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SEMI F8-0998 © SEMI 1992 , 1998 2 6.2.4 s ubmersion tank — A transpar e n t tank filled with isoprop yl alcohol to allow observation of air leakage from the tube fitting connection. 6.2.5 s ubject — To expose to. 6.2.6 t…

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SEMI F8-0998 © SEMI 1992, 19981
SEMI F8-0998
TEST METHOD FOR EVALUATING THE SEALING CAPABILITIES OF
TUBE FITTING CONNECTIONS MADE OF FLUOROCARBON
MATERIALS, WHEN SUBJECTED TO TENSILE FORCES
1 Purpose
1.1 This method provides a uniform procedure to
determine the sealing capabilities of tube fitting
connections made of fluorocarbon materials when the
connections are subjected to tensile forces.
2 Scope
2.1 This method can be used to characterize tube
fitting connections on the basis of test data developed
under the conditions described herein, but the results
are not intended to imply a performance rating.
2.2 Tube defined in this method has a circular cross
section and is made of fluorocarbon materials.
2.3 All parts of the tube fittings tested by this method
in contact with the internal fluid are made of
fluorocarbon materials.
2.3.1 Parts such as a nut or gripper are not limited to
being made of a fluorocarbon material.
2.4 Only the seal between the tube and tube fitting
being evaluated is within the scope of this document.
All other, threaded seals are beyond the scope of this
document.
2.5 When using this method for making comparisons
between various tube fittings and/or manufacturers, the
user must be specific in the selection of the tube and
tube fittings to be evaluated.
2.6 The International System of Units (SI) is used as
the standard unit of measure in this document. The U.S.
Customary units are in parentheses for reference
purposes only and have been rounded to the nearest
whole value.
3 Referenced Documents
3.1 ASTM Standards
1
D 3307 PFA — Fluorocarbon Molding and Extrusion
Materials
D 3296 — Standard Specification for FEP
Fluorocarbon Tube
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohoken, PA 19428-2959
4 Summary of Method
4.1 Subject tube fitting connections made of
fluorocarbon materials to extreme tensile forces, while
maintaining a specified pressure to the internal cavity of
the fitting and tube.
5 Significance and Use
5.1 In the manufacturing of semiconductor products,
many types of hazardous chemicals and solvents are
required. As a result, tubing and various fitting designs
made of fluorocarbon materials (which are chemically
resistant to these fluids) are used to transport those
fluids. It is important to control the testing process
when evaluating various fitting designs, so that accurate
comparisons of the sealing capabilities of tube fitting
connections can be made.
5.2 It is the intent of this method to provide a
procedure in which the air pressure and tensile force
will be applied to tube fitting connections made of
fluorocarbon materials. By using this method, accurate
comparisons of various tube fitting designs can be
achieved.
5.3 The results obtained when usin g this method are
applicable only to conditions that specifically duplicate
the procedures used within this method.
5.4 When using this test method, it is assumed that the
test specimens are truly representative of the material
and manufacturing process specified for that product.
Departure from this assumption could introduce
discrepancies that are greater than those introduced by
departure from the details of the procedure outlined in
this method.
6 Terminology
6.1 Acronyms
6.1.1 O.D. — Outside diameter
6.1.2 P/N — Part number
6.2 Definitions
6.2.1 characterize — To describe the quality of.
6.2.2 failure — Tube separation from a tube fitting
connection or tearing of the tube.
6.2.3 standard deviation — A measure of the variation
among the members of a statistical sample.
SEMI F8-0998 © SEMI 1992, 1998 2
6.2.4 submersion tank — A transparent tank filled
with isopropyl alcohol to allow observation of air
leakage from the tube fitting connection.
6.2.5 subject — To expose to.
6.2.6 tensile — Longitudinal, so as to lengthen the test
object.
7 Description of Test Equipment
7.1 A supply of compressed air. Pressure to be within
± 2% of specified.
7.2 Isopropyl alcohol.
7.3 An instrument to record the tensile force applied to
the test specimen.
7.4 A test apparatus:
7.4.1 Capable of securing the test specimen while
allowing the specimen to be internally pressurized.
