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SEMI G84-0303 © SEMI 2001, 2003 10 11.3.1.1 An Event Repo rt “Update Map” will be sent if new defects have been detected and not previo usly logged to the host for the following conditions. See Figure 3. 1. At the end of…

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SEMI G84-0303 © SEMI 2001, 2003 9
11.1.1 A typical equipment scenario is that for each
strip arriving at the equipment input, a strip map request
(S14,F1) and subsequent download (S14,F2) will
occur. See Figure 1. Depending on the equipment type,
there may be some variations on the optional attributes
requested, the timing of events and exception handling.
11.2 Strip Map Creation
11.2.1 A map must exist before it can be sent to an
equipment type. Some equipment may be required to
support the creating of the map for the first time. See
Figure 2. For these equipment two modes are
identified, “autocreate” and “user confirm”. To use
these modes the equipment shall behave as indicated
below.
11.2.2 If equipment supports an “autocreate” mode the
equipment will process the strip as normal when a new
strip arrives. The equipment will assume each location
on the strip has an unknown status. Should the
equipment be required to send a strip map during
processing due to equipment errors, the strip map shall
contain the unknown CellStatus value whenever the
status is unknown. All other CellStatus indicators shall
be “Good” or “Bad”. See Upload scenario.
11.2.3 If equipment supports a “user confirm” mode,
the equipment shall request operator intervention to
decide how to deal with a missing strip map. The
options are “Create map” or “Abort”. If the operator
selects “Create map” the above scenario will be valid.
If the operator selects “Abort”, the equipment shall
send an alarm to the host and not process the strip. The
strip will not be processed unless the equipment is
removed from the “strip map” mode.
11.3 Strip Map Upload
11.3.1 For equipment with the capability of detecting
defective units on a strip, a strip map upload is required.
The upload will report new definitions of each “cell”.
Event Report Acknowledge
S6,F12
Strip map is checked
for conflicts and when
OK is stored in strip
map server.
Equipment updates the map as
defects are detected during
processing of the strip .
Event Report Send "Update Map"
S6,F11
Equipment
Equipment/Operator
Actions which should
be performed
Host Actions
which should be
performed
Host
Figure 3
“Update Map” Event
SEMI G84-0303 © SEMI 2001, 2003 10
11.3.1.1 An Event Report “Update Map” will be sent if
new defects have been detected and not previously
logged to the host for the following conditions. See
Figure 3.
1. At the end of processing current strip if new
defects have been detected
2. Whenever the equipment changes state from
Remote to Local
3. Whenever the equipment interlocks are triggered
4. Whenever the equipment stops and requires
operator intervention.
11.3.2 Unsuccessful Transaction
11.3.2.1 Equipment will stop and signal an alarm to the
host if the equipment detects that a strip map has not
been successfully uploaded to the host.
11.3.2.2 When possible, the equipment shall support
intervention by the Operator with the following
corrective actions:
1. “retry upload”
2. “abort upload”
11.3.2.3 If the “retry upload” is selected the Upload
Event will be resent to the host.
11.3.2.4 If “abort” is selected by the operator an
appropriate Event shall be sent with the strip map ID to
indicate to the host that the strip map has been aborted.
The equipment will not process the strip unless the
equipment is removed from “strip map” mode.
11.4 Strip End Event
11.4.1 At the end of each strip, a strip end event shall
be sent to the host which indicates that the strip has
successfully completed the activity at that equipment.
Event Report Acknowledge
S6,F12
Strip End Event is
received and validated
Equipment completes processing
of the active strip. The strip map
has been successfiully uploaded
to the host - if defects were
detected.
Event Report Send "Strip End"
S6,F11
Equipment
Equipment/Operator
Actions which should be
performed
Host Actions which
should be performed
Host
Figure 4
“Strip End” Event
SEMI G84-0303 © SEMI 2001, 2003 11
11.5 In Process Strip Map Related Errors
11.5.1 Each equipment type shall define the type of
errors that can occur during processing which could
cause strip map integrity problems and provide
documented scenarios of how the equipment will
handle each situation.
11.5.2 Some potential erroneous situations:
• Equipment lost strip map while processing
• Strip is removed prior to completing processing
strip
• Strip jams before being moved out of equipment—
no Strip Map End Event occurred