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SEMI E5-1104 © SEMI 1982, 2004 83 Stream,Function Name (Mnemonic) Direction S2,F48 Variable Limit Attributes Send (VLAS) M,H<-E Description Equipment sends values of requested var iable lim it attribute definitions in…

SEMI E5-1104 © SEMI 1982, 2004 82
Stream,Function Name (Mnemonic) Direction
S2,F46 Variable Limit Attribute Acknowledge (VLAA) M,H<-E
Description
Acknowledge definition of variable limit attributes or report error. If DVLA is not accepted due to one or more invalid
parameters (e.g., LIMITACK = 3), then a list of invalid parameters is returned containing the variable limit attribute and reason
for rejection. If an error condition is detected, the entire message is rejected (i.e., partial changes are not allowed).
Structure
L,2
1. <VLAACK>
2. L,m (m = number of invalid parameters)
1. L,3
1. <VID
1
> (VID with error)
2. <LVACK
p
> (reason)
3. L,n {n = 0,2}
1. <LIMITID
1
> (1st limit in error for VID
p
)
2. <LIMITACK
1
> (reason)
.
.
m. L,3
1. <VID
m
> (VID with error)
2. <LVACK
m
> (reason)
3. L,n {n = 0,2}
1. <LIMITID
1
> (1st limit in error for VID
x
)
2. <LIMITACK
1
> (reason)
Exception
1. A zero-length list, m = 0 indicates no invalid variable limit attributes.
2. A zero-length list, n = 0 indicates no invalid limit values for that VID.
Stream,Function Name (Mnemonic) Direction
S2,F47 Variable Limit Attribute Request (VLAR) S,H->E,reply
Description
This message allows the host to query the equipment for current variable limit attribute definitions.
Structure
L,m (m = # of VIDs this request)
1. <VID
1
>
.
.
m. <VID
m
>
Exception
A zero-length list, m = 0, requests a list of all VID values that can have variable limit attributes.

SEMI E5-1104 © SEMI 1982, 2004 83
Stream,Function Name (Mnemonic) Direction
S2,F48 Variable Limit Attributes Send (VLAS) M,H<-E
Description
Equipment sends values of requested variable limit attribute definitions in the order requested.
Structure
L,m (m = # of VIDs this request)
1. L,2
1. <VID
1
>
2. L,p {p = 0,4}
1. <UNITS
1
>
2. <LIMITMIN
1
>
3. <LIMITMAX
1
>
4. L,n (n = # of limits defined for this VID)
1. L,3
1. <LIMITID
1
>
2. <UPPERDB
1
>
3. <LOWERDB
1
>
.
.
n. L,3
1. <LIMITID
n
>
2. <UPPERDB
n
>
3. <LOWERDB
n
>
.
.
m. L,2
1.<VID
m
>
2. L,p {p = 0,4}
1. <UNITS
m
>
2. <LIMITMIN
m
>
3. <LIMITMAX
m
>
4. L,n (n = # of limits defined for this VID)
1. L,3
1. <LIMITID
1
>
2. <UPPERDB
1
>
3. <LOWERDB
1
>
.
.
n. L,3
1. <LIMITID
n
>
2. <UPPERDB
n
>
3. <LOWERDB
n
>
Exception
1. A zero-length list, p = 0, indicates that limits are not supported for the VID.
2. A zero-length list, n = 0, means no limits are currently defined for the specified variable.

SEMI E5-1104 © SEMI 1982, 2004 84
Stream,Function Name (Mnemonic) Direction
S2,F49 Enhanced Remote Command M,H->E
Description
The host requests an object to perform the specified remote command with its associated parameters. If multi-block, it shall be
preceded by the S2,F39/S2,F40 Multi-Block Inquire/Grant transaction.
Structure
L,4
1. <DATAID>
2. <OBJSPEC>
3. <RCMD>
4. L,m # of parameter groups
1. L,2
1. <CPNAME
1
> command parameter 1 name
2. <CEPVAL
1
> command-enhanced parameter 1 value
2. L,2
1. <CPNAME
2
> command parameter 2 name
2. <CEPVAL
2
> command-enhanced parameter 2 value
.
.
m. L,2
1. <CPNAME
m
> command parameter m name
2. <CEPVAL
m
> command enhanced parameter m value
If a specific value of CPNAME is defined to have a CEPVAL defined as a LIST, it shall
always be a LIST. If the CEPVAL that is associated to that specific value of CPNAME
is defined to be anything other than LIST, it will result in a format error.
Exception
A zero length list, m = 0, indicates that no parameter groups are sent with the command. OBJSPEC can be a null length item.
Notes:
1. If CEPVAL is a LIST, the items that make up that list shall take on one of the following forms: (1) a list of items with an
identical format, (2) a LIST of CPNAME, CEPVAL pairs, as illustrated below.
A) L,2
1. <CPNAME
a
>
2. L,m
1. <CPVAL
a1
>
2. <CPVAL
a2
>
.
.
m. <CPVAL
am
>
B) L,2
1. <CPNAME
b
>
2. L,n
1. L,2
1. <CPNAME
b1
>
2. <CEPVAL
b1
>
.
.
n. L,2
1. <CPNAME
bn
>
2. <CEPVAL
bn
>