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SEMI F97-0305 © SEMI 2005 14 Table 6 State Transition Table Wa rning-Mode Number Previous State Trigge r New State Actions Remark 1 (no state) Start up of FPU. No_Warning None. 2 No_Warning Warning event occurred. Warnin…

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9.4.6 Alarm-Mode
9.4.6.1 Alarms are being defined on a case by case basis between the purchaser and the supplier of the FMCS and
FPUs and the system integrator. Alarm-Mode specifies whether an alarm occurred:
No_Alarm: No alarm present.
Alarm: An alarm is present (at least one part of the FPU is in alarm condition
).
Alarm-Mode
No_Alarm Alarm
2
3
1
Figure 8
State Transition Diagram Alarm-Mode
Table 5 State Transition Table Alarm-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Alarm None.
2 No_Alarm Alarm event occurred. Alarm FPU may perform
alarm routines.
3 Alarm Alarm condition
disappeared.
No_Alarm FPU releases
alarm routines.
9.4.7 Warning-Mode
9.4.7.1 Warnings are being defined on a case by case basis between the purchaser and supplier of the FMCS and
FPUs and the system integrator. Warning-Mode specifies whether a warning occurred:
No_Warning: No warning present
Warning: Warning present.
Warning-Mode
No_Warning Warning
2
3
1
Figure 9
State Transition Diagram Warning-Mode
SEMI F97-0305 © SEMI 2005 14
Table 6 State Transition Table Warning-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Warning None.
2 No_Warning Warning event occurred. Warning FPU may perform
warning routines.
3 Warning Warning condition
disappeared.
No_Warning FPU releases
warning routines.
9.4.8 Error-Mode
9.4.8.1 Errors are being defined on a case by case basis by the purchaser and supplier of the FMCS and FPUs and
the system integrator. Error-Mode specifies whether an error occurred:
No_Error: No error present.
Error: Error present.
Error-Mode
No_Error Error
2
3
1
Figure 10
State Transition Diagram Error-Mode
Table 7 State Transition Table Error-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Error FPU may release
error routines.
2 No_Error Error occurred. Error FPU may perform
error routines.
3 Error Error condition
disappeared.
No_Error FPU may release
error routines.
9.4.9 Maintenance-Mode
9.4.9.1 Maintenance-Mode specifies whether maintenance is required or no maintenance is required:
No_Maintenance: No maintenance required.
Maintenance: Maintenance is required (at least one part of the FPU requires maintenance at the site of the
FPU).
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Maintenance-Mode
No_Maintenance Maintenance
2
3
1
Figure 11
State Transition Diagram Maintenance-Mode
Table 8 State Transition Table Maintenance-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Maintenance None.
2 No_Maintenance Error or preventive
maintenance event
occurred.
Maintenance FPU may request
maintenance.
3 Maintenance Error condition or
preventive maintenance
condition disappeared.
No_Maintenance None.
9.4.10 Simulation-Mode
9.4.10.1 Simulation-Mode specifies whether the FPU or parts of the FPU are simulated:
No_Simulation: FPU operates not in simulation mode (simulation turned off).
Simulation: FPU or parts of the FPU are simulated. FPU functions are performed using simulated I/O signals.
Simulation-Mode
No_Simulation Simulation
2
3
C
1
Figure 12
State Transition Diagram Simulation-Mode