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SEMI E40-0705 © SEMI 1995, 2005 9 7.8 Consecutive P rocess Jobs — Consecutive process job s is a situation where multiple process jobs are applied to material while it is in the processing resource. The pro cess jobs req…

SEMI E40-0705 © SEMI 1995, 2005 8

Sequence

Erma

Sequence Step

(SS)

Process Recipe

(PR)

Process Step

(PS)

Process Parameter

(PP)

Figure 1

Cluster Tool Sequence Recipe Hierarchical Relationships

7.6 Processing Material Groups — Many equipment architectures require concurrent processing of groups of

material. A single process job can control a group of material, with certain restrictions. All material in the group

needs to be of the same type and processed identically. The processing of each material should be dependent on the

arrival of the group. That is, the full material group shall be received by the equipment before processing begins and

may not depart until all processing is complete. This ensures that the process job remains a simple logical control

mechanism while maintaining robust control, good coordination with material movement, and effective material

data tracking.

7.6.1 Two common examples of allowable material group processing are:

a) an equipment receiving a cassette of wafers to be processed identically. All the wafers in the group are received

together, in the cassette. The processing of the wafers may or may not be simultaneous but can only proceed

once the cassette has arrived. All wafer processing shall complete before the cassette may be removed. Note

that this may alternatively be specified as a simple process job with the cassette as the material; and

b) a cluster tool batch process module processing wafers together. Wafers are received singly. Processing of the

wafer group in the batch chamber begins when all the wafers specified in the process job have arrived. Wafers

are sent after processing is complete.

7.7 Concurrent Process Jobs — Concurrent process jobs is the situation where multiple jobs are active (not queued)

at the same time. A single process job is not always appropriate for concurrent processing of multiple material. In

such cases, multiple concurrent jobs shall be supported by the processing resource. Support of concurrent process

jobs is not a fundamental requirement.

7.7.1 An example of concurrent wafer processing which may not be achieved with a single process job is a carousel

type cluster tool process module. The processing of a single wafer is not dependent on the arrival of the group. In

this case, concurrent process jobs would be created, one for each wafer, even if they were to be processed

identically. This allows effective control and tracking of the process jobs.

7.7.2 Processing management considers concurrent process jobs to be logically independent of one other. They are

distinguished by unique job identifiers. Concurrent jobs may not apply to the same material because the processing

resource may not have more than one active process job associated with a particular material.

7.7.3 There may be interdependencies between concurrent jobs due to resource availability and equipment hardware

architecture.

SEMI E40-0705 © SEMI 1995, 2005 9

7.8 Consecutive Process Jobs — Consecutive process jobs is a situation where multiple process jobs are applied to

material while it is in the processing resource. The process jobs requested on the same material are maintained in the

order received, and a subsequent job becomes active once the previous one has completed material processing.

7.8.1 A process job normally specifies all the processing to be applied to the material during a single visit to the

processing resource. For example, a process job for a cluster tool would specify all the processing in the multiple

sequential steps in the various process modules of the tool. Certain situations may require application of subsequent

process jobs to material without it leaving the processing resource.

7.8.2 Processing management requires that a subsequent process job on the same material does not interrupt the

previous process job processing. The previous process job terminates immediately once it completes active material

processing, even though the material has not left the processing resource, and it is superceded by the subsequent job.

The material becomes associated with the superceding process job. This allows sequential processing and maintains

a single active association between material and process job.

7.9 Process Job without Material — This standard is primarily intended for the management of material processing.

However, it permits application of a process job to a processing resource which contains no processing material.

This may be used to achieve processing resource conditioning which is not related to a specific material.

7.9.1 The process job has the normal control characteristics, except that it has no dependency on material arrival

and terminates at the end of active processing. Support of process jobs without material is not a fundamental

requirement.

8 Behavior

8.1 This section provides a high-level definition of the communications between the supervisor and the processing

resource needed to achieve material processing. It does not define the message detail, concentrating instead on the

concepts. The message detail is addressed in §10, Messaging Services.

8.2 Process Job Communications

8.2.1 Process Job Control Messaging — The control message flow for normal operation is presented in Figure 1.

The arrows represent significant information exchange.

