semi合集-English.pdf - 第7114页

SEMI S21-1103 © SEMI 2003 14 APPENDIX 2 SELECTION OF PERSONAL PROTECTIVE EQUIPMENT NOTICE : The material in this appendix is an official part of SEMI S21. A2-1 Introduction A2-1.1 Thi s appendix pr ovides specifi c techn…

SEMI S21-1103 © SEMI 2003 13

APPENDIX 1

CHEMICAL CATEGORIES AND ANTICIPATED HAZARDS BY

CATEGORY

NOTICE: The material in this appendix is an official part of SEMI S21.

Table A1-1 Chemical Category and Hazards

Description Hazard Examples

Compressed Gas High pressure cylinder gas

Potential for rapid, dangerous

release of contents

Argon, hydrogen, chlorine

Cryogen

Liquefied gas stored around –

200° C

Frostbite/freezing tissue Liquid oxygen, liquid nitrogen

Corrosives

Acids, bases, and some

oxidizers

Burns, irritation, visible

destruction or change to living

tissue

Hydrochloric acid, hydrogen

bromide, ammonium hydroxide

Solvents

A liquid used to dissolve or

clean other materials that can

produce flammable vapors

Fire, explosion Isopropyl alcohol, acetone

Flammable gases Can burn easily if ignited Fire, explosion Arsine, hydrogen

Pyrophoric gases

Gases which may ignite

spontaneously upon contact

with air

Fire, explosion Silane, phosphine

Poisons

Any substance that produces a

harmful effect when

introduced to the body

Serious illness or death Phosphine, diborane, arsine

Inert Gas

Non-corrosive, non-toxic and

non-flammable

Simple asphyxiant Nitrogen, argon

Oxidizers

React energetically with

reducing agents

Violent reactions when mixed

with other chemicals; can

enhance fire

Nitric acid, hydrogen peroxide,

nitrous oxide

Irritants

Corrosives, solvents, oxidizers

(effects depend on

concentration)

Local inflammatory response to

skin, eyes or respiratory tract

Hydrochloric acid, sodium hydroxide,

hydrogen peroxide, acetone

Sensitizers

Any substance that can illicit

an allergic reaction

Effects range from mild skin or

respiratory reactions to

anaphylactic shock and death

Uncured epoxies, ethylenediamine,

isocyanates

SEMI S21-1103 © SEMI 2003 14

APPENDIX 2

SELECTION OF PERSONAL PROTECTIVE EQUIPMENT

NOTICE: The material in this appendix is an official part of SEMI S21.

A2-1 Introduction

A2-1.1 This appendix provides specific technical information relating to Section 12. In general, it provides Personal

Protective Equipment (PPE) recommendations for specific hazards.

A2-1.2 This appendix is intended to be used as a guide to select PPE along with Section 12.

Table A2-1 PPE Selection Matrix

Personal Protective Equipment (PPE)

Potential

Hazard

Safety

Glasses,

Goggles

Face

Shield

Aprons,

Sleeves, or

Full Body

Suits

Gloves Skin

Protection

Safety

Shoes

Respirator Hardhat Hearing

Protection

(earplugs

or muffs)

Chemical R R

(if splash

hazard)

(if splash

hazard)

R R

(based on

hazard

assess-

ment)

Energized

Electrical

R R

(When

proper for

the

available

fault

current)

(When

proper for

the

available

fault

current)

(for high

voltage –

proper for

the

voltage)

(Insulation

-rated

proper for

the

voltage)

Ionizing

Radiation

UV R

Visible R

IR R

*3, 4

Non-ionizing

Radiation

Noise R

(at levels

>80 dBA)

Extreme

Temperatures

R R

Falling

Objects,

Bumping

Hazards

R R R

Mechanical R R R

Manual

Handling

R R

Oxygen

Deficiency

“R” indicates “Recommended”.

Note 1: Goggles and respirator should be worn if the sources are not isolated or exhausted, and are of a nature that they could enter the eye or be

inhaled.

Note 2: Gloves should be used if radioactive sources that are not sealed are being handled.

Note 3: Protective filters should be considered for long-term viewing (> 10 seconds). Where visible light doesn’t elicit the aversion response.

Note 4: Specific protection recommendations for laser radiation above the maximum permissible exposure (MPE).

Note 5: Skin protection should be used for all exposed areas including head and neck.

NOTICE: SEMI makes no warranties or representations as to the suitability of the safety guidelines set forth herein

for any particular application. The determination of the suitability of the safety guidelines is solely the responsibility

of the user. Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other

relevant literature, respecting any materials or equipment mentioned herein. These safety guidelines are subject to

change without notice.

By publication of this safety guideline, Semiconductor Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in

this safety guideline. Users of this guideline are expressly advised that determination of any such patent rights or

copyrights, and the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.