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SEMI E52-0703 © SEMI 1995, 2003 12 Code Gas Name Symbol Formula Synonym Ref 46 Carbonyl Fluoride CF2O CF 2 O 1 34 Carbonyl Sulfide COS COS 1 19 Chlorine Cl2 Cl 2 1 201 Chlorine Dioxide ClO2 ClO 2 2 202 Chlorine Pentafluo…

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SEMI E52-0703 © SEMI 1995, 2003 11
Code Gas Name Symbol Formula Synonym Ref
178 4-Methyl, 1-Pentene C6H12 (CH
3
)
2
CHCH
2
CH=CH
2
2
331 Acetaldehyde methoxy C3H6O2 CH
3
OCH
2
CHO 3
283 Acetic acid C2H4O2 CH
3
COOH Ethanoic acid; UN 2789 2
184 Acetone C3H6O CH
3
COCH
3
2
332 Acetone, hydroxy C3H6O2 CH
3
COCH2OH Acetol 3
173 Acetonitrile C2H3N CH
3
CN 2
42 Acetylene C2H2 HC=CH Ethyne 1
289 Acrylic acid C3H4O2 C
3
H
4
O
2
2-Propenoic acid;
CH2=CHCOOH
2
276 Acrylonitrile C3H3N CH
2
=CHCN Acrylon; Propenenitrile 3
8 Air Air 1
66 Allene C3H4 CH
2
=C=CH
2
Propadiene 1
226 Aluminum Trifluoride AlF3 AlF
3
2
29 Ammonia NH3 NH
3
1
4 Argon Ar Ar 1
96 Arsenic Pentafluoride AsF5 AsF
5
2
242 Arsenic Tribromide AsBr3 AsBr
3
2
216 Arsenic Trichloride AsCl3 AsCl
3
2
195 Arsenic Trifluoride AsF3 AsF
3
2
196 Arsenic Triiodine AsI3 AsI
3
2
35 Arsine AsH3 AsH
3
1
197 Benzene C6H6 C
6
H
6
2
198 Borazine B3N3H6 H
3
B
3
N
3
H
3
14
79 Boron Tribromide BBr3 BBr
3
1
70 Boron Trichloride BCl3 BCl
3
1
48 Boron Trifluoride BF3 BF
3
1
21 Bromine Br2 Br
2
2
116 Bromine Pentafluoride BrF5 BrF
5
1
76 Bromine Trifluoride BrF3 BrF
3
1
199 Bromochlorodifluoromethane CBrClF2 BrClCF
2
2
105 Bromotrifluoroethylene C2BrF3 CF
2
CFBr 1
80 Bromotrifluoromethane CBrF3 BrCF
3
F-13B1, R-13B1 1
100 Butadiene C4H6 CH
2
=C=CHCH
3
Methylallene 1
117 Butane C4H10 CH
3
(CH
2
)
2
CH
3
1
271 Butanol-1 C4H10O CH
3
CH
2
CH
2
CH
2
OH 3
336 Butanol-2 C4H10O CH
3
CH
2
CH(OH)CH
3
3
104 Butene C4H8 CH
3
CH
2
CH=CH
2
1-Butene 1
25 Carbon Dioxide CO2 CO
2
1
40 Carbon Disulfide CS2 CS
2
2
9 Carbon Monoxide CO CO 1
200 Carbon Tetrabromide CBr4 CBr
4
2
101 Carbon Tetrachloride CCl4 CCl
4
Tetrachloromethane or Methane,
Tetrachloro
2
63 Carbon Tetrafluoride CF4 CF
4
Tetrafluoromethane or Methane,
Tetrafluoro
1
SEMI E52-0703 © SEMI 1995, 2003 12
Code Gas Name Symbol Formula Synonym Ref
46 Carbonyl Fluoride CF2O CF
2
O 1
34 Carbonyl Sulfide COS COS 1
19 Chlorine Cl2 Cl
2
1
201 Chlorine Dioxide ClO2 ClO
2
2
202 Chlorine Pentafluoride ClF5 ClF
5
2
77 Chlorine Trifluoride ClF3 ClF
3
1
172 Chlorobenzene C6H5Cl C
6
H
5
Cl Chlorobenzol, Phenylchloride 2
203 Chlorodifluoroethane C2H3ClF2 CH
3
-CF
2
Cl R-142b 4
204 Chlorodifluoroethylene C2HClF2 CF
2
=CHCl R-1122, FREON-1122 4
57 Chlorodifluoromethane CHClF2 CClHF
2
F-22, R-22 1
71 Chloroform CHCl3 CHCl
3
Trichloromethane or Methane,
Trichloro
2
119 Chloropentafluoroethane C2ClF5 ClCF
2
CF
3
F-115, R-115 1
205 Chlorosilane SiH3Cl SiH
3
Cl 2
206 Chlorotrifluoroethylene C2ClF3 FCCl=CF
2
R-1113, FREON-1113 2
74 Chlorotrifluoromethane CClF3 ClCF
3
F-13, R-13 1
107 Cisbutene C4H8 CH
3
CH=CHCH
3
Cis-2-Butene 2
59 Cyanogen C2N2 NCCN Oxalodinitrile 1
37 Cyanogen Chloride ClCN ClCN 1
207 Cyclobutane C4H8 C
4
H
8
Tetramethylene 2
61 Cyclopropane C3H6 C
3
H
6
1
14 Deuterium D2 H
2
2
D2 2
350 Deuterium Ammonia ND3 ND
3
3
244 Deuteriumsilane SiD4 SiH
2
4
2
208 Diazomethane CH2N2 CH
