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SEMI C58-0305 © SEMI 2005 2 Table 1 Impurity a nd Other Requirements for Various Grades of Hy drogen Previous SEMI Reference # C3.19-0200 (Specification) C3.30-0999 (Specification) Grade 5.5 5.7 Purity 99.9995% 99.9997% …

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SEMI C58-0305 © SEMI 2005 1
SEMI C58-0305
SPECIFICATIONS AND GUIDELINES FOR HYDROGEN
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on December 10, 2004. Initially available at www.semi.org February 2005; to be published
March 2005.
1 Purpose
1.1 The purpose of this document is to provide a series of specifications for different grades of Hydrogen (H
2
) that
are used in the semiconductor industry.
2 Scope
2.1 This document covers requirements for all grades of hydrogen used in the semiconductor industry.
2.2 If analytical methods are not complete, the requirements are presented as a guideline.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Description
3.1 Hydrogen is a colorless gas. Its vapors are highly flammable, colorless, tasteless, and nontoxic. It is the lightest
gas known.
4 Limitations
4.1 None.
5 Referenced Standards
5.1 SEMI Standards
SEMI C1 — Specifications for Reagents
SEMI C3 — Specifications for Gases
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
6 Terminology
6.1 Terminology appropriate to this standard is defined in SEMI C3.
7 Requirements
7.1 Purity and other requirements for the various grades of hydrogen are given in Table 1.
SEMI C58-0305 © SEMI 2005 2
Table 1 Impurity and Other Requirements for Various Grades of Hydrogen
Previous SEMI Reference # C3.19-0200
(Specification)
C3.30-0999
(Specification)
Grade 5.5 5.7
Purity 99.9995% 99.9997%
#1
Impurities Maximum Acceptable Level (ppm)
#2
Carbon Dioxide (CO
2
) 0.5 0.2
Carbon Monoxide (CO) 0.5 0.2
Nitrogen (N
2
) 2 2
Oxygen (O
2
) 0.5 0.2
Total Hydrocarbons expressed as Methane (THC) 0.5 0.2
Water (H
2
O) (v/v) 0.5 0.2
TOTAL SPECIFIED IMPURITIES 4.5 2.8
Particles
#3
#3
#1
A purifier is allowed to be used to meet this specification.
#2
An analysis of significant figures has not been considered. The number of significant figures is based on analytical accuracy and the precision
of the provided procedure.
#3
To be determined between supplier and user.
8 Physical Constants
8.1 The physical constants of hydrogen are given in Table 2 (for information only).
Table 2 Physical Constants of Hydrogen (for information only)
Metric Units US Units
Molecular weight 2.016 2.016
Boiling point at 1 atm
–252.7C –423.0F
Density of gas at 21.1C (70F)
and 1 atm
0.0834401 kg/m
3
0.005209 lb/ft
3
Specific gravity of gas at 21.1C
and 1 atm (air = 1)
0.06950 0.06950
Density of liquid at boiling point 68.6 kg/m
3
4.28 lb/ft
3
9 Analytical Procedures for Grade 5.5 Hydrogen
NOTE 1: Introduce the calibration standard as many times as necessary to achieve the desired precision.
NOTE 2: All gases used in the analysis of the sample should contain no more than 10% of the sample value of the component of
interest unless otherwise specified.
9.1 Carbon Monoxide and Carbon Dioxide — This procedure is for the determination of carbon monoxide and
carbon dioxide in hydrogen using a gas chromatograph with a flame ionization detector and methanizer.
9.1.1 Detection Limit — 100 ppb (mol/mol).
9.1.2 Instrument Parameters
9.1.2.1 Column: Porapak T or Q, 3 m (9.8 ft) by 3 mm (1/8 in) ID by 2.2 mm (0.085 in) OD stainless steel; or
Chromosorb 102, 2 m (6.6 ft) by 3 mm stainless steel; or equivalent
9.1.2.2 Carrier Flow: 30 mL/min helium.
9.1.2.3 Sample Volume: 0.5 to 2.0 mL.
SEMI C58-0305 © SEMI 2005 3
9.1.2.4 Temperatures:
Detector
280C
Column Oven
60C
Methanizer
350C
9.1.3 Calibration Standards — 0.5–2.5 ppm (mol/mol) carbon monoxide, 0.5–2.5 ppm (mol/mol) carbon dioxide,
balance hydrogen.
9.1.4 Operating Procedure
9.1.4.1 Inject the calibration standard into the column using a gas sampling valve. Record the retention times and
peak areas. The order of elution is carbon monoxide, carbon dioxide.
9.1.4.2 Inject the sample to be tested in same manner as the calibration standard. Record the retention times and
peak areas.
9.1.4.3 Repeat ¶9.1.4.1.
9.1.4.4 Compare the average peak areas of the calibration standard to that of the hydrogen sample being tested.
Calculate the concentrations of carbon monoxide and carbon dioxide, using the formula below.
9.1.4.5 The result may not exceed the specification in Table 1.
9.2 Nitrogen — This procedure is for the determination of nitrogen in hydrogen using a gas chromatograph with a
helium ionization detector.
9.2.1 Detection Limit — 500 ppb (mol/mol).
9.2.2 Instrument Parameters
9.2.2.1 Column: 5A molecular sieve 1.9 m (6 ft) by 3.2 mm (1/8 in) OD by 2.2 mm (0.085 in) ID by stainless steel
or equivalent.
9.2.2.2 Carrier Flow: 30 mL/min helium.
9.2.2.3 Sample Volume: 3.0 mL.
9.2.2.4 Temperatures:
Detector
125C
Column Temperature
65C
9.2.3 Calibration Standard — 0.5–2.5 ppm, (mol/mol) nitrogen in hydrogen.
9.2.4 Operating Procedure
9.2.4.1 Inject the calibration standard into the column using a gas sampling valve. Record the retention times and
peak areas.
9.2.4.2 Inject the sample to be tested in same manner as the calibration standard. Record the retention times and
peak areas.
9.2.4.3 Repeat ¶9.2.4.1.
Sample Peak
Area
Standard Peak Area
Concentration
of Standard
Concentration
of Sample