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SEMI E123-0703 © SEMI 2003 15 10.3.10 RECONTACT — This command instructs the handler to re-contact the unit(s) at the specified sites and is only available in the WORKING state. Handler transitions to CONTACTOR OPEN stat…

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SEMI E123-0703 © SEMI 2003 14
10.3.6 MAKE-CONTACT — This command instructs the handler to recontact the unit(s) at the specified site(s) and
resume processing. This command is only available to the Host after a BREAK-CONTACT command has been
issued or selected sites have units that have broken contact.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “MAKE-CONTACT”
Sites M - List of sites to make contact after a break command is issued.
Empty list implies all sites.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.7 PAUSE — This command transitions the handler to the PAUSING process state when the current unit/media
completes processing.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “PAUSE”
ProcessSiteId C - ID of handler process site.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.8 PP-SELECT — This command instructs the handler to copy the indicated Process Program from non-volatile
storage to the handler' s Process Program execution area. Process Program Variable Parameters can be specified in
this command which modify the default values for these Variable Parameters in the Process Program.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “PP-SELECT”
ProcessSiteID C - ID of handler process site.
LotID C - Lot to be processed.
ProcessProgramID M - Id of the processes program to be used.
MediaList C - One or more media to be processed with this program.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.9 PRELOAD-UNITS — This command instructs the handler to begin preloading unit(s) to temperature soak
chambers or some equivalent process buffers. Handler transitions to PRELOADING state while action is performed
and returns to READY upon completion, reporting PreloadComplete collection event to Host. Command must still
be accepted even if handler does not support process buffers or preloading, in which case, it transitions back to
READY state immediately.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “PRELOAD-UNITS”
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
SEMI E123-0703 © SEMI 2003 15
10.3.10 RECONTACT — This command instructs the handler to re-contact the unit(s) at the specified sites and is
only available in the WORKING state. Handler transitions to CONTACTOR OPEN state while action is performed.
Once unit(s) is contacted again, UnitsReady event is sent to Host and handler transitions back to AWAITING
COMMAND or LOADING state if there are more process site(s) available for loading.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “RECONTACT”
Sites M - List of sites to re-contact. Empty list implies all sites.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.11 RESUME — This command resumes processing from the point where the process was PAUSED. This
command is only recognized if the handler is in the PAUSED state.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “RESUME”
ProcessSiteID C - ID of handler process site.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.12 START — This command is only available to the host or operator when a process program has been
selected and the handler is in the READY processing state. The START command instructs the handler to initiate
processing.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “START”
ProcessSiteID C - ID of handler process site.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.13 STOP — This command completes the current unit, stops in a safe condition, and returns to the IDLE
processing state. STOP has the intent of bringing about a normal termination after completion of the current unit.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “STOP”
ProcessSiteID C - ID of handler process site.
CloseLot C - Automatically close the lot.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.14 RESET-TOOL-COUNTS — This command will initialize equipment tool counts. The minimum set are
those contained in the Variable Items section.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “RESET-TOOL-COUNTS”
ProcessSiteID C - ID of handler process site.
StatusVariableList M - List of Status variables to reset.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
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10.3.15 PURGE — Purge flush or clean the equipment of process material.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “RESET-TOOL-COUNTS”
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.4 Remote Commands and HSEM Process Model Mapping — Tables 10 and 11 illustrates the relationship
between remote commands and states of the HSEM processing state model. An “X” indicates that a command is
valid for use in this state. If a remote command is attempted during a non-valid state, the equipment would reject
the remote command.
Table 10 Remote Commands vs. Process States
COMMAND
ABORT
BIN-UNITS
PAUSE
PP-SELECT
RESUME
START
STOP
PROCESSING STATE
IDLE X
PROCESSING ACTIVE
PROCESS
SETTING UP X X
READY X X X X
PRELOADING X X X
EXECUTING
LOADING X X
WORKING
AWAITING COMMAND X X X X
CONTACTOR OPEN X X X
PROCESS PAUSE
PAUSING X
PAUSED X X X
CHECKING X X
ALARM PAUSED X X
ABORTED