semi合集-English.pdf - 第2333页

SEMI E82-0705 © SEMI 1999, 2005 29 STEP COMMENTS HOST TSC COMMENTS 18. <-S6,F11 Event Report Send (ERS) VehicleDeparted . VehicleID = “CARXX” . TransferPortList - L,1 1. TransferPort = “PORTXX” 19. Event Report Acknow…

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SEMI E82-0705 © SEMI 1999, 2005 28
STEP COMMENTS HOST TSC COMMENTS
3. <-S2,F50 Enhanced Remote Command
Acknowledge (ERCA)
4. <-S6,F11 Event Report Send (ERS)
TransferInitiated
. CommandID = “111111”
5. Event Report Acknowledge
(ERA)
S6,F12->
6. <-S6,F11 Event Report Send (ERS)
VehicleAssigned
. VehicleID = “CARXX”
/* Actual VehicleID used
for the transfer may be
different due to TSC
scheduling optimizations
*/
CommandID = “111111”
7. Event Report Acknowledge
(ERA)
S6,F12->
8. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “CARXX”
. TransferPortList -
L,1
1. TransferPort =
“PORTXX”
9. Event Report Acknowledge
(ERA)
S6,F12->
10. <-S6,F11 Event Report Send (ERS)
Transferring
. CommandID = “111111”
11. Event Report Acknowledge
(ERA)
S6,F12->
12. <-S6,F11 Event Report Send (ERS)
VehicleAcquireStarted
. VehicleID = “CARXX”
. TransferPort =
“PORTXX”
. CarrierID = “123456”
13. Event Report Acknowledge
(ERA)
S6,F12->
14. <-S6,F11 Event Report Send (ERS)
CarrierInstalled
. VehicleID = “CARXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
15. Event Report Acknowledge
(ERA)
S6,F12->
16. <-S6,F11 Event Report Send (ERS)
VehicleAcquireCompleted
. VehicleID = “CARXX”
. TransferPort =
“PORTXX”
. CarrierID = “123456”
17. Event Report Acknowledge
(ERA)
S6,F12->
SEMI E82-0705 © SEMI 1999, 2005 29
STEP COMMENTS HOST TSC COMMENTS
18. <-S6,F11 Event Report Send (ERS)
VehicleDeparted
. VehicleID = “CARXX”
. TransferPortList -
L,1
1. TransferPort =
“PORTXX”
19. Event Report Acknowledge
(ERA)
S6,F12->
20. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “CARXX”
. TransferPortList -
L,1
1. TransferPort =
“PORTYY”
21. Event Report Acknowledge
(ERA)
S6,F12->
22. <-S6,F11 Event Report Send (ERS)
VehicleDepositStarted
. VehicleID = “CARXX”
. TransferPort =
“PORTYY”
. CarrierID = “123456”
23. Event Report Acknowledge
(ERA)
S6,F12->
24. <-S6,F11 Event Report Send (ERS)
CarrierRemoved
. VehicleID = “CARXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
25. Event Report Acknowledge
(ERA)
S6,F12->
26. <-S6,F11 Event Report Send (ERS)
VehicleDeposit-Completed
. VehicleID = “CARXX”
. TransferPort =
“PORTYY”
. CarrierID = “123456”
27. Event Report Acknowledge
(ERA)
S6,F12->
28. <-S6,F11 Event Report Send (ERS)
VehicleUnassigned
. VehicleID = “CARXX”
. CommandID = “111111”
29. Event Report Acknowledge
(ERA)
S6,F12->
SEMI E82-0705 © SEMI 1999, 2005 30
STEP COMMENTS HOST TSC COMMENTS
30. <-S6,F11 Event Report Send (ERS)
TransferCompleted
. CommandName =
“TRANSFER”
. CommandID = “111111”
. Priority = 5
. Replace = 0
. ResultCode = 0
. CarrierLoc = “PORTYY”
. TransferInfo
1
- L,3
1. CarrierID = “123456”
2. SourcePort = “PORTXX”
3. DestPort = “PORTYY”
31. Event Report Acknowledge
(ERA)
S6,F12->
12.2.2 Simultaneous Multiple Carrier Transfer — Transfer Unit Size is Equal to 2 Carriers
12.2.2.1 Two carriers are transported from 2 source ports (e.g., L-Shaped stocker output ports) to 2 destination ports
(e.g., process equipment ports). The transport vehicle is capable of acquiring and depositing 2 carriers at the same
time (e.g., forking type vehicle). It is assumed that the source and destination ports must be the same equipment.
STEP COMMENTS HOST TSC COMMENTS
1. Both carriers are prepared
for a TRANSFER command at
the source ports.
2. Enhanced Remote Command
(ERC)
. TRANSFER
. COMMANDID = “111111”
. PRIORITY = 5
. REPLACE = 0
. TRANSFERINFO
1
– L,3
1. CARRIERID = “123456”
2. SOURCEPORT = “PORTX1”
3. DESTPORT = “PORTY1”
. TRANSFERINFO
2
– L,3
4. CARRIERID = “654321”
5. SOURCEPORT = “PORTX2”
6. DESTPORT = “PORTY2”
S2,F49->
3. <-S2,F50 Enhanced Remote Command
Acknowledge (ERCA)
4. <-S6,F11 Event Report Send (ERS)
TransferInitiated
. CommandID = “111111”
5. Event Report Acknowledge
(ERA)
S6,F12->
6. <-S6,F11 Event Report Send (ERS)
VehicleAssigned
. VehicleID = “AGVXX”
. CommandID = “111111”
7. Event Report Acknowledge
(ERA)
S6,F12->