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SEMI E114-0302 E © SEMI 2002 1 SEMI E114-0302 E TEST METHOD FOR RF C ABLE ASSEMBLIES USED IN SEMICONDUCTOR PROCES SING EQUIPMENT RF POWER DELIVERY SYSTEMS This test method was technically approved b y the Global Metric s…

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SEMI E113-1104 © SEMI 2001, 2004 12
SEMI E114-0302
E
© SEMI 2002 1
SEMI E114-0302
E
TEST METHOD FOR RF CABLE ASSEMBLIES USED IN
SEMICONDUCTOR PROCESSING EQUIPMENT RF POWER DELIVERY
SYSTEMS
This test method was technically approved by the Global Metrics Committee and is the direct responsibility
of the North American Metrics Committee. Current edition approved by the North American Regional
Standards Committee on March 20, 2002. Initially available at www.semi.org June 2002; to be published
July 2002.
E
This document was editorially modified in May 2002. A change was made to Section 1.1.
1 Purpose
1.1 The purpose of this document is to define a test
method used to determine the electrical length, power
losses, and characteristic impedance variation of RF
cable assemblies used in RF power delivery systems for
semiconductor processing equipment.
2 Scope
2.1 This document specifies the testing procedures and
test equipment required for the following:
• Determining the electrical length of RF cable
assemblies at the nominal operating frequency in
terms of degrees of phase shift.
• Determining the power dissipation (loss) in the RF
cable assembly at the nominal operating frequency.
• Verifying the characteristic impedance of the RF
cable assembly.
2.2 The primary focus for this specification is
semiconductor processing equipment including, but not
limited to, the following tool types:
• Dry etch equipment,
• Film deposition equipment (CVD and PVD).
2.3 This standard does not address any safety or
performance issues related to RF emissions or electrical
codes (e.g., Underwriter’s Laboratory, Inc. (UL), the
National Electrical Code (NEC
), Federal
Communications Commission (FCC)). It is the
responsibility of the users of this standard to conform to
the appropriate local codes and regulations as applied to
this type of equipment, some of which are covered by
referenced documents.
2.4 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 This standard is meant to address RF Cable
Assemblies used in RF systems that primarily operate
in the frequency range of 0.2–100 MHz. It does not
address higher frequency RF systems or microwave
systems.
3.2 This standard assumes that the cable assemblies to
be tested have a nominal characteristic impedance of 50
ohms. This standard can be used with cable assemblies
with a different characteristic impedance if the
appropriate standard termination loads are used.
3.3 International, national, and local codes, regulations
and laws should be consulted to ensure that the
equipment and procedures meet regulatory
requirements in each location.
4 Referenced Standards
4.1 SEMI Standards
SEMI E113 — Specification for Semiconductor
Processing Equipment RF Power Delivery Systems
4.2 IEEE Standards
1
IEEE-STD-383 — IEEE Standard for Type Test of
Class 1E Electrical Cables, Field Splices, and
Connections for Nuclear Power Generating Stations
4.3 Military Standards
2
MIL-C-17G — General Specification for Cables, Radio
Frequency, Flexible and Semirigid
MIL-PRF-39012D — General Specification for
Connectors, Coaxial, Radio Frequency
1 Institute of Electrical and Electronics Engineers, IEEE Operations
Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, New Jersey
08855-1331, USA. Telephone: 732.981.0060; Fax: 732.981.1721
2 Available through the Naval Publications and Forms Center, 5801
Tabor Avenue, Philadelphia, PA 19120-5099, USA. Telephone:
215.697.3321
SEMI E114-0302
E
© SEMI 2002 2
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 CVD — Chemical Vapor Deposition
5.1.2 PVD — Physical Vapor Deposition
5.1.3 VSWR — Voltage Standing Wave Ratio
5.2 Definitions of Terms
5.2.1 cable assembly — the section of cable
(transmission line), including the connectors, used to
connect various parts of the RF power delivery system.
5.2.2 device under test (DUT) — the cable assembly
intended to be tested.
5.2.3 electrical length — the length of the cable
assembly at the operating frequency expressed in terms
of degrees, where one wavelength at the nominal
operating frequency is equal to 360 degrees.
5.2.4 half wave resonant frequency — the frequency of
the cable assembly where the electrical length of the
assembly is equal to one half (0.5) of a wavelength.
For example, the half wave resonant frequency of a
cable assembly with an electrical length of 2 meters
would be 74.95 MHz ((c/2-meters)/2).
5.2.5 harmonic frequency — the harmonic frequencies
are defined as integer multiples of the fundamental
frequency. For example, the second harmonic of 13.56
MHz is 27.12 MHz.
5.2.6 quarter wavelength — the length equal to one
quarter of the wavelength at a given frequency, where
the wavelength is equal to the speed of light divided by
the frequency.
5.2.7 S-parameters — the scattering matrix used to
describe a network. The reflection coefficient is the
S11 parameter and the transmission coefficient is the
S21 parameter.
5.2.8 speed of light (c) — the speed of light in free-
space is assumed to be 2.9979 × 10
8
meters/second.
5.2.9 velocity of propagation (VP) — the velocity of
propagation, VP, is defined as the ratio of the speed of
an electrical signal down a length of cable divided by
the speed in free space. It is the reciprocal of the square
root of the relative dielectric constant of the dielectric
material between the inner and outer conductor of a
coaxial assembly. For example, the VP for cable type
RG-217 is nominally 0.66.
6 Test Apparatus
6.1 RF Vector Network Analyzer — The network
analyzer is used to measure the electrical length and can
also be used to determine the attenuation (power
losses). The network analyzer requires vector
capability so that both the magnitude and phase of the
reflection coefficient and transmission coefficient can
be measured as a function of frequency. The frequency
range shall include the operating frequency and the
quarter-wave resonant frequency of the RF cable
assembly.
6.2 Time Domain Reflectometer (TDR) — The TDR is
used to measure and verify the characteristic impedance
as a function of distance along the transmission line.
6.3 RF Adapters and Terminations — Various adapters
may be necessary to convert between different types of
coaxial connectors (e.g., type N to type HN adapters,
etc.). All adapters used shall have the same nominal
characteristic impedance as the cable assembly to be
tested (DUT), which is typically 50 ohms. For some
measurements, additional coaxial cable assemblies may
be necessary. These cable assemblies, which should
not be confused with the DUT cable assembly, shall be
of the same nominal characteristic impedance as the
DUT cable assembly. Standard terminations will also
be used, such as shorts, opens, and precision 50-ohm
loads.
7 Safety Precautions
7.1 Work should be conducted in accordance with local
safety requirements and test device manufacturer
recommended safety procedures. The tests described in
this document involve using low output power test
instrumentation (typically less than 10 milli-Watt).
7.2 The area immediately surrounding the Test Setup
should be keep free and clear of unnecessary equipment
and materials. Some of the cable assemblies to be
tested may be long and can be trip and lift/weight
hazards.
8 Test Setup for Electrical Length Test
8.1 The Test Setup for the electrical length test consists
of the Network Analyzer, the cable assembly to be
tested (DUT), the appropriate adapter (if any) to
connect the DUT to the network analyzer, and the
appropriate adapter (if any) to connect a coaxial short
circuit termination to the output of the DUT. A
schematic of the Test Setup is shown in Figure 1. Care
should be taken to ensure that the cable assemblies to
be tested do not exceed the vendor specified bending
radius, which is typically 5 times the outer diameter of
the cable.
8.2 Prior to making any measurements, the Network
Analyzer shall be turned on and allowed to warm up
before the testing is to take place. This time allows for
electronics to come to a stable operating condition for
the measurements.