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SEMI E122-0703 © SEMI 2003 5 6.4 TSEM Processing St ate Transi tions Table Table 1 Processing State Tran sitions Table # Current State Trigger Ne w State Actions Comments 0 GEM READY The GEM session has received a STA RT…

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6.3 Description of Tester Processing States
6.3.1 ABORTING (PROCESSING ACTIVE Sub-State)
— The tester has received an ABORT command. All
activity is immediately suspended. The tester is taking
appropriate action to bring itself and material to a
“safe” state where possible.
6.3.2 ALARM PAUSED (PAUSE Sub-State) — An
alarm has occurred in the PROCESS or PROCESS
PAUSE states and the tester is waiting for the alarm to
be cleared.
6.3.3 CHECKING (PROCESS PAUSE Sub-State) —
The tester verifies that updates made to the process
program are valid. Process program updates result in
the definition of a new process program. This is a
similar procedure to that which is done in SETTING
UP. If there are no process program updates, this is a
pass through state. At the successful completion of
verification, a transition, based on the process model
condition table, is made to the process state.
6.3.4 EXECUTING (PROCESS Sub-State) — The
tester is processing material.
6.3.5 IDLE — The tester executive is loaded and the
tester is awaiting a command. IDLE is free of
ALARMS and error conditions. If this state is entered
with valid alarms (e.g. as a result of an abnormal exit
from ABORTING, STOPPING, or SETTING UP) then
this state is a pass through to IDLE WITH ALARMS.
6.3.6 IDLE WITH ALARMS — An alarm has occurred
in the IDLE state and the tester is waiting for all alarms
to be cleared. An operator may be required to clear
alarm conditions. The system shall remain in this state
until all alarm conditions are cleared, including those
that require operator intervention.
6.3.7 INIT — Tester initialization is occurring. The
tester executive is loading.
6.3.8 INIT WITH ALARMS — An alarm occurred
during the initialization process.
6.3.9 PAUSE (PROCESSING ACTIVE Sub-State) —
This state is the parent of those sub-states in which the
process program is paused.
6.3.10 PAUSED (PROCESS PAUSE Sub-State) — The
PROCESS state has been suspended and the tester is
waiting for a command (RESUME, STOP, or ABORT).
In this state, the operator may modify conditions of the
current Process Program selection.
6.3.11 PAUSING (PROCESS PAUSE Sub-State) —
The current state will be suspended at the completion of
the current unit(s), if any, and the tester will be brought
to a “safe” state.
6.3.12 PROCESS (PROCESSING ACTIVE Sub-State)
— This state is the parent of those sub-states that refer
to the preparation and execution of a process program.
6.3.13 PROCESS PAUSE (PAUSE Sub-State) — This
state is the parent state of the sub-states that refer to the
pausing of tester operation. The tester is free of alarm
conditions in the PAUSE state.
6.3.14 PROCESSING ACTIVE — This state is the
parent state of the sub-states that know the identity of
the process program.
6.3.15 READY (PROCESS Sub-State) — The process
program is loaded. The tester is ready to begin
processing and is awaiting a START command.
6.3.16 SETTING UP (PROCESS Sub-State) — The
selected process program is loading. The tester is
satisfying conditions so that processing can begin. This
includes the initialization and validation of the process
program and process program-specific calibration. This
may be accomplished independently by the tester or
may require interaction with the operator and/or host.
6.3.17 STOPPING (PROCESSING ACTIVE Sub-State)
— The tester has been instructed to stop processing and
shall do so at the next opportunity. All necessary
cleanup is completed within this state with regard to
material, data, control system, etc.
6.3.18 GEM READY — The GEM session is running
and ready to accept a START EXEC command from
the host.
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6.4 TSEM Processing State Transitions Table
Table 1 Processing State Transitions Table
# Current State Trigger New State Actions Comments
0 GEM
READY
The GEM session has
received a START EXEC
command.
INIT If first START EXEC on this
physical tester, start the tester
executive.
The first tester executive to
start initializes all hardware.
1 INIT All tester initialization is
complete with no alarms
or error conditions.
IDLE None. The tester executive is
running.
2 IDLE A process program is
selected.
SETTING UP Tester-dependent. Commit has been made to
setup and a virtual tester has
been defined.
3 SETTING UP All setup activity has
completed and the tester is
ready to receive a START
command.
READY None. The selected Process Program
is available for execution, all
required hardware for this
virtual tester is allocated, and
the test program is loaded.
4 READY The tester receives a
START command from a
valid source.
