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SEMI F53-0600 © SEMI 2000 11 Table 1 Data S heet for EM Susceptibility Testing Initial Cond ition MFC Indi cated Output Flow Sta ndard O utput Ambient Temper ature ° C Gas Temperatur e ° C Gas Pressure psig MFC Cable Shi…
SEMI F53-0600 © SEMI 2000 10
Spike Generator
Equipment Under Test
SCOPE
AB
+
-
G
Figure 4
Transient Susceptibility (Conducted) Test Setup
SEMI F53-0600 © SEMI 200011
Table 1 Data Sheet for EM Susceptibility Testing
Initial Condition
MFC Indicated Output
Flow Standard Output
Ambient Temperature
°C
Gas Temperature
°C
Gas Pressure psig
MFC Cable Shielding and Connector
Cable Shielding
Type of MFC Connector
EM Susceptibility Testing
I. EM Field-Radiated
Data Points Frequency
(Hz)
Field Strength
(V/m)
MFC Indicated
Flow (V)
Flow Standard
Output
MFC Indicated
Flow (%FS)
Flow Standard
(%FS)
1
2
3
:
:
EM Susceptibility Testing
II. EM Field-Conducted
Data Points Spike
Amplitude (V)
Location of
Spike Input
MFC Indicated
Flow (V)
Flow Standard
Output
MFC Indicated
Flow (%FS)
Flow Standard
(%FS)
1
2
3
:
:
SEMI F53-0600 © SEMI 2000 12
Table 2 Results of Electromagnetic Susceptibility Testing
A. Radiated Susceptibility
Data
Points
Freq. (Hz) Field Strength
(V/m)
MFC Indicated Flow
(%FS), corrected for zero
Flow Standard (FS%),
corrected for zero
Change in Flow from
Reference
MFC (%FS) Std. (%FS)
1
2
3
4
5
:
:
B. Conducted Susceptibility
Data
Points
Spike
Amplitude (V)
Location of
Spike Input
MFC Indicated Flow
(%FS), corrected for zero
Flow Standard (FS%),
corrected for zero
Change in Flow from
Reference
MFC (%FS) Std. (%FS)
1
2
3
4
5
6
:
:
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