<-------------------------------------<<
PRJobComplete.Req(JobID=PM2Job1,
TimeStamp,Status=OK)
19. TM TO CM WAFER HANDOFF
The TM now has possession of the wafer and is ready
to proceed with the putting of the wafer into the cassette
module. First, the TM informs the cluster controller that
it is proceeding with the transfer of the wafer to CM
through the handoff sequence.
CM TM
<<-------------------------------------<<
HOReady.Req(Port=Port1,AmID="CM",
HODir=PUT,MID="Wafer1")
The cassette module informs the transport module to
use the PLACE sequence to put the wafer.
CM TM
>>------------------------------------->>
HOPlace.Req(Port=Port1,AmID="CM")
CM TM
<<-------------------------------------<<
HOPlace.Rsp(Port=Port1,AmID="CM",
Status=OK)
When the putting of the wafer has been successful, the
cassette module informs the transport module with a
verify sequence.
CM TM
>>------------------------------------->>
HOVerify.Req(Port=Port1,AmID="CM")
CM TM
<<-------------------------------------<<
HOVerify.Rsp(Port=Port1,AmID="CM",Status=
OK)
The cassette module then informs the cluster controller
of its current status.
CC CM
<<-------------------------------------<<
TRJobComplete.Req(JobID=IOJob7,
TimeStamp,Status=OK)
The TM then informs the cluster controller that the
putting of material is finished and that the requested
transfer job is complete.
CC TM
<<-------------------------------------<<
TRJobComplete.Req(JobID=TMJob3,
TimeStamp,Status=OK)
20. CM TO FACTORY CASSETTE HANDOFF
The cassette is passed from the cluster tool to the
factory environment.
CC CM
>>------------------------------------->>
TRJobCreate.Req(MID="Carrier1",
Port=Port2,Dir=Send)
CC CM
<<-------------------------------------<<
TRJobCreate.Rsp(JobID=IOJob8,Status=OK)
CC CM
<<-------------------------------------<<
TRJobStarted.Req(JobID=IOJob8, TimeStamp)
SEMI E38-1296 © SEMI 1995, 1996 42
At this point, it is assumed that the cassette module
performs actions such as loadlock venting, door
opening, and initiating communication with the user
(human or host) to perform the handoff to the factory.
The cluster controller is informed of progress. When
the transfer to the factory is complete, the cluster
controller is informed.
CC CM
<<-------------------------------------<<
TRJobComplete.Req(JobID=IOJob8,
TimeStamp,Status=OK)
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
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instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
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takes no position respecting the validity of any patent
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Copyright by SEMI® (Semiconductor Equipment and Materials
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SEMI E38.1-95 © SEMI 19951
SEMI E38.1-95
COMMUNICATIONS ENVIRONMENT HSMS/SECS-II FOR CLUSTER
TOOL MODULE COMMUNICATIONS
1 Purpose
The purpose of this standard is to specify the
communication environment for communication with
and among modules in a cluster tool.
2 Scope
The scope of this standard is communication within a
cluster tool as defined in the standard Cluster Tool
Module Communication Standard (CTMC, SEMI E38).
This standard specifies the transmission of SECS-II
messages by HSMS (SEMI E37), HSMS-GS (SEMI
E37.2), and Ethernet. Other methods of message
communication are possible but beyond the scope of
this standard.
This standard is intended to be one of possibly several
supplements to the CTMC SEMI E38.
3 Referenced Documents
3.1 SEMI Standards
1
The following SEMI standards are related to the
Communications Environment standard:
SEMI E5 — SEMI Equipment Communication
Standard 2 - Message Content (SECS -II).
SEMI E37 — High-Speed SECS Message Services
(HSMS) Generic Services
SEMI E37.2 — High-Speed SECS Message Services
General Session (HSMS-GS)
3.2 IEEE Standards
2
The following IEEE standard is related to the
Communications Environment standard:
IEEE 802.3 — Carrier Sense Multiple Access with
Collision Detection
4 Definitions
The following definitions are arranged in alphabetical
order. Some are defined using terms defined elsewhere
within this section. No definitions beyond this section
and the referenced standards should be necessary for a
basic understanding of these terms.
1
Semiconductor Equipment & Materials International, 805 East
Middlefield Road, Mountain View, CA 94043
2
Institute of Electrical and Electronics Engineers, 345 East 47th
Street, New York, NY 10017
10 BASE 2 — a common physical medium for the
transmission of Ethernet signals.
AUI (Attachment Unit Interface) — a specification of
the connector, pins, and signals used to interface a
computer to a MAU. Defined formally in IEEE 802.3.
Cluster Tool Environment — a collection of
interconnected modules forming a cluster tool.
Communications Stack — a specification of successive
layers of interfaces through which communication
services are provided.
Ethernet — a method of transmitting signals. Ethernet
is defined formally by IEEE 802.3
MAU (Medium Attachment Unit) — an adaptor from
the AUI interface to a physical wire or medium such as
10 BASE 2. Defined formally in IEEE 802.3
Platform — a physical computer in a cluster tool that
contains the Ethernet Interface or station as defined in
IEEE 802.3. In a cluster tool, a platform may have one
or more logical modules residing on it.
5 Required Sessions
In order to support the Services specified in the CTMC
standard, there is an associated set of Protocol standards
that specify a set of SECS-II messages to support these
Services. This standard specifies the transmission of
these SECS-II messages using HSMS sessions.
In order to communicate with a given logical module, a
separate HSMS connection (TCP/IP connection) is
required per logical module.
For correct operation of a cluster tool using these
facilities, a set of standard sessions, given in Table 1, is
required. Other sessions are possible, but are not
required. In order to be compliant a module must not
require further sessions in order to operate.
Table 1 Required Sessions
Client Server Services
Cluster Controller Transport
Module
Object Services,
Material Movement,
Exception Management,
Event Reporting
Cluster Controller Cassette
Module
Object Services,
Material Movement,
Exception Management,
Event Reporting