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SEMI E85-0705 © SEMI 1999, 2005 26 Boundary of casse tte t op domain Bilateral Datum Plane A Faci al Datum Plane Horizontal Datum Plane Conveyor surfa ce 2° Horizontal Datum Plane Lead-in feature Kinematic coupling p in …

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SEMI E85-0705 © SEMI 1999, 2005 25
A
MHS and carrier
direction of travel
IN
OUT
IN
OUT
A
MHS and carrier
direction of travel
(a) (b)
Figure R1-1
Example Combinations of Load Port Options
SEMI E85-0705 © SEMI 1999, 2005 26
Boundary of
cassette top
domain
Bilateral
Datum
Plane
A
Facial
Datum
Plane
Horizontal
Datum
Plane
Conveyor surface
2°
Horizontal
Datum
Plane
Lead-in
feature
Kinematic
coupling
p
in
Open Cassette
Detail A
Clearance
Figure R1-2
An Open Cassette Example of Using Two Kinematic Coupling Pins, Part 1
SEMI E85-0705 © SEMI 1999, 2005 27
Facial
Datum
Plane
Side rail
Bottom rail
FOUP
Bilateral Datum Plane
Horizontal Datum Plane
Figure R1-3
A FOUP Example of Using Two Kinematic Coupling Pins, Part 2
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