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SEMI E6-0303 © SEMI 1982, 2003 14 13.2.11 Minimum Pressure Differential (50 0K) — En ter the mini mum p re ssu re difference between the supply and return con nections for the equip ment to operate correc tly. The data s…

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SEMI E6-0303 © SEMI 1982, 2003 13
400 Electrical Power
AC AD AE AF AG AH AI AJ
1
Current
Maximum
Phase A
Current
Maximum
Phase B
Current
Maximum
Phase C
Current
Maximum
Neutral
Current THD
Phase A
Current THD
Phase B
Current THD
Phase C
Current THD
Neutral
2
amps amps amps amps % % % %
3
4
5
6
400 Electrical Power
AK AL AM AN
1
Process Cycle Energy Equipment Power
Characterization Plot
(Is power to this
connection included in
plot?)
Drawing References Electrical Power Comments
2
kWh yes or no text text
3
4
5
6
13 Water Data Sheet
13.1 Include in the Water Data Sheet the requested
information for equipment connections to facilities
systems including (but not limited to) deionized water,
ultrapure water (UPW), raw water, hot water, steam,
chilled water, and process cooling water systems.
13.2 Data Sheet 500, Water contains the following
items.
13.2.1 Equipment Component (500A) — Enter the
name of the equipment component where the
connection is located. The name should the same name
used in Data Sheet 200 and 300. For example:
Mainframe or Pump.
13.2.2 Water Connection Number (500B) — Enter a
unique connection number for every utility connection.
For example: 501, 502, 503, and so on. For loop
distribution utilities, the supply connection could be
502S and the corresponding return connection could be
502R. For loop distribution utilities, return connection
data should be entered in the row (in this data sheet)
immediately below the supply connection data row.
13.2.3 Connection Label on Equipment (500C) —
Enter the name found on the label that identifies this
physical connection on the equipment. For example
UPW Supply.
13.2.4 Utility Type (500D) — Enter the name of water
service to be provided through the connection. For
example: PCW, DI, Hot DI, or city water.
13.2.5 Line Source (500E) — Identify the source of the
supply line for this connection. If the line comes from a
provided component covered in the data sheets enter the
connection number(s) at the other end of the line. If the
line comes from a facilities source enter facilities
system. For example: 503 or facilities system.
13.2.6 Purity Requirements (500F) — List minimum
purity requirements and basis of purity. If applicable
indicate SEMI standards and filtration requirements.
13.2.7 Contaminants (500G) — Enter the type and
value of any significant impurities.
13.2.8 Minimum Pressure (500H) — Enter the
minimum supply pressure necessary for the equipment
to operate correctly.
13.2.9 Maximum Pressure (500I) — Enter the highest
supply pressure that can be used to operate the
equipment correctly.
13.2.10 Maximum Pressure Fluctuation (500J) —
Enter the maximum supply pressure change during the
processing cycle for the equipment to operate correctly.
The data entered for a loop distribution return
connection should be n/a (not applicable).
SEMI E6-0303 © SEMI 1982, 2003 14
13.2.11 Minimum Pressure Differential (500K) —
Enter the minimum pressure difference between the
supply and return connections for the equipment to
operate correctly. The data should be entered in the
return connection data row and n/a (not applicable)
entered in the supply connection data row.
13.2.12 Idle Average Flow (500L) — Enter the average
flow rate when equipment is in idle condition.
13.2.13 Process Average Flow (500M) — Enter the
average flow rate over the processing cycle.
13.2.14 Maximum Flow (500N) — Enter the maximum
flow rate (for the equipment processing cycle or idle
condition whichever is greater).
13.2.15 Maximum Temperature (500O) — Enter the
maximum supply temperature for the equipment to
operate correctly.
13.2.16 Minimum Temperature (500P) — Enter the
minimum supply temperature of the fluid for the
equipment to operate correctly.
13.2.17 Equipment Component Fitting Size (500Q) —
Enter the line or fitting size of the connection provided
on the equipment component. Use the units indicated
by the fitting manufacturer. For example: 6 or 0.25. In
row 2 enter or select the units of measure for the
specified fitting size. For example: mm or inches.
13.2.18 Equipment Component Fitting Material (500R)
— Enter a general description of the fitting material of
the provided connection on the equipment component.
For example: 316 Stainless Steel, or PVC Schedule 80.
13.2.19 Equipment Component Fitting Type (500S) —
Enter the generic style of fitting of the connection
provided on the equipment component. Be sure to
include type and gender of the fitting. For example:
Face Seal or MNPT.
13.2.20 Drawing References (500T) — Enter
references, such as drawing numbers, for any drawings,
schematics, instructions, jigs or fixtures showing this
connection. For example: connection template XXXXX
and P&ID YYYYY. Submit referenced material to
equipment purchaser with this data sheet.
13.2.21 Water Comments (500U) — Enter any
comments necessary to clarify data provided in this data
sheet. For example: Corrosion rate of aluminum in the
purchaser-supplied coolant must be less than 0.1 mils
per year.
SEMI E6-0303 © SEMI 1982, 2003 15
Data Sheet 500 - Water (See SEMI E6 Section 13)
500 Water
A B C D E F G H
1
Equipment
Component
Water
Connection
Number
Connection
Label on
Equipment
Utility
Type
Line Source Purity
Requirements
Contaminants Minimum
Pressure
2
text text text text text text text kPa
3
4
5
6
500 Water
I J K L M N O
1
Maximum
Pressure
Maximum
Pressure
Fluctuation
Minimum.
Pressure
Differential
Idle Average
Flow
Process Average
Flow
Maximum Flow Maximum
Temperature
2
kPa kPa kPa lpm lpm lpm degrees C
3
4
5
6
500 Water
P Q R S T U
1
Minimum
Temperature
Equipment
Component
Fitting Size
Equipment
Component
Fitting
Material
Equipment
Component Fitting
Type
Drawing References Water Comments
2
degrees C mm or inches text text text text
3
4
5
6
14 Bulk Chemicals Data Sheet
14.1 Include in the Bulk Chemicals Data Sheet the
requested information for equipment connections to
facilities systems including but not limited to chemical
dispense, and slurry dispense.
14.2 Data Sheet 600, Bulk Chemicals contains the
following items.
14.2.1 Equipment Component (600A) — Enter the
name of the equipment component where the
connection is located. The name should be the same
name used in Data Sheet 200 and 300. For example:
Mainframe or Pump.
14.2.2 Bulk Chemicals Connection Number (600B) —
Enter a unique connection number for every utility
connection. For example: 601, 602, 603, and so on. For
loop distribution utilities, the supply connection could
be 602S and the corresponding return connection could
be 602R. For loop distribution utilities, return
connection data should be entered in the row
immediately below the supply connection data row.
14.2.3 Connection Label on Equipment (600C) —
Enter the name found on the label that identifies this
physical connection on the equipment. For example:
Slurry 1 Supply.
14.2.4 Utility Type (600D) — Enter the name of the
bulk chemical to be provided through the connection.
For example: NH
3
or HCL.
14.2.5 Line Source (600E) — Identify the source of the
supply line for this connection. If the line comes from a
provided component covered in the data sheets enter the