semi合集-English.pdf - 第820页

SEMI E112-0305 © SEMI 2001, 2005 2  pod latch -pin holes  2 conveyor rails on the sides parallel to the bi-lateral reference plane 2.4 This standard i s provisional because of the issues detaile d in the related inform…

SEMI E112-0305 © SEMI 2001, 2005 1

SEMI E112-0305

PROVISIONAL MECHANICAL SPECIFICATION FOR A 150 mm

MULTIPLE RETICLE SMIF POD (MRSP150) USED TO TRANSPORT

AND STORE MULTIPLE 6 INCH RETICLES

This specification was technically approved by the Global Physical Interfaces and Carriers Committee and is

the direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition

approved by the North American Regional Standards Committee on Decmber 10, 2004. Initially available at

www.semi.org January 2005; to be published March 2005. Originally published November 2001; previously

published November 2004.

1 Purpose

1.1 This standard specifies the 150 mm Multiple Reticle SMIF Pod (MRSP150) used to transport and store six 6

inch reticles in an integrated circuit (IC) manufacturing facility.

2 Scope

2.1 This standard is intended to set an appropriate level of specification that places minimal limits on innovation

while ensuring modularity and inter- changeability at all mechanical interfaces. Most of the requirements given in

this specification are in the form of maximum or minimum dimensions with very few required surfaces. Only the

physical interfaces for the MRSP150 are specified; no materials requirements or micro-contamination limits are

given in this specification.

2.2 The pellicle exclusion volumes of this specification accommodates pellicles which extend the full length of the

reticle and up to a maximum pellicle width of 124 mm.

2.3 The MRSP150 has the following components, sub-components, and other features. A “” symbol indicates

components or features which are required and a “” symbol indicates components or features which are optional.

 Top

 robotic handling flange

 Interior

 supports for six 6 inch reticles

 reticle capture

 reticle contact surfaces

 end-effector exclusion volumes

 2 safety rail exclusion volumes

 pellicle exclusion volumes

 lateral constraints

 reticle backstop

 Sides

 2 side handling flanges on the sides parallel to the bi-lateral reference plane

 2 side handling exclusion volumes

 RFID placement zone

 Bottom

 door compatible with SMIF as defined in SEMI E19.3

SEMI E112-0305 © SEMI 2001, 2005 2

 pod latch-pin holes

 2 conveyor rails on the sides parallel to the bi-lateral reference plane

2.4 This standard is provisional because of the issues detailed in the related information section. Once investigation

of issues in the related information section has been completed, this standard should be upgraded from provisional

status.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI E19.3 — Port Standard for Mechanical Interface if Wafer Cassette Transfer, 150 mm (6 inch) Port

SEMI E30.1 — Inspection and Review Specific Equipment Model (ISEM)

SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm

Wafers

SEMI P5 — Specification for Pellicles

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 150 mm Multiple Reticle SMIF Pod (MRSP150) — a minienvironment compatible carrier capable of holding

six 6 inch reticles in a horizontal orientation during transport and storage and is compatible with a Standard

Mechanical Interface (SMIF) per SEMI E19.3.

4.1.2 bilateral reference plane — a vertical plane which bisects the MRSP150 and is perpendicular to both the

horizontal and facial reference planes and passes through the center of the 150 mm SMIF as defined in SEMI E19.3.

4.1.3 facial reference plane — a vertical plane which bisects the MRSP150 and is parallel to the front side of the

pod (where reticles are removed or inserted) and passes through the center of the 150 mm SMIF as defined in SEMI

E19.3.

4.1.4 horizontal reference plane — a horizontal plane coplanar with the top surface of the port door as defined in

SEMI E19.3.

4.1.5 minienvironment — a localized environment created by an enclosure to isolate the product from contamination

and people.

4.1.6 nominal reticle center line — the line that is defined by the intersection of two perpendicular vertical planes

each of which bisect the reticle at the mid-point of a side.

4.1.7 pellicle — as defined in SEMI P5.

4.1.8 reticle — as defined in SEMI E30.1.

4.1.9 robotic handling flanges — horizontal projections on the top of the box for lifting and rotating the box (as

defined in SEMI E47.1).

4.1.10 side handling flanges — horizontal projections on the sides of the pod (sides parallel to the bilateral

reference plane) for lifting, transportation or positioning of the pod.