7.4.2 Capable of accurately providing a uniform rate
of pull to the specimen.
7.4.3 With a transparent submersion tank capable of
containing a fluid for observing leakage. The minimum
fluid level shall be 2.5 cm (1 in) above the test
connection.
7.4.4 The apparatus shall allow the test specimen to be
internally pressurized to 250 kPa (36 psig).
7.5 See Figure 1 for basic tensile and leak test
apparatus.
Figure 1
Basic Tensile and Leak Test Apparatus
8 Safety Precautions
WARNING: This test method will subject test
specimens to conditions that may exceed the
normal performance rating of the products
under evaluation. Adequate precautions must
be taken to prevent injury to the person
conducting the test.
9 Test Specimens and Conditioning
9.1 Sample Size — A minimum of three specimens
shall be tested.
9.2 Specimen Size — The specimen length shall be no
less than 10 cm (4 in) between the upper tensile fixture
and the tube end of the fitting connection.
9.3 Specimen Surface — All surfaces of the specimens
shall be free of visible flaws, scratches, or other
imperfections, unless typically found on a
representative sample of the product.
9.4 Specimen Conditioning — All specimens must be
conditioned for a minimum of one hour in an air
environment of 23° ± 2.8°C (73° ± 5°F) prior to being
subjected to pressure and tensile forces.
10 Calibration
10.1 Calibrate the tensile test equipment’s rate of pull
to 2.5 cm (1 in) per minute, ± 5%.
10.2 Calibrate the tensile force instrument to ± 2% full
scale.
11 Test Procedure
11.1 Assemble a test fitting connection, per
manufacturer’s specification, to one end of the tube.
11.2 Install the fitting connection to the tensile fixture,
in the submersion tank (see Figure 1) in a manner that
prevents distortion of the connection.
11.3 Secure free end of tube to the upper tensile
fixture, leaving a minimum of 10 cm (4 in) of exposed
tube.
11.4 Fill the submersion tank with isopropyl alcohol to
a height of 2.5 cm (1 in) above the top of the test
connection.
11.5 Cover the submersion tank in case of a fluid
splash.
11.5.1 The cover must allow for slight clearance
around tube.
11.6 Pressurize the test specimen with an internal air
pressure of 250 kPa (36 psig), regardless of tube size.
SEMI F8-0998 © SEMI 1992, 19983
11.7 Begin pulling the test specimen at a rate of 2.5
cm (1 in) per minute.
11.8 Record on test data sheet (see Related
Information 1 for a sample), the minimum tensile force
in Newtons (lbs) when leakage is first observed from
the fitting connection.
11.9 Lower the air pressure to one atmosphere
immediately after observing any leakage.
11.10 Continue pulling until the tube pulls through the
fitting connection or until tearing of the tube occurs.
11.10.1 If the tube releases from the tensile fixture, the
data from that specimen must be disregarded and an
additional specimen tested.
11.11 Record on test data sheet the mode of failure
and the maximum tensile force applied in Newtons
(lbs).
11.11.1 It is possible that the tensile force required to
cause leakage and the maximum tensile force may be
the same. If this situation occurs, indicate the force
reading on both areas of the test data sheet.
12 Calculations
12.1 Calculate the average “force to cause leakage”
and record.
12.2 Calculate the average “maximum tensile force”
and record.
12.3 Using the three actual forces:
12.3.1 Calculate the standard deviation of “force to
cause leakage” and record.
12.3.2 Calculate the standard deviation of “maximum
tensile force” and record.
13 Data Accuracy
13.1 Tensile Force — Newtons: ± 2%
14 Test Data Sheet
The test data sheet shall include the following
information:
14.1 Date tested.
14.2 Operator and test facility.
14.3 Description of items tested, including:
Tubing — manufacturer, O.D., wall thickness, part
number, and material type.
Fitting — manufacturer, type, size, part number, and
material type.
14.4 Force to cause leakage for each specimen.
14.5 Average and standard deviation of the forces to
cause leakage.
14.6 Maximum tensile force for each specimen.
14.7 Average and standard deviation of maximum
tensile forces.
14.8 Mode of failure for each specimen.
NOTE: A sample test data sheet is provided as Related
Information 1.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.