2
N
2
Acomethylene 2
58 Diborane B2H6 B
2
H
6
1
209 Dibromodifluoromethane CBr2F2 Br
2
CF
2
R-12B2, FREON-12B2 2
130 Dibromotetrafluorethane C2Br2F4 BrF
2
CCF
2
Br F-114B2, R-114B2 1
84 Dichlorodifluoromethane CCl2F2 CCl
2
F
2
F-12, R-12 1
212 Dichlorodimethylsilane C2H6SiCl2 (CH
3
)
2
SiCl
2
2
210 Dichloroethylene C2H2Cl2 CH
2
=CCl
2
Vinylidene Chloride 2
211 Dichloroethylene -cis C2H2Cl2 CHCl=CHCl 2
191 Dichloroethylene -trans C2H2Cl2 CHCl=CHCl 2
65 Dichlorofluoromethane CHCl2F CHCl
2
F F-21, R-21 1
265 Dichloromethane CH2Cl2 CH
2
Cl
2
67 Dichlorosilane SiH2Cl2 SiH
2
Cl
2
1
125 Dichlorotetrafluoroethane C2Cl2F4 F
3
CCCl
2
F F-114, R-114 1
188 Diethoxy Dimethyl Silane C6H16O2Si (C
2
H
5
O)
2
Si(CH
3
)
2
2
338 Diethyl ether C4H10O C
2
H
5
OC
2
H
5
3
298 Diethyl sulfide C4H10S C
4
H
10
S UN 2375; Ethyl sulfide; 2
213 Diethylamine C4H11N (C
2
H
5
)
2
NH 2
154 Diethylsilane C4H12Si (C
2
H
5
)
2
SiH
2
2
214 Diethylzinc C4H10Zn Zn(C
2
H
5
)
2
2
232 Difluoroamidogen NF2 NF
2
2
SEMI E52-0703 © SEMI 1995, 2003 13
Code Gas Name Symbol Formula Synonym Ref
103 Difluorochloroethane C2H3ClF2 CF
2
ClCH
3
F-142B, R-142B 1
82 Difluoroethane C2H4F2 CH
3
CHF
2
Ethylidene Fluoride, R-152A 1
64 Difluoroethylene C2H2F2 CH
2
=CF
2
G-1132A,Vinylidenefluoride 1
160 Difluoromethane CH2F2 CH
2
F
2
Methylene Fluoride 2
134 Difluorosilane SiH2F2 SiH
2
F
2
10
217 Digermane Ge2H6 Ge
2
H
6
2
300 Dimethoxydimethyl silane C4H12O2Si (CH
3
O)
2
Si(CH
3
)
2
KBM 22 2
73 Dimethyl Ether C2H6O CH
3
OCH
3
Methylether 1
284 Dimethyl selenide C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl;
Dimethylselenium
2
164 Dimethylaluminum-hydride C2H7Al (CH
3
)
2
AlH DMAH 13
85 Dimethylamine C2H7N (CH
3
)
2
NH 1
218 Dimethylcadmium C2H6Cd (CH
3
)
2
Cd 2
166 Dimethylethylaminealane C4H14NAl (CH
3
)
2
C
2
H
5
NAlH
3
DMEAA 14
122 Dimethylpropane C5H12 (CH
3
)
4
C Neopentane 2
219 Dimethylsilane C2H8Si (CH
3
)
2
SiH
2
2
220 Dimethyltellurium C2H6Te (CH
3
)
2
Te 2
135 Dimethylzinc C2H6Zn (CH
3
)
2
Zn 3
281 Diphenylmethan-4,4' -diisocyanat C15H10N2O C
15
H
10
N
2
O UN 2489; Benzene,1,1' -
methylenebis(isocyanatophenyl)
2
280 Diphenylmethylenediamine C13H14N2 C
13
H
14
N
2
2
349 Diselenium Dichloride Se2Cl2 Se
2
Cl
2
3
347 Disilabutane Si2C2H10 Si
2
C
2
H
10
3
97 Disilane Si2H6 Si
2
H
6
2
326 Disilane hexafluoride SiF6 SiF
6
F
6
Si
2
; Hexafluorodisilane 2
54 Ethane C2H6 CH
3
CH
3
1
348 Ethane, 1,1,1-Trifluoro C2H3F3 C
2
H
3
F
3
HFC-143a 3
136 Ethanol C2H6O CH
3
CH
2
OH 2
285 Ethoxy silane C2H8OSi C
2
H
8
OSi 2
93 Ethyl Acetylene C4H6 CH
3
CH
2
C=CH 1
75 Ethyl Chloride C2H5Cl C
2
H
5
Cl Chloroethane orEthane, Chloro or
Ethyl Chloride
1
221 Ethyl Fluoride C2H5F CH
3
CH
2
F Fluoroethane, R-161, FREON-
161
2
291 Ethyl Formate C3H6O2 HCO
2
C
2
H
5
Ethyl ester formic acid;
HC00C2H5
3
174 Ethylbenzene C8H10 C
6
H
5
C
2
H
5
2
38 Ethylene C2H4 CH
2
=CH
2
Ethene 1
222 Ethylene Dichloride C2H4Cl2 ClCH
2
CH
2
Cl 1,2 Dichloroethane 2
45 Ethylene Oxide C2H4O C
2
H
4
O Acetaldehyde 1
169 Ethyleneglycol C2H6O2 HOCH
2
CH
2
OH Ehtanediol, Glycol 2
18 Fluorine F2 F
2
1
327 Fluoro silane SiH3F SiH
3
F H
3
FSi 2
223 Fluoroacetylene C2HF FC=CH 2
49 Fluoroform CHF3 CHF
3
Trifluoromethane or Methane,
Trifluoro, F-23, R-23
1