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SEMI E5-1104 © SEMI 1982, 2004 22 Name Format Description Values Where Used LIMITID 10 The identifier of a specific limit in the set of limits (as defined by UPPERDB and LOWERDB) for a variable to which the corresponding…

SEMI E5-1104 © SEMI 1982, 2004 21

Name Format Description Values Where Used

HCACK 10 Host Command Parameter

Acknowledge Code, 1 byte

0 = Acknowledge, command has

been performed

1 = Command does not exist

2 = Cannot perform now

3 = At least one parameter is

invalid

4 = Acknowledge, command will

be performed with completion

signaled later by an event

5 = Rejected, Already in

Desired Condition

6 = No such object exists

7-63 Reserved

S2F42, F50

HOACK 11 Conveys whether the

corresponding handoff

activity succeeded (= True) or

failed (= False)

S4F31, F33

HOCANCELACK 51 Tells whether the cancel

ready message was accepted

or rejected

0 = Cancel Ready Accepted

1 = Atomic Transfer Unknown

2 = Cancel Ready Rejected -

Handoff Begun

S4F13

HOCMDNAME 20 Identifier for the handoff

command to be executed

S4F31

HOHALTACK 51 Tells whether the halt

command was accepted or

rejected

0 = Halt Accepted

1 = Atomic Transfer Unknown

2-63 Reserved

S4F41

IACDS 32, 52 Immediately After Command

Codes

Vector of all command codes

which defined command must

immediately succeed within the

same block.

S7F22

IBCDS 32, 52 Immediately Before

Command Codes

Vector of all command codes

which defined command must

immediately precede within the

same block.

S7F22

IDTYP 10 Id type

0 = Wafer ID

1 = Wafer Cassette ID

2 = Film Frame ID

>2 = Error

3-63 Reserved

S12F1, F3, F4,

F5, F7, F9, F11,

F13, F14, F15,

F16, F17, F18

INPTN 10, 51 A specialized version of PTN

indicating the InputPort.

S3F35

JOBACTION 20 Specifies the action for a

ReticleTransferJob

S3F35

LENGTH 3(), 5() Length of the service

program or process program

in bytes

S2F1;

S7F1, F29

LIMITACK 10 Acknowledgment code for

variable limit attribute set, 1

byte

1 = LIMITID does not exist

2 = UPPERDB > LIMITMAX

3 = LOWERDB < LIMITMIN

4 = UPPERDB < LOWERDB

5 = Illegal format specified

for UPPERDB or LOWERDB

6 = ASCII value cannot be

translated to numeric

7 = Duplicate limit definition

for this variable

>7 = Other equipment-specific

error

8-63 Reserved

S2F46

SEMI E5-1104 © SEMI 1982, 2004 22

Name Format Description Values Where Used

LIMITID 10 The identifier of a specific

limit in the set of limits (as

defined by UPPERDB and

LOWERDB) for a variable to

which the corresponding limit

attributes refer, 1 byte.

S2F45, F46,

F48

LIMITMAX 11, 20,

3(), 4(),

5()

The maximum allowed value

for the limit values of a

specific variable. The

equipment manufacturer

should specify this value,

which would typically

coincide with the maximum

value of the variable being

monitored. The format must

match that of the referenced

variable.

S2F48

LIMITMIN 11, 20,

3(), 4(),

5()

The minimum allowed value

for the limit values of a

specific variable. The

equipment manufacturer

should specify this value,

which would typically

coincide with the minimum

value of the variable being

monitored. The format must

match that of the referenced

variable.

S2F48

LINKID 54 Used to link a completion

message with a request that

an operation be performed.

LINKID is set to the value of

RMOPID in the initial

request except for the last

completion message to be

sent, where it is set to zero.

S6F25;

S14F20, F21;

S15F22, F30

LLIM 3(), 4(),

5()

Lower limit for numeric

value

S7F22

LOC 10 Machine material location

code, 1 byte

S2F27;

S3F2

LOCID 20 The logical identifier of a

material location.

S3F29, F31

LOWERDB 11, 20,

3(), 4(),

5()

A variable limit attribute

which defines the lower

boundary of the deadband of

a limit. The value applies to

a single limit (LIMITID) for a

specified VID. Thus,

UPPERDB and LOWERDB

as a pair define a limit.

S2F45, F48

Name Format Description Values Where Used

LRACK 10 Link Report Acknowledge

Code, 1 byte

0 = Accepted

1 = Denied. Insufficient space

2 = Denied. Invalid format

3 = Denied. At least one CEID

link already defined

4 = Denied. At least one CEID

does not exist

5 = Denied. At least one RPTID

does not exist

>5 = Other errors

6-63 Reserved

S2F36

LVACK 10 Variable limit definition

acknowledge code, 1 byte.

Defines the error with the

limit attributes for the

referenceVID.

1 = Variable does not exist

2 = Variable has no limits

capability

3 = Variable repeated in

message

4 = Limit value error as

described in LIMITACK

5-63 Reserved

S2F46

MAPER 10 Map Error

0 = ID not found

1 = Invalid Data

2 = Format Error

>2 = Invalid error

3-63 Reserved

S12F19

MAPFT 10 Map data format type

0 = Row format

1 = Array format

2 = Coordinate format

>2 = Error

3-63 Reserved

S12F3, F5

MCINDEX 5() Identifier used to link a

handoff command message

with its eventual completion

message. Corresponding

messages carry the same

value for this data item.

S4F31, F33

MDACK 10 Map data acknowledge

0 = Map received

1 = Format error

2 = No ID match

3 = Abort/discard map

>3 = Error

4-63 Reserved

S12F8, F10,

F12

MDLN 20 Equipment Model Type, 6

bytes max

Same data as returned by S1,F2

S1F2, F13, F14;

S7F22, F23,

F26, F31, F39,

F43

MEXP 20 Message expected in the form

SxxFyy where x is stream and

y is function

S9F13