semi合集-English.pdf - 第2842页

SEMI E102-0600 © SEMI 2000 50 R1-2.10 Scenar io Ten — Mat erial T ransport and Stor age Com ponent St artup MESFactory Machi ne Register Material TransportManager Storage Mach ine stkA Transpo rt Machine ohs1 AMHS Equipm…

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SEMI E102-0600 © SEMI 200049
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
35: informJobStateChange(Job TrJob2, previousState JobQueued, newState JobExecuting)
37: informJobStateChange(Job TrJob2, previousState JobExecuting, newState JobCompleted)
32: Returns Job Handle TrJob2
33: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
34: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
36: getUnit()
38: removeFinishedJob()
39: JobStateChangedEvent(.. previousState JobStopped, newState JobUndefined)
Figure R1-20
Scenario Case 9 (continued)
SEMI E102-0600 © SEMI 2000 50
R1-2.10 Scenario Ten — Material Transport and Storage Component Startup
MESFactory Machine
Register
Material
TransportManager
Storage
Machine stkA
Transport
Machine ohs1
AMHS Equipment
Controllers
Material Tracking
Location stkA-MTL1
Port stkA/Man
_Out
Area area1
1: makeRegistered( factory )
3: makeStartingUp()
13: addMachine( stkA )
17: addMachine( Ohs1 )
14: MachineListChangedEvent
18: MachineListChangedEvent
5: Internal Service to create StorageMachine Instance
11: Internal Service to create TransportMachine Instance
10: Start-Up Sequence (Stocker SEM)
12: Start-Up Sequence (IBSEM)
15: addMachine( stkA )
16: AreaConfigurationChangedEvent( MachinesChanged, Area area1)
20: informComponentManagerIsOperating ( MTM )
2: ComponentManagerStateChangedEvent( PreviousState NOT REGISTERED, NewState REGISTERED, aComponentManager MTM )
4: ComponentManagerStateChangedEvent(PreviousState NULL , NewState STARTING UP, aComponentManager MTM )
19: ComponentManagerStateChangedEvent{ PreviousState STARTING UP, NewState AVAILABLE, aComponentManager MTM }
6: Internal Service to create Port instance
8: setMaterialTrackingLocation( aMaterialTrackingLocation stkA-MTL1, aUnitToTrack Unit1)
7: Internal Service to create MaterialTrackingLocation Instance
9: setUnit (Unit1)
Figure R1-21
Scenario Case 10
SEMI E102-0600 © SEMI 200051
R1-2.11 Scenario Eleven — Manual Interruption of Delivery
2: requestJob(JobType TransportJob, Priority 1, Deadline time1, Container aaa, destination stk4)
6: InformJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
7: makeInTransit()
8: MaterialContainerStateChangedEvent
MTSC reserves and manages AMHS equipment capacity (Internal Service)
MTSC determines AMHS Route (Internal Service)
10: Transfer Command to stk6 (carrier aaa, src shelf, dest Bay_Out) (Stocker SEM)
11: Transfer Command Updates (Stocker SEM)
12: Transfer Command Complete (Stocker SEM)
13: Transfer Command to Ohs2 (carrier aaa, source stk6/Bay_Out, destination stk4/Bay_In) (IBSEM)
15: setMaterialTrackingLocation( MaterialTrackingLocation ohs2)
14: Transfer Command Updates (IBSEM)
16: DurableLocationChangedEvent
3: returns Job Handle TrJob1
19: Event Report Send TransferPaused (IBSEM)
21: EventReportSend AlarmSet (IBSEM)
23: Event Report Send TransferCompleted, ResultCode=Error, TransferInfo lists carrier as missing (IBSEM)
Human Intervention required to clear error.
Human intervention to remove carrier from
vehicle. Results in Transport System Error
17: Alarm Report Send AlarmSet (IBSEM)
25: Alarm Report Send Alarm Cleared (IBSEM)
27: Event Report Send AlarmCleared (IBSEM)
18: Acknowledge (IBSEM)
20: Acknowledge (IBSEM)
22: Acknowledge (IBSEM)
24: Acknowledge (IBSEM)
26: Acknowledge (IBSEM)
28: Acknowledge (IBSEM)
29: setMaterialTrackingLocation(MaterialTrackingLocation NULL)
1: setUnit(unitvalue)
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
9: getUnit()
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
Figure R1-22
Scenario Case 11