8.2.1.1 A detailed description of each message used in normal operation follows.

8.2.1.2 PR Job Create — The supervisor requests that the processing resource perform the specified process job.

This request may be acted upon immediately, or queued for later execution if the processing resource is busy or the

order of material arrival unknown. If the processing resource does not support queuing or the queue is full, the

request may be rejected. The request shall supply a process specification in which the supervisor supplies such

information as:

 identification of the material to be processed,

 the recipe defining the processing, and

 whether processing will be started manually (optional, normal operation is automatic).

8.2.1.2.1 Upon receipt of the PR Job Create request and before acknowledging, the processing resource checks the

process specifications to ensure that they are valid (i.e., that the specified parameters (recipe, material, manual start)

are sufficient) and have legal values for the capabilities of the processing resource. Depending on its ability to queue

jobs, it may also check such dynamic information as availability of the processing resource to receive the material or

presence of correct material, etc., to determine whether to accept or reject.

8.2.1.2.2 The processing resource sets the process start attribute if automatic start is requested (normal operation).

8.2.1.3 PR Job Create Acknowledge — The processing resource informs the supervisor that the requested job is

accepted or rejected, and if rejected, supplies error codes and textual reasons for the failure.

8.2.1.4

PR Job Setup — The processing resource reports that the process job is active and setting up for process. It

may have been on the queue or have just been created. If the material is not already present, the processing resource

performs any pre-conditioning required then awaits material arrival. Upon arrival of all the material, it prepares for

processing and automatically initiates processing if the process start attribute is set.

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PROCESSING AGENT

SUPERVISOR

PR JOB CREATE

PR JOB CREATE ACK

PR JOB SETUP

PR JOB PROCESSING

PR JOB PROC COMPLETE

PR JOB COMPLETE

pre-conditioning,

material arrival

processing

the material

material departure,

post-conditioning

queued

Figure 2

Process Job Message Flow

8.2.1.5 PR Job Processing — The processing resource reports that material processing has commenced.

8.2.1.6 PR Job Processing Complete — The processing resource reports that material processing is completed and

that the material is available for removal.

8.2.1.7 PR Job Complete — The processing resource declares the process job to be complete once it has completed

processing the material, the material has departed, and any required processing resource post-conditioning has

completed. This message is also used when a process job ends abnormally. The message provides information on the

success or failure of the processing and, if failed, supplies error codes and textual reasons for the failure.

8.2.2 Process Job Informational Events — There are process job related events which may be of significance to the

service-user. These are designated as “collection events” and shall be available for event reporting. This section

describes those collection events and shows how they fit into the chronology of a process job. These collection

events, as specified by the PRJobEvent service, shall be implemented per definition of one of the following

standards, SEMI E30, SEMI E40, SEMI E53 or similar style events, as required by the service-user. The equipment

may also optionally implement the collection events per the remaining standards. However, the service-user shall

only utilize one of the standards for collection event implementations. The selection mechanism by the service-user

is equipment specific. For example, it may be part of an equipment power-on process or via an equipment specific

equipment constant.

8.2.2.1 If SEMI E30, SEMI E53 or similar style collection events are used for PRJobEvent, the equipment may also

implement equivalent events for the process job milestones as defined by the PRJobAlert service.

8.2.2.2 Collection event messages provide valuable information but are not strictly required to perform material

processing. Therefore, it is expected that some message protocol implementations will provide a method by which

the service-user may disable those events which are not needed in a particular implementation. For SEMI E40 style

events, the activation for disabling the events is user specific. For SEMI E30, SEMI E53 or similar style events, the

activation is as defined in those standards.

8.2.2.3 PR Job Waiting for Material — The processing resource reports that all required pre-conditioning has

completed and that it cannot proceed until the process job material arrives. It is considered to be awaiting material

arrival if it is not aware of activities in progress with the aim of receiving all or part of the material. This event may

be generated only during process job setup. This event requires, at a minimum, PRJobID and Timestamp as its data.

8.2.2.4 PR Job State Change — The processing resource reports that it has changed state. All state transitions in the

state model Figure 4 shall trigger this collection event. These events require, at a minimum, variables PRJobID,

PRJobState, and TimeStamp (SEMI E30).

8.2.3 Process Job Extended Messaging — In this section, the extended messaging of Abort/Stop/Cancel,

Pause/Resume and manual Start Process is added to the normal messaging described above. The only extended

functionality required to be supported in processing management is Abort.

8.2.3.1 A detailed description of each message used in extended operation follows.