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SEMI E116-0705 © SEMI 2002, 2005 13 Table 3 EPTTracker Object Definition Attribute Name Definition Access Reqd Form ObjType Object type RO Y Text “EPTTracker” ObjID Object identifier. A name assigned by the Equipment des…

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SEMI E116-0705 © SEMI 2002, 2005 12
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
7 BLOCKED All BLOCKED EPT modules
that prevented another EPT
module from starting a new
task or completing a current
task no longer prevents the
EPT module from doing so.
[AND]
No EPT module is BUSY with
task type 1.. 5.
IDLE
EPTStateChange event is
triggered
EPTStateTime is
calculated
EPTState = IDLE
PreviousEPTState =
BLOCKED
8 IDLE Any EPT module transitions to
BLOCKED that prevents
another EPT module from
starting a new task.
BLOCKED
EPTStateChange event is
triggered
EPTStateTime is
calculated
BlockedReason is set
BlockedReasonText is set
EPTState = BLOCKED
PreviousEPTState = IDLE
9 BLOCKED Any EPT module transitions to
BLOCKED that prevents or
continues to prevent another
EPT module from starting a
new task or completing a
current task.
BLOCKED
EPTStateChange event is
triggered
EPTStateTime is calculated
BlockedReason is set
BlockedReasonText is set
EPTStateTime does not
change. Thus when the
equipment transitions
out of BLOCKED state,
the value of
EPTStateTime will
reflect the total time the
equipment was
BLOCKED from
processing.
PreviousEPTState
does
not change. Thus,
PreviousEPTState
will
continue to reflect the
state of the equipment
before it was
BLOCKED from
processing.
10 EPTTracker Objects
10.1 The equipment shall provide SEMI E39-compliant EPTTracker objects to track performance of EPT
Equipment and Modules. The equipment shall provide one EPTTracker object for the equipment and one
EPTTracker object for each EPT Module (both Production and EFEM/LoadPort EPT Modules). The EPTTracker
object is used to maintain and update the SEMI E116 attributes each time an SEMI E116 transition occurs. These
EPTTracker objects will be owned at the equipment level. These objects shall be available immediately after
equipment initialization, and shall be persistent until equipment shutdown. If certain attributes are identified as
persistent, the object shall restore the value of these attributes on initialization. The Host can use SEMI E39 services
(e.g., GetAttr) to access EPTTracker objects. The EPTTracker object format is specified in Table 3.
SEMI E116-0705 © SEMI 2002, 2005 13
Table 3 EPTTracker Object Definition
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text “EPTTracker”
ObjID Object identifier. A name assigned
by the Equipment designer
uniquely identifying the instance of
the EPTTracker object within this
Equipment.
RO Y Text 1 to 80 characters. Shall conform
to SEMI E39 restrictions on ObjID.
BlockedReason A numeric code that identifies the
most recent blocked condition of
the related EPT module.
RO Y Enumerated:
0 = Not Blocked
1 = Unknown
2 = Safety Threshold
3 = Error Condition
4 = Parametric Exception
5 = Aborting, Aborted
6 = Pausing, Paused
7 = Reserved
8 = Reserved
9 = Reserved
BlockedReasonText A description of the most recent
blocked condition of this
Equipment or EPT module. May
provide further details to
BlockedReason.
RO Y Text 0 to 80 characters
This attribute must be defined for both
equipment and module EPTTracker
objects. For the Equipment, a
BlockedReason value is determined by
the blocked module.
DisableEventOnTransition A list of zero to nine EPT State
Model transitions for which event
reporting to the host are disabled.
RW Y List of zero to nine integers in the
range 1–9.
EPTElementType A numeric code that indicates
whether this EPTTracker object
refers to the equipment or an EPT
module.
RO Y Enumerated
0 = Equipment
1 = Production EPT Module
2 = EFEM/LoadPort EPT Module
EPTState The current EPT state of this
equipment or EPT module.
RO Y Enumerated
0 = Idle
1 = Busy
2 = Blocked
EPTStateTime Time spent in the previous EPT
State, prior to entering the current
EPTState.
RO Y Unsigned integer
Value in seconds
EPTElementName A human-understandable name for
this equipment or module, which
must be unique among all objects
of EPTTracker type.
RO Y Text 0 to 80 characters
PreviousEPTState The previous EPT state of this
equipment or EPT module, prior to
entering the current EPTState.
RO Y Enumerated
0 = Idle
1 = Busy
2 = Blocked
3 = No State
SEMI E116-0705 © SEMI 2002, 2005 14
Attribute Name Definition Access Reqd Form
PreviousTaskName Name of the EPT Task previously
running on this EPT module, prior
to starting the current EPT Task.
RO Y Text 0 to 80 characters
This attribute must be defined for both
equipment and module EPTTracker
objects. For the Equipment, the value
of the PreviousTaskName attribute
may be left blank (empty string).
PreviousTaskType Type of the EPT Task previously
running on this EPT module, prior
to starting the current EPT Task.
RO Y Enumerated:
0 = No Task
1 = Unspecified
2 = Process -- adding value (e.g.,
exposing)
3 = Support -- incapable of adding
value (e.g., Handling/Transport)
4 = Equipment Maintenance (e.g.,
Equipment-initiated clean cycle)
5 = Equipment Diagnostics (e.g.,
Equipment-initiated health check)
6 = Waiting (e.g., chamber waiting for
a robot to remove a substrate)
This attribute must be defined for both
equipment and module EPTTracker
objects. For the Equipment, the value
of the PreviousTaskType attribute may
be set to 0.
TaskName Name of the EPT Task currently
running on this EPT module.
RO Y Text 0 to 80 characters
This attribute must be defined for both
equipment and module EPTTracker
objects. For the Equipment, the value
of the TaskName attribute may be left
blank (empty string).
TaskType The type of EPT Task currently
running on this EPT module.
RO Y Enumerated:
0 = No Task
1 = Unspecified
2 = Process -- adding value (e.g.,
exposing)
3 = Support -- incapable of adding
value (e.g., Handling/Transport)
4 = Equipment Maintenance (e.g.,
Equipment-initiated clean cycle)
5 = Equipment Diagnostics (e.g.,
Equipment-initiated health check)
6 = Waiting) e.g., chamber waiting for
a robot to remove a substrate)
This attribute must be defined for both
equipment and module EPTTracker
objects. For the Equipment, the value
of the TaskType attribute may be set to
0.