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SEMI E98.1-1102 © SEMI 2001, 2002 4 Attribute Name Range/Value SECS-II Format “InService “ Enumerated: 0 = OUT OF SERVICE 1 = IN SERVICE 51 “ObjID” Conforms to OBJID restricti ons in SEMI E39.1, Section 6. 20 “ObjType” ”…

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SEMI E98.1-1102 © SEMI 2001, 2002 3
Parameter Name Parameter Range SECS-II Data Item Reference SECS-II Format
Status (list of) Structure L,m
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
m. L,2
1. <ERRCODE
m
>
2. <ERRTEXT
m
>
5.2 Table 3 shows the data items in SECS II messages that do not have a corresponding service parameter.
Table 3 Additional Data Item Requirement Table
Function SECS-II Data Item
Used to satisfy SECS-II conventions for linking a multi-block inquiry with
subsequent multi-block message.
DATAID
Name of OBEM service. Enumerated:
“Abort”
“Add Element”
“AddProcessCapability”
“ChangeService”
“Cleanup”
“GetDateTime”
“GetProgramDirectory”
”Pause”
“RemoveProcessCapability”
“RemoveElement”
“Resume”
“SelectProgram”
“SetDateTime”
“Shutdown”
“Start”
“Startup”
“Stop”
SVCNAME
A unique number generated by the service requestor to identify a specific
operation and connect it to a later completion confirmation.
OPID
NOTE 1: The text strings specified in Table 3 for SVCNAME shall be recognized by the equipment as vaild, whether the equipment is or is not
case-sensitive.
6 Object Attribute Form
6.1 Section 6 defines the SECS-II form of the attributes of objects defined in OBEM, presented in alphabetical
order. Note that attribute names in this section indicate the literal text string that shall be accepted in string
comparisons for attribute names in Stream 14 messages.
6.1.1 By convention, all tables include ObjID as well as ObjType as the two attributes required by SEMI E39.
6.2 AbstractEquipmentElement
6.2.1 Table 5 specifies the attributes of the AbstractEquipmentElement.
Table 4 AbstractEquipmentElement Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“Cycles” 0+. 54
“Description” 20
“Function” 20
“ImmutableID” 20
SEMI E98.1-1102 © SEMI 2001, 2002 4
Attribute Name Range/Value SECS-II Format
“InService “ Enumerated:
0 = OUT OF SERVICE
1 = IN SERVICE
51
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
“ObjType” ”EqpElement” 20
“ResetDate” Conforms to DateTime attribute of Clock 20,30,34
“Supplier” 20
6.3 AbstractEquipmentModule
6.3.1 Table 6 specifies the elements of the AbstractEquipmentModule object.
Table 5 AbstractEquipmentModule Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“BehaviorState” Enumerated:
0 = IDLE
1 = ACTIVE SERVICE
2 = PAUSING
3 = PAUSED
4 = STOPPING
5 = STOPPED
6 = ABORTING
7 = ABORTED
8 = IDLE WITH ALARMS
“Model” 20
“ModelRevision” 20
“Nickname” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
“ObjType” 0 or more 20
“ProcessType” 20
”ProcessCapabilityList” 0
“ProcessSetup” 20
“PreviousBehaviorState” Enumerated:
0 = IDLE
1 = ACTIVE SERVICE
2 = PAUSING
3 = PAUSED
4 = STOPPING
5 = STOPPED
6 = ABORTING
7 = ABORTED
8 = IDLE WITH ALARMS
51
“SoftwareVersions” 0
“Units” Conforms to SEMI E5, Section 9. 20
6.4 AbstractEquipmentSubsystem
6.4.1 Table 7 specifies the attributes of the AbstractEquipmentSubsystem.
SEMI E98.1-1102 © SEMI 2001, 2002 5
Table 6 AbstractEquipmentSubsystem Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“ObjType” “AbstractEqpSubsystem” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
“MaterialSummary” Ordered list. See Table 8 for detail. 0
6.4.2 Table 8 specifies the elements of the MaterialSummary attribute.
Table 7 MaterialSummary Attribute Specification
Attribute Name Range/Value SECS-II Format
“MaterialCapacity” 0 or more 5()
“MaterialCount” 0 ≤ MaterialCount ≤ Material-Capacity 5()
“MaterialType” Conforms to SEMI E5, Section 9. 20
6.5 CarrierLocation Object
6.5.1 Note that the CarrierLocation inherits the attributes of the MaterialLocation.
6.5.2 Table 9 specifies the additional attributes of the CarrierLocation object. See Table 13.
Table 8 CarrierLocation Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“ObjType” “CarrierLoc” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
LocationState Enumerated:
0 = Unoccupied
1 = Occupied
2 = Not Aligned
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6.6 Clock
6.6.1 Table 10 specifies the attributes of the Clock object.
Table 9 Clock Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“ObjType” “Clock” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
“DateTime” As specified by TimestampFormat. 20,30,34
“UseNet” FALSE = DISABLED
TRUE = ENABLED
11
“TimestampFormat” Enumerated: (see SEMI E54.1, Section 7.3.1.23)
0 = Text “yyyymmddhhmmsscc”
1 = Univeral Time Coordinated
2 = Standard Time and Date
51
“GMTDelta” -32,768 to +32767 (minutes)
*actual value in use at locale
32
“UseDelta” Boolean:
TRUE = use GMDelta
FALSE = do not use GMDelta
11