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SEMI M31-0705 © SEMI 1998, 2005 18 Value Specified Symbol Used Figure Number Manual Door Auto-Door Datum Measured from Feature Measured to y 52 2, 8, 10, 12 165.5 ± 0.5 mm (6.52 ± 0.02 in.) at frame seal zones and 166 mm…
SEMI M31-0705 © SEMI 1998, 2005 17
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
x65 9, 12 187.5 mm (7.38 in.) bilateral datum plane vertical axis of cylindrical fork-lift pin
holes in left and right bottom conveyor
rails
x68 13 25 mm (0.98 in.) minimum bilateral datum plane sides of volume above ramp on front
retaining feature
x69
#1
11 7.6 ± 0.1 mm
(0.299 ± 0.004 in.)
b
ilateral datum plane or
vertical plane rotated away
from it about nominal wafer
centerline
b
eginning of angled surface of the
kinematic grooves in the top robotic
handling flange
x81
#2
1 215 mm (8.46
in.) maximum
Not applicable bilateral datum plane outer edge of manual door
y9 12 92.5 mm (3.64 in.) facial datum plane front end of the line segment along
center of rear carrier sensing pads and
origin of radius r17 at center of info
pads C and D
y10 12 123.5 mm (4.86 in.) facial datum plane rear end of the line segment along
center of rear carrier sensing pads and
origin of radius r14 at center of info
pads A and B
y17 12 27.5 mm (1.08 in.) facial datum plane line segment along center of center
carrier sensing pad
y18 12 40.2 mm (1.58 in.) facial datum plane near end of the line segment along
center of front carrier sensing pads
y19 12 61.1 mm (2.41 in.) facial datum plane far end of the line segment along center
of front carrier sensing pads
y40
#1
8, 10, 12 116 mm (4.57 in.) maximum facial datum plane furthest extent of human handles
toward the front
y41
#1
11 30 ± 1 mm
(1.18 ± 0.04 in.)
facial datum plane left orientation notch on robotic
handling flange
y42 None ± 0.5 mm (± 0.02 in.) flatness
over each area
facial datum plane surfaces that mate with the seal zones
y44
#1
8, 11 53 mm (2.09 in.) maximum facial datum plane encroachment of supports under the
outer edge of the robotic handling
flange
y45
#1
11 65.3 ± 1 mm
(2.57 ± 0.04 in.)
facial datum plane nearest point of front and rear position
and orientation notches on robotic
handling flange
y46
#1
8, 11 71 ± 1 mm
(2.80 ± 0.04 in.)
facial datum plane front and rear edge of robotic handling
flange
y47
#1
11 58 mm (2.28 in.) minimum facial datum plane end of robotic handling flange sides
y49 None 134 mm (5.28 in.) maximum facial datum plane interior of FOSB sides between x51 and
x52
y50 8, 10 130 mm (5.12 in.) minimum facial datum plane rear of upper door frame volume
SEMI M31-0705 © SEMI 1998, 2005 18
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
y52 2, 8, 10, 12 165.5 ± 0.5
mm (6.52 ±
0.02 in.) at
frame seal
zones and 166
mm (6.54 in.)
maximum
elsewhere on
box shell
165.5 0.5
mm (6.52
0.02 in.) at
door and frame
seal zones and
at reserved
spaces for
vacuum
application and
166 mm (6.54
in.) maximum
elsewhere on
door or box
shell
facial datum plane FOSB front
y53 8, 10, 12 190 mm (7.48 in.) maximum facial datum plane FOSB rear
y58 8, 12 75 mm (2.95 in.) minimum facial datum plane end of left and right conveyor rails
y62 13,14 28 mm
(1.10 in.) maximum
facial datum plane rear of front retaining feature
y63 13,14 37.3 ± 0.5 mm
(1.47 ± 0.02 in.)
facial datum plane rear of ramp on front retaining feature
y64 13,14 42.1 ± 0.5 mm
(1.66 ± 0.02 in.)
facial datum plane front of ramp on front retaining feature
y65 13,14 104 mm
(4.09 in.) minimum
facial datum plane front of front retaining feature
y67 10 25 mm (0.98 in.) facial datum plane origin of r67 on bilateral datum plane
y68
#1
11 55 mm (2.17 in.) maximum facial datum plane near end of the front kinematic groove
in the top robotic handling flange
y81
#2
1 30 mm (1.18
in.) minimum
not applicable facial datum plane rear edge of manual door
y82
#2
1 191 mm (7.52
in.) maximum
not applicable facial datum plane front surface of manual door
z2 8, 9, 12 2 mm (0.08 in.) maximum horizontal datum plane
b
ottom of carrier sensing pads and info
pads (when down)
z26 12 9 mm (0.35 in.) minimum horizontal datum plane bottom of info pads (when up)
z30 none 106.5 ± 0 mm
(4.19 ± 0 in.)
for 13-wafer cassette
and
166.5 ± 0 mm
(6.56 ± 0 in.)
for 25-wafer cassette
horizontal datum plane vertical centerline of port
z41 8, 9 0 mm (0 in.)
minimum
external horizontal datum
plane
bottom of FOSB
z43 8, 9 2 ± 1 mm
(0.08 ± 0.04 in.)
external horizontal datum
plane
bottom conveyor rails
SEMI M31-0705 © SEMI 1998, 2005 19
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
z47
#1
8, 9, 11 210 ± 1 mm
(8.27 ± 0.04 in.)
for 13-wafer FOSB
and
330 ± 1 mm
(12.99 ± 0.04 in.)
for 25-wafer FOSB
external horizontal datum
plane
bottom of robotic handling flange
z48
#1
8, 9, 11 15 mm (0.59 in.) minimum
b
ottom of robotic handling
flange
encroachment of FOSB top underneath
robotic handling flange
z49
#1
8, 9, 11 8 mm (0.31 in.) maximum bottom of robotic handling
flange
top of robotic handling flange and
upper door frame volume
z50
#1
11 5 mm (0.20 in.) minimum
b
ottom of robotic handling
flange
encroachment of FOSB top underneath
the center hole in the top robotic
handling flange
z60 14 8.0 ± 0.5 mm
(0.31 ± 0.02 in.)
external horizontal datum
plane
top of slot in center retaining feature
z61 14 15 mm
(0.59 in.) minimum
external horizontal datum
plane
top of chamber above slot in center
retaining feature
z62 14 18 mm
(0.71 in.) minimum
external horizontal datum
plane
top of front retaining feature
z63 14 7.5 ± 0.5 mm
(0.30 ± 0.02 in.)
external horizontal datum
plane
top of ramp on front retaining feature
z65 8, 9 7 mm (0.28 in.) minimum horizontal datum plane upper boundary of cylindrical fork-lift
p
in holes in left and right bottom
conveyor rails
#1
These dimensions are for optional features.
#2
These dimensions pertain to the manual door only.
facial
datum
plane
center
retaining
feature
y
62
28
r
60 =16
±0.5
r
64
9.5
x
64
35
bilateral
datum
plane
x
60
=8.0±0.5
r
61 16
front
retaining
feature
y
64
=42.1
±0.5
y
63
=37.3
±0.5
x
68
25
y
65
104
Figure 13
Bottom View of Retaining Features on Bottom of FOSB