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SEMI T7-0303 © SEMI 1997, 2003 3 32 cells per row C1 C2 R1 R2 8 cells per column Nominal Di mensions ( mm) R1 = 3.875 C1 = 0.875 R2 = 4.000 C2 = 1.000 C L C L C L C L Figure 2 Data Matrix Field Dimensions ECC200 - 8 rows…

SEMI T7-0303 © SEMI 1997, 2003 2

4.1.10 data matrix code symbol — a two-dimensional

array of square cells arranged in contiguous rows and

columns. In certain ECC200 symbols, data regions are

separated by alignment patterns. The data region is

surrounded by a finder pattern [ISO/IEC 16022].

4.1.11 dot — a localized region with a reflectance

which differs from that of the surrounding surface.

NOTE 1: To assure reading efficiency, a minimum contrast

of 30% is required between the reflectance value of a dot and

the surrounding wafer surface. Various densitometers can

provide such measurements nondestructively.

4.1.12 dot misalignment, within a cell — the distance

between the physical center point of a dot and the cell

center point.

4.1.13 finder pattern, of a data matrix code symbol —

a perimeter to the data region. Two adjacent sides

contain dots in every cell; these are used primarily to

define physical size, orientation and symbol distortion.

The two opposite sides are made up of cells containing

dots in alternate cells [ISO/IEC 16022].

4.1.14 reference point, of a data matrix code symbol —

the physical center point of a corner cell common to the

primary border row and the solid line of the alignment

bar, used to identify the physical location of the symbol

on the object being marked with the symbol.

NOTE 2: The reference point is at a fixed location on the

object. Different cells may be chosen as the reference point

depending on the desired orientation of the symbol on the

object and the size variability of the symbol. The particular

cell to be used as the reference point must be specified for

each application.

5 Requirements

5.1 Shape and Size of the Data Matrix Code Symbol

5.1.1 Data Matrix Code Symbol Dimensions

5.1.1.1 Each rectangular matrix code symbol shall be

composed of an array of 8 rows and 32 columns with an

alignment bar as defined in ISO/IEC ISS 16022.

5.1.1.2 Cell spacing shall be 125 µ m, center to center.

5.1.2 Dot Size — The nominal shape of the dot

produced in the matrix may be circular or square. Its

diameter or edge length (after polishing) shall be 100

µ m + 10 µ m – 20 µ m.

5.1.3 Border Rows and Columns

5.1.3.1 One border row and one border column shall

contain a dot in each cell. These are identified as the

primary border row and the primary border column.

These are used by the code reader to determine the

orientation of the matrix.

5.1.3.2 The opposing (secondary) border row and

column shall contain dots in alternating cells.

5.1.3.3 For these rectangular matrix code symbols, the

reference point of the symbol shall be the physical

centerpoint of the cell common to the primary border

row and the center alignment bar.

5.1.4 The maximum dot misalignment within a cell is

15 µ m. This ensures that a minimum size dot covers a

cell central area of radius 25 µ m.

5.1.5 Adjacent dots shall not touch.

5.2 Content of the Data Matrix Code Symbol

5.2.1 Each rectangular matrix code symbol shall

contain 10 message characters, together with the error

checking and correcting (ECC200) code characters,

encoded in accordance with ISO/IEC ISS 16022.

5.2.2 The message characters may include the

following: A–Z, 0–9, and dash (–). These characters

constitute the SEMI OCR Character Set except for the

period (.); this is the same character set specified in

SEMI M12. These characters are also included in the

set designated as “primarily upper case alphanumeric”

in ISO/IEC 16022, in Table 5 and Annexe J. The ten

message characters shall contain two elements:

a. a vendor-assigned 8-character wafer identification

code, followed by

b. a 2-character vendor identification code (see SEMI

AUX001).

5.3 Location of the Data Matrix Code Symbol

5.3.1 With the wafer positioned back surface up and

with the primary fiducial (notch) toward the operator,

the origin of the data matrix code symbol shall be

located as specified below.

5.3.1.1 The 8 row × 32 column rectangular 2-D matrix

code symbol shall be placed entirely outside a fixed

quality area (FQA) with a nominal edge exclusion of 3

mm. The reference point shall be located 148.95 ± 0.15

mm from the center of the wafer, along a radius 5.0 ±

0.1° counterclockwise from the axis of the notch

fiducial bisector.

5.3.2 The primary row of the matrix code symbol shall

be placed toward the periphery of the wafer.

SEMI T7-0303 © SEMI 1997, 2003 3

32 cells per row

C1 C2

8 cells per

column

Nominal Dimensions (mm)

R1 = 3.875

C1 = 0.875

R2 = 4.000

C2 = 1.000

Figure 2

Data Matrix Field Dimensions

ECC200 - 8 rows × 32 columns

To Wafer Cente

Dimensions in millimeters are o

center to center of dots

Figure 3

Data Matrix Code Fields

ECC200 - 8 rows × 32 columns

Figure 4

Data Matrix Code Symbol Location on Back Surface of Notched 300 mm Diameter Wafer

NOTE 1: The peripheries are of wafers of nominal diameter with nominal notch dimensions. The dots of the finder pattern are

shown for an 8 row x 32 column data matrix code symbol with 125 µ m spacing.

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

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