EXECUTING Begins testing the unit(s) at the
test-site(s).
The definition of a valid
source is application
dependent.
5 EXECUTING The processing of the
current unit(s) has
completed normally.
READY The tester processes end of test
data.
“Normal” completion of the
test program execution.
6 EXECUTING The processing of the
current unit(s) has
completed abnormally.
READY “Abnormal” completion of the
test program execution, etc.
7 PROCESS The tester has received a
PAUSE command from a
valid source.
PAUSING The current state is suspended at
the completion of the current
unit(s).
The definition of a valid
source is application
dependent.
8 PAUSING The tester has completed
processing the current
unit(s).
PAUSED The tester is waiting for a
command (RESUME, STOP, or
ABORT).
None.
9 PROCESS The tester has received a
STOP command from a
valid source.
STOPPING The tester executes the actions
required to perform a STOP.
The definition of a valid
source is application
dependent.
10 PROCESS The tester has received an
ABORT command from a
valid source.
ABORTING The tester executes the actions
required to perform an ABORT.
The definition of a valid
source is application
dependent.
11 PROCESS An alarm occurs. ALARM
PAUSED
PROCESS activity is suspended
and the tester is waiting for all
alarms to be cleared.
12 SETTING UP An equipment initiated
transition indicating that
the process program failed
to load.
IDLE The hardware resources are
released. If the process program
load failure caused an alarm
condition, this transition is
followed immediately by a
transition 24 to IDLE WITH
ALARMS.
No process program is loaded.
13 PAUSED The tester receives a
RESUME command.
CHECKING If the RESUME command
contains variable process program
parameters, validation of the
process program parameters
begins.
If there are no parameters on
the RESUME command, the
CHECKING state is a pass
through.
14 CHECKING Error detected in a new
parameter setting.
PAUSED The tester waits for the parameter
correction by operator or host.
The definition of a valid
source is application
dependent.
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# Current State Trigger New State Actions Comments
15 CHECKING Parameter checking
completes successfully.
State based on
conditional
table.
The tester resumes PROCESS
execution.
This is a conditional re-entry
to the PROCESS state. (See
Table 2.) If there are no
parameters, the CHECKING
state is a pass through.
16 PROCESS
PAUSE
An alarm is set. ALARM
PAUSED
The tester waits for all alarms to
be cleared.
None.
17 ALARM
PAUSED
All alarms are cleared. PAUSED An operator has verified that all
alarms and abort conditions have
been cleared.
The tester is waiting for a valid
command.
None.
18 PAUSE The tester has received a
STOP command from a
valid source.
STOPPING The tester executes the actions
required to perform a STOP.
The definition of a valid
source is application
dependent.
19 PAUSE The tester has received an
ABORT command from a
valid source.
ABORTING The tester executes the actions
required to perform an ABORT.
The definition of a valid
source is application
dependent.
20 STOPPING The tester completes the
actions required to
perform a STOP.
IDLE The hardware resources for this
virtual tester are released.
21 STOPPING The tester has received an
ABORT command from a
valid source.
ABORTING The tester executes the actions
required to perform an ABORT.
The definition of a valid
source is application
dependent.
22 ABORTING The tester has completed
the action required to
perform an ABORT.
IDLE The hardware resources for this
virtual tester are released.
Unsafe conditions have been
resolved where possible.
An operator has verified that all
alarms and abort conditions have
been cleared.
23 IDLE The tester receives an
STOP EXEC command
from a valid source.
GEM READY The tester executive is unloaded
from all testers.
The definition of a valid
source is application
dependent.
24 IDLE An alarm is set. IDLE with
ALARMS
The tester waits for all alarms to
be cleared.
If the ALARM already exists
upon entering the IDLE state,
the tester transitions
immediately from IDLE to
IDLE with ALARMS.
25 IDLE WITH
ALARMS
All alarms on the tester
have been cleared.
IDLE An operator has verified that all
alarms and abort conditions have
been cleared.
The IDLE state is free of
alarms.
26 IDLE WITH
ALARMS
The tester executive has
been stopped by an STOP
EXEC command form a
valid source.
GEM READY An operator has verified that all
alarms and abort conditions have
been cleared.
The tester executive is unloaded
from all testers.
The definition of a valid
source is application
dependent.
27 INIT An error occurred during
the loading of the tester
exec.
INIT WITH
ALARMS
None.
28 INIT WITH
ALARMS
Alarms are cleared. INIT An operator has verified that all
alarms and abort conditions have
been cleared.
None.