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SEMI E90-0705 © SEMI 1999, 2005 24 Variable Name Description Access Form Comment SubstProcStateList A list of s ubstrate process stat es related by the same Substrate Obje ct State Model state transition that triggered a…

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SEMI E90-0705 © SEMI 1999, 2005 23
Variable Name Description Access Form Comment
SubstLocIDList A list of substrate location identifiers
related by the same Substrate Object
State Model state transition that triggered
a collection event.
RO Ordered list of
SubstSubstLocID.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
The list length will
be equal to the
number of substrates
involved in the
related state model
transition.
If batch process
equipment, this will
be a list of empty
strings while the
substrate belongs to a
batch.
SubstLotID The LotID of the Substrate Object
associated with last event.
RO Text.
SubstLotIDList
A list of substrate LotIDs related by the
same Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstLotID.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstMtrlStatus Processing quality criteria associated
with the last event.
RO Enumerated (equipment
specific).
SubstMtrlStatusList A list of MtrlStatus related by the same
Substrate Object State Model state
transition that triggered a collection
event.
RO
Ordered list of
SubstMtrlStatus.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstPosInBatch Current substrate position in a batch for
the substrate associated with the last
event.
RO Text. Batch process
equipment only.
Empty if substrate
position in a batch is
not informed or the
substrate is not part
of a batch.
SubstPosInBatchList A list of SubstPosInBatchs related by
same Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstPosInBatch.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstProcState Processing state of the substrate
associated with the last event.
RO Enumerated:
NEEDS PROCESSING
IN PROCESS
PROCESSED
ABORTED
STOPPED
REJECTED
May not be
implemented when
the equipment does
not have capability of
process.
SEMI E90-0705 © SEMI 1999, 2005 24
Variable Name Description Access Form Comment
SubstProcStateList A list of substrate process states related
by the same Substrate Object State
Model state transition that triggered a
collection event with which this variable
was associated.
RO Ordered list of
SubstProcState.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstSource Source Substrate Location for the
substrate associated with the last event.
RO Text.
SubstSourceList A list of SubstSources related by the
same Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstSource.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstState The current state of the substrate
associated with the last event.
RO Enumerated:
AT SOURCE
AT WORK
AT DESTINATION
SubstStateList A list of substrate states related by the
same Substrate Object State Model state
transition that triggered a collection event
with which this variable was associated.
RO Ordered list of
SubstState.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstType Substrate SubstType for the substrate
associated with the last event.
RO Enumerated: wafer, disc, flat
panel, reticle
SEMI E5, ¶9.2
contains a dictionary
of units.
SubstTypeList A list of SubstTypes related by the same
Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstType.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstUsage Description of the substrate associated
with the last event.
RO Enumerated:
PRODUCT
TEST
FILLER
Indicates how the
substrate is used.
Additional types
defined and added by
the eqiupment.
SubstUsageList A list of SubstUsages related by the
same Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstUsage.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
Table 16 Variables Required for Substrate Location Object State Model Transitions
Variable Name Description Access Form Comment
SubstLocID Identifier for substrate location
associated with the last event.
RO Text.
SubstLocState State of substrate location associated with
the last event.
RO Enumerated:
OCCUPIED
UNOCCUPIED
SubstLocSubstID Substrate Identifier relevant to the
location
associated with last event.
RO Text. Blank "" when
location is
UNOCCUPIED.
SEMI E90-0705 © SEMI 1999, 2005 25
Table 17 Variables Required for Batch Location Object State Model Transitions
Variable Name Description Access Form Comment
BatchLocID Identifier for batch location associated
with the last event.
RO Text.
BatchLocState State of batch location associated with
the last event.
RO Enumerated:
OCCUPIED
UNOCCUPIED
BatchSubstIDMap Ordered list of substrate identifiers
corresponding to the positions in a batch
(e.g., slot positions of a batch container
or a process carrier) associated with the
last event.
RO Ordered list of SubstID. Ordered list indicates
position in the batch
and SubstID can be
actual substrate
identifier, blank “”
when location is
empty or “filler”
when such substrate
is used.
Table 18 Status Variables Representing Object Attributes for Persistent Objects
Variable Name Description Access Form Comment
BatchLocID
i
Identifier of the ith batch location. RO Text.
BatchLocState
i
State of ith batch location. RO Enumerated:
OCCUPIED
UNOCCUPIED
BatchSubstIDMap
i
Ordered list of substrate identifiers
corresponding to the positions in the
batch held at the ith batch location.
RO Ordered list of SubstID. Ordered list indicates
position in the batch
and SubstID can be
actual substrate
identifier, blank ""
when position is
empty or "filler"
when such substrate
is used.
SubstLocID
i
Identifier of the ith equipment substrate
location.
RO Text.
SubstLocState
i
State of ith equipment substrate location. RO Enumerated:
OCCUPIED
UNOCCUPIED
SubstrLocSubstrID
i
Substrate ID of the substrate at the ith
equipment substrate location, when
occupied.
RO Text. Blank “” when
location is
UNOCCUPIED.
14 Additional Events (Equipment with substrate ID reader only)
14.1 SubstrateIDReaderAvailable Event
14.1.1 An event shall be generated whenever a substrate ID reader becomes available.
14.2 SubstrateIDReaderUnavailable Event
14.2.1 An event shall be generated whenever a substrate ID reader becomes unavailable.