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SEMI F10-0698 © SEMI 199 3, 1998 3 10 Test Pro cedure 10.1 Install three fitting connection s , asse mbled per manufacturer’ s specifications, to the test system . Allo w for a mi nimum of 30 c m (12 i n.) of tube leng t…

SEMI F10-0698 © SEMI 1993, 1998 2
6.5 pressure containing envelope — The internal area
of a specimen which contains the fluid media.
6.6 standard deviation — A measure of the variation
among the members of a statistical sample.
6.7 subject — To expose to.
7 Description of Test Equipment
7.1 This test method requires the use of two hydraulic
systems.
7.1.1 A high pressure system capable of applying a
continuous increase of the internal hydraulic pressure to
the test specimen.
7.1.2 A low pressure, high temperature circulation
system capable of controlling a fluid temperature within
± 3°C (± 5°F) of a specified test temperature.
7.1.2.1 The pressure is to be 75 kPa (11 psig) or less
for all temperatures, within the range of 25° to 200°C
(77° to 392°F).
7.2 Test Fluid — When testing at or below 82°C
(180°F), an SAE 20 weight hydraulic oil may be used.
When testing at elevated fluid temperatures, use a
synthetic oil that is acceptable for elevated temperatures
of up to 200°C (392°F) and compatible with the test
stand and test specimens.
7.3 An instrument to record the peak pressure within
1% of full scale.
7.4 An instrument to monitor temperature within ±
1°C (± 2°F).
7.5 Specimen Support — Any support is acceptable as
long as it does not contribute to the restraint of the
specimen in either the circumferential or axial direction.
7.6 An enclosure that will allow observation of the test
specimen and that is also capable of controlling the
ambient temperature to 31° ± 6°C (88° ± 11°F).
7.7 See Figure 1 for basic pressure and circulation
system.
Figure 1
Basic Pressure and Circulation System
8 Safety Precautions
WARNING: This test method will subject test
specimens to conditions that exceed the
normal performance rating of the product
under evaluation. Adequate precautions must
be taken to prevent injury to the person
conducting the test, as catastrophic failures of
the test specimens are expected. The hydraulic
plumbing and safety enclosure is to be
constructed of materials which are capable of
containing a fluid at 200°C (392°F).
9 Test Specimens and Conditioning
9.1 Sample Size — A minimum of three specimens
shall be tested at each temperature condition.
9.1.1 The three connections will be conditioned
simultaneously. See Figure 1 for a basic pressure and
circulation system.
9.2 Specimen Surface — All surfaces of the specimens
shall be free of visible flaws, scratches, or other
imperfections, unless typically found on a
representative sample of the product.
9.3 Specimen Conditioning — All specimens must be
conditioned for a minimum of one hour in an air
environment of 23° ± 2.8°C (73° ± 5°F) prior to being
subjected to pressure.
9.4 A fluid at the specified temperature must be
circulated through all the test specimens for a minimum
of one-half hour.

SEMI F10-0698 © SEMI 1993, 19983
10 Test Procedure
10.1 Install three fitting connections, assembled per
manufacturer’s specifications, to the test system. Allow
for a minimum of 30 cm (12 in.) of tube length between
the test fitting connection and the free end closure.
10.2 The plumbing must permit free movement of
each test specimen to allow for distortion.
10.3 Using the low pressure circulation system (see
Section 7.1.2), condition the test specimens to 25°C
(77°F) per 9.4. The system pressure is not to exceed 75
kPa (11 psig) during conditioning.
10.4 Properly position the isolation valves in such a
way that only one specimen will be pressure tested,
while the remaining specimens continue to have heated
fluid circulating through them.
WARNING: Take all necessary precautions when
positioning the isolation valves, due to the potential
harm which might be caused by an accidental
exposure to the high temperature fluid.
10.4.1 Test each specimen within two minutes after
isolating it from the hot oil circulation system.
10.5 Using the high pressure system (see Section
7.1.1), pressurize the specimen until failure occurs.
10.5.1 Increase the pressure at a uniform and constant
rate such that failure occurs between 60 to 70 seconds
from initial exposure to the high pressure fluid.
10.6 Record on test data sheet (see Appendix 1 for
sample test data sheet) the pressure and temperature at
which the failure occurred. To identify mode of failure,
record pressure reading under column:
“T” — for tube failure.
“F” — for fitting connection failure.
10.7 Repeat 10.1 through 10.5, substituting, for the
fluid temperature in Section 10.2, the remaining six
temperatures: 75°C (167°F), 100°C (212°F), 125°C
(257°F), 150°C (302°F), 175°C (347°F), and 200°C
(392°F).
11 Calculations
11.1 Calculate the average pressure for each test
temperature and record in kPa (psig).
11.2 Calculate the standard deviation for each test
temperature and record.
12 Data Accuracy
12.1 Pressure — kPa: ± 2%
12.2 Fluid Temperature — ± 1°C (± 2°F)
13 Test Data Sheet
The test data sheet shall include the following
information:
13.1 Date tested.
13.2 Operator and test facility.
13.3 Description of items tested, including:
Tubing — manufacturer, O.D., wall thickness, part
number, and material type.
Fitting — manufacturer, type, size, part number, and
material type.
13.4 The actual temperature for each test.
13.5 The failure pressure for each sample, in the
appropriate column.
13.6 The average and standard deviation for each
failure mode of each specimen.
NOTE: A sample test data sheet is provided as Related
Information 1.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.

SEMI F10-0698 © SEMI 1993, 1998 4
RELATED INFORMATION 1
SAMPLE TEST DATA SHEET
NOTE: This related information is not an official part of SEMI F10 and is not intended to modify or supercede the official
standard. It has been derived from industry specifications. Publication was authorized by full letter ballot procedures.
Determination of the suitability of the material is solely the responsibility of the user.
Test Date: Operator: Test Facility:
Tube Manufacturer: Fitting Manufacturer:
Tube O.D.: Fitting Tube:
Tube Wall Thickness: Fitting Size:
Tube P/N: Fitting P/N:
Tube Material: Fitting Material:
Max. Pressure — kPa T = Tube Failure, F = Fitting Connection Failure
Actual Temperature
Sample 25°C T 25°C F 75°C T 75°C F 100°C T 100°C F 125°C T 125°C F
1
2
3
Average =
Standard Deviation =
Actual Temperature
Sample 150°C T 150°C F 175°C T 175°C F 200°C T 200°C F
1
2
3
Average =
Standard Deviation =
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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