semi合集-English.pdf - 第5794页
SEMI P23-0200 © SEMI 1993 , 2000 17 50 u m 50 u m 2 u m 2 u m 3. 0 6. 0 5. 0 5. 0 6. 0 3. 0 6. 0 4. 0 4. 0 6. 0 10 . 0 14 . 0 4. 0 Figure 12 Sub Cell Left Lower (X1, y5) Defect ID & Defect Type ; Film Pattern
SEMI P23-0200 © SEMI 1993, 2000 16
50 um
50 um
2 um
2 um
6.0
3.0
25.0
25.0
Figure 11
Sub Cell
Right Lower (x5, y5)
; Film Pattern
SEMI P23-0200 © SEMI 1993, 200017
50 um
50 um
2 um
2 um
3.0
6.05.0
5.0 6.0
3.0
6.0
4.0 4.0
6.0
10.0
14.0
4.0
Figure 12
Sub Cell
Left Lower (X1, y5)
Defect ID & Defect Type
; Film Pattern
SEMI P23-0200 © SEMI 1993, 2000 18
50 um
50 um
2 um
2 um
Figure 13
Sub Cell
Cell Corner Sample
; Film Pattern