semi合集-English.pdf - 第1267页

SEMI E5-1104 © SEMI 1982, 2004 209 Stream,Function Name (Mnemonic) Direction S15,F24 Recipe Descriptor Data M,H<->E Description This message returns the reque sted descri ptors in the same order as requested. Struc…

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SEMI E5-1104 © SEMI 1982, 2004 208
Stream,Function Name (Mnemonic) Direction
S15,F22 Recipe Action Acknowledge M,H<->E
Description
This message is used to acknowledge the request to originate a new recipe.
Structure
L,4
1. <AGENT>
2. <LINKID>
3. <RCPCMD>
4. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
LINKID is zero if and only if all requested actions have been completed. p = 0 if and only if RMACK indicates no errors.
Stream,Function Name (Mnemonic) Direction
S15,F23 Recipe Descriptor Request M,H<->E,reply
Description
This message is used to request the descriptors of a list of the specified recipes. If multi-block, it must be preceded by the
S15,F1/F2 inquire/grant transaction. OBJSPEC is the object specifier of either a recipe namespace of a recipe executor.
Structure
L,3
1. <DATAID>
2. <OBJSPEC>
3. L,n
1. <RCPID
1
>
.
.
n. <RCPID
n
>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 209
Stream,Function Name (Mnemonic) Direction
S15,F24 Recipe Descriptor Data M,H<->E
Description
This message returns the requested descriptors in the same order as requested.
Structure
L,2
1. L,n (n = number of recipes from request)
1. L,a (descriptors for recipe #1)
1. L,r (r = 0 or 3) (1st component descriptor)
1. <RCPDESCNM
11
>
2. <RCPDESCTIME
11
>
3. <RCPDESCLTH
11
>
.
.
a. L,r (r = 0 or 3)
1. <RCPDESCNM
1a
>
2. <RCPDESCTIME
1a
>
3. <RCPDESCLTH
1a
>
.
.
n. L,b (descriptors for recipe #n)
1. L,r (r = 0 or 3) (1st component descriptor)
1. <RCPDESCNM
n1
>
2. <RCPDESCTIME
n1
>
3. <RCPDESCLTH
n1
>
.
.
b. L,r (r = 0 or 3)
1. <RCPDESCNM
nb
>
2. <RCPDESCTIME
nb
>
3. <RCPDESCLTH
nb
>
2. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
A zero-length recipe descriptor (r = 0) means that the specified recipe does not exist (could not be located). p = 0 if and only if
RMACK indicates no errors.
SEMI E5-1104 © SEMI 1982, 2004 210
Stream,Function Name (Mnemonic) Direction
S15,F25 Recipe Parameter Update Request M,H<->E,reply
Description
This message is used to update the variable parameter definitions for a specific agent. If multi-block, it must be preceded by the
S15,F1/F2 inquire/grant transaction.
Structure
L,4
1. <DATAID>
2. <RMNSSPEC>
3. <AGENT>
4. L,n
1. L,3
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
3. <RCPPARRULE
1
>
.
.
n. L,3
1. <RCPPARNM
n
>
2. <RCPPARVAL
n
>
3. <RCPPARRULE
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S15,F26 Recipe Parameter Update Acknowledge M, H<->E
Description
This message indicates the successful performance of the request or otherwise indicates the nature of error(s) that occurred.
Structure
L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
p = 0 if and only if RMACK indicates no errors.