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SEMI C3.51-11 01 © SEMI 1995 , 2001 6 Figure 4A Infra Red Absorption Spectra of Hydrogen Chloride in Boron Trichloride Figure 4B Infra Red Absorpti on of Phosgene in Boron T richloride
SEMI C3.51-1101 © SEMI 1995, 20015
Figure 1
Chromatogram Showing the Determination of Nitrogen in Boron Trichloride
Figure 2
Chromatogram Showing the Determination of Carbon Dioxide in Boron Trichloride
Figure 3
Chromatogram Showing the Determination of Chlorine in Boron Trichloride
SEMI C3.51-1101 © SEMI 1995, 2001 6
Figure 4A
Infra Red Absorption Spectra of Hydrogen Chloride in Boron Trichloride
Figure 4B
Infra Red Absorption of Phosgene in Boron Trichloride
SEMI C3.51-1101 © SEMI 1995, 20017
Figure 4C
Infra Red Absorption Spectra of Silicon Tetrachloride in Boron Trichloride
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