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SEMI G82-0301 E © SEMI 2001 2 7 Requirements 7.1 T he dimens io nal requiremen ts for the load port are given in Table 1 w ith reference to the figures o f th is doc ument. Although the frame cassett e transp ort sy stem…

SEMI G82-0301

PROVISIONAL SPECIFICATION FOR 300 mm LOAD PORT FOR

FRAME CASSETTES IN BACKEND PROCESS

This specification was technically approved by the Global Assembly & Packaging Committee and is the

direct responsibility of the Japanese Packaging Committee. Current edition approved by the Japanese

Regional Standards Committee on December 1, 2000. Initially available at www.semi.org December 2001,

to be published March 2002.

This document was editorially modified in November 2001 to correct a cosmetic error. Changes were made

to Figure 2.

1 Purpose

1.1 This specification defines dimensional

requirements for the load port of frame cassette for 300

mm wafer in backend process equipment. It is intended

to promote a uniform physical interface between

equipment and the factory, to facilitate the use of

automated frame cassette transport systems, and/or to

meet ergonomic requirements for manually loaded

equipment.

2 Scope

2.1 This is a provisional standard covering equipment

for 300 mm frame cassette only. The provisional status

is dictated by the immaturity of designs for 300 mm

equipment and additional specifications which are not

defined yet.

2.2 These standards do not purport to address safety

issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This standard is not intended for use in backend

except frame cassette for 300 mm wafers. This standard

does not address direct loading/unloading of vacuum

load locks. Requirements of such interfaces may differ

from those in this document.

4 Referenced Standards

4.1 SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Load Port

SEMI E57 — Mechanical Specification for kinematic

Couplings Used to Align and Support 300 mm Wafer

Carriers

SEMI E64 — Specification for 300 mm Cart to SEMI

E15.1 Docking Interface Port

SEMI G77 — Specification for Frame Cassette for 300

mm Wafers

5 Terminology

5.1 Please see SEMI G77 for definitions of the

following terms used in this specification:

5.1.1 bilateral datum plane

5.1.2 conveyor rails

5.1.3 facial datum plane

5.1.4 frame cassette

5.1.5 horizontal datum plane

5.1.6 tape frame

5.2 Please see SEMI E15 for definitions of the

following terms used in this specification:

5.2.1 load depth

5.2.2 load face plane

5.2.3 load height

5.2.4 load port

5.2.5 spacing

5.2.6 tool

5.3 frame cassette centroid — a datum representing the

theoretical location of the center of a stack of tape

frames in the frame cassette.

6 Ordering Information

6.1 The following items require communication

between the tool supplier and user and shall be included

in any request for quotation or purchase order:

6.1.1 If the tool has multiple load ports, provide the

spacing, S, between frame cassette centroids (see SEMI

E15).

6.1.2 Specify what frame cassette (e.g. optional

composition, see SEMI G77) is to be accommodated by

the load port (see SEMI E15).

SEMI G82-0301

7 Requirements

7.1 The dimensional requirements for the load port are

given in Table 1 with reference to the figures of this

document. Although the frame cassette transport

systems shown in these figures appear similar to

overhead monorails, they are intended to represent any

type of transport system (AGV, PGV, conveyor,

overhead track, etc.).

7.2 The dimensional requirements for the placement of

the frame cassette on the load port are given in Table 1

with reference to the figures of this document.

7.3 The tape frames are to be oriented horizontally at

the time they are placed on the load port.

7.3.1 The frame cassette shall be loaded and unloaded

with its front parallel to and away from the load face

plane (see Figure 1).

7.4 Dimension H is nominally 900 mm, fully

adjustable at installation over the range of 890 to 910

mm. The precision with which the load port height

must be maintained is dictated by the needs of the

frame cassette delivery system.

7.5 The load port must nominally be at 900 mm, and it

must be open from above to facilitate automatic frame

cassette delivery from an overhead transport system.

The open volume required for vertical delivery is

defined by a projection of the load port area, including

the area required for C1 and C2 clearances, projected

upward to the top of the tool. Note that this condition

need only be met when the tool is being loaded. For

example, the load port may be formed by a surface that

extends outward during loading to provide overhead

access.

7.6 As shown in Figure 2, the maximum allowable

height of an obstruction on the load port over which the

frame cassette must be lifted (before being set down on

the kinematic couplings) is H1. Examples of such

obstructions include alignment devices and

identification tag readers as well as the kinematic

couplings themselves. Below H1 above the horizontal

datum plane, clearances C1 and C2 no longer apply.