5 Ordering Information

5.1 Intended Use

— This standard is intended to specify reticle carriers over a reasonable lifetime of use, not just

those in new condition. For this reason, the purchaser should specify a time period and the number and type of uses

SEMI E112-0305 © SEMI 2001, 2005 3

to which the carriers will be put. It is under these conditions that the carriers must remain in compliance with the

requirements listed in §6.

5.2 Reticle Thickness — The purchaser needs to specify the reticle thickness to be accommodated in the MRSP150.

5.3 Optional Features — The purchaser needs to specify whether optional components (identified in §2) are

required.

5.4 Temperature Ranges — The purchaser needs to specify two sets of temperatures to which the MRSP150s might

be exposed. An operating temperature range is the set of environmental temperatures in which the MRSP150s will

remain in compliance with the requirements listed in §6. A temporary temperature range is the set of environmental

temperatures to which the pods can be exposed such that when the MRSP150s return to the operating temperature

range, the MRSP150s will be in compliance with the requirements listed in §6. Limits on exposure times to elevated

temperatures should be specified.

5.5 Electrostatic Dissipation — The end user may require a continuous path to ground from the reticle to the carrier

registration and handling features. The purchaser needs to specify whether electrostatic dissipation is required.

5.6 Contamination Requirements — The purchaser needs to specify their contamination requirements.

6 Requirements

6.1 Symmetry — Most of the dimensions of the MRSP150 are determined with respect to the three orthogonal

reference planes defined in this document: the facial reference plane, the horizontal reference plane and the bilateral

reference plane. All dimensions are symmetric about the bilateral reference plane.

6.2 Door — The pod door, and its frame on the bottom of the pod, must be compatible with a port which conforms

to SEMI E19.3.

6.3 Numbering — The reticles are numbered in increasing order from bottom to top (so the bottom reticle is reticle

number 1, to the top reticle which is reticle number 6).

6.4 Positioning — The nominal reticle seating planes are defined by z291 through z296 as shown in Figure 4 and

Table 2. The entire bottom surface of a reticle must lie within the z276 dimension of its nominal seating plane

shown in Figure 6 and Table 2.

6.5 Reticle Contact Surfaces — The reticle contact surfaces are the only 4 locations where the MRSP150 may

contact the pellicle side of the reticle. These surfaces are shown in Figures 8 and 9 with dimensions given in

Table 2. The contact surfaces are defined by x245, x246, y233, y234 and y235.

6.6 Reticle Capture — When the carrier is closed, a bisecting plane through the reticle, parallel to the bilateral

reference plane must be within x114 of the bilateral reference plane of the load port when the reticle is seated in the

carrier. A bisecting plane through the reticle, parallel to the facial reference plane must be within y228 of the facial

reference plane of the load port when the reticle is seated in the carrier.

6.7 Exclusion Volumes — The interior of the MRSP150 must never intrude into the pellicle exclusion volume, and

must not intrude into the end-effector exclusion volumes, lift clearance exclusion volumes or safety rail exclusion

volumes when the carrier is open.

6.7.1 End-Effector Exclusion Volumes — Volumes in an opened pod which must be free for the end-effector to

enter and handle the reticle as defined by x238, x239, x240, y227, y232, y238, z297, z299, z302 (first reticle) and

z300 (second through sixth reticle). No obstructions should exist in the end-effector exclusion volumes which

extend in the y direction (normal to the facial reference plane.) Table 2 defines the dimensions for the end-effector

exclusion volumes shown in Figures 4, 6, 7 and 8.

6.7.2 Pellicle Exclusion Volume — Volume in the pod below the reticle which must remain free from intrusion to

accommodate the pellicle mounted on the reticle. No obstructions should exist in the pellicle exclusion volume as

defined by x119, z290 (first reticle) and the previous reticle lift clearance exclusion volume (second through sixth

reticle) which extends in the y direction (normal to the facial reference plane). The pellicle exclusion volume is

defined in Table 2 and shown in Figure 4.

6.7.3 Reticle Lift Clearance Exclusion Volumes — Volumes in an opened pod which must be free to allow the end-

effector to lift and handle the reticles, as defined by x243, z298 and z311 (sixth reticle) as shown in Table 2 and