7.6.1 Two exclusion volumes on the left and right side

of the load port must also be kept clear so that fork lifts

or conveyors may be used. Each exclusion volume

extends from the load face plane to D0 beyond the

facial datum plane and extends H0 below the horizontal

datum plane between W1 and W2 from the bilateral

datum plane.

7.6.2 The load port that advances the frame cassette

from the undocked position (where the frame cassette is

initially delivered to the load port) to the docked

position (where the frame cassette is ready for frame

extraction or insertion) must reserve an exclusion

volume that is intended for (but not limited to)

containing automated units that read or write to an ID

tag on the rear of the frame cassette in the undocked

position (where the frame cassette is initially delivered

to the load port). If no reader/writer unit is installed,

the exclusion volume may be covered by a panel.

NOTE 1: This section is incomplete and requirements will be

added to the standard once the requirements and dimensions

have been fully defined.

7.7 Clearances C1 and C2 are defined with respect to

the maximum dimensions of the frame cassette (see

SEMI G77). To prevent interference with overhead

transport systems on the same or adjacent load port, it is

recommended that floor-based transport vehicles do not

exceed clearances C1 and C2 when picking up or

placing the frame cassette on the load port.

7.8 Dimension S specifies the recommended minimum

spacing between frame cassette centroids. In any case,

if S violates C1, then C1 takes precedence.

7.9 To add clearance for overhead frame cassette

transport, no part of the tool in front of the plane

defined by C2 may be higher than H2 from the floor.

The volume below H2 may contain the frame cassette

stored in an internal buffer by the tool.

7.10 The load port must provide the option to use the

conveyor rails for frame cassette loading. At the time

of frame cassette transfer, the conveyor rails must be

positioned at HC3 as shown in Figure 2. When not in

use, the conveyor rails must be lowered below the fork

lift exclusion zone.

8 Related Documents

SEMI E1.9 — Provisional Mechanical Specification for

Cassettes Used to Transport and Store 300 mm Wafers

SEMI E47.1 — Provisional Mechanical Specification

for Boxes and Pods Used to Transport and Store 300

mm Wafers

SEMI E72 — Specification and Guide for 300 mm

Equipment Footprint, Height, and Weight

SEMI G74 — Specification for Tape Frame for 300

mm Wafers

SEMI G82-0301

Table 1 Dimensional Requirements for 300 mm Load Port

Dimension Application Value, mm (in.) Notes

C1 minimum 75 (3.0)

C2 minimum 30 (1.2)

D range

250

−

(9.8

4.0

−

)

D0 minimum 110 (4.33)

H nominal 900 (35.4) 1

H0 minimum 15 (0.59)

H1 maximum 25 (1.0)

H2 maximum 2600 (102.4 )

HC3 range

0.2

−

(1.26

1.0

−

)

482 (19.0) 3

S minimum

555 (21.9) 4

W1 maximum 130 (5.12)

W2 minimum 205 (8.07)

NOTE 1: This value is ergonomically compatible with the proposed 13 frame cassette and may not be ergonomically compatible with the

proposed 25 frame cassette. The proposed 25 frame cassette may require assisted loading. H to be fully adjustable at installation over the range of

890 to 910 mm (35 to 35.8 inches).

NOTE 2: To avoid confusion, HC3 is used instead of H3 because H3 stands for another dimension in SEMI E15.1.

NOTE 3: Frame cassette (see SEMI G77) without manual side handles

NOTE 4: Frame cassette (see SEMI G77) with manual side handles

9 Table 1 Dimensions Definition

9.1 See SEMI E15 for definitions of the following terms used in this specification:

9.1.1 C1

9.1.2 C2

9.1.3 H

9.1.4 H1

9.1.5 S

9.2 D — allowable load depth to frame cassette centroid.

9.3 D0 — minimum rear clearance of equipment boundary below H1 from facial datum plane.

9.4 H0 — minimum height from the bottom of equipment boundary below H1 to horizontal datum plane.

9.5 H2 — maximum overhead track clearance from the floor.

9.6 HC3 — allowable height of conveyor rail from horizontal datum plane.

9.7 W1 — maximum side clearance of equipment boundary below H1 from bilateral datum plane.

9.8 W2 — minimum side clearance of equipment boundary below H1 from bilateral datum plane.