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SEMI T6-0697 © SEMI 1997, 2004 32 Segment: TSP Test Period or Interval Level: Detail Loop: TSP Usage: Optional Max Use: 1 Purpose: To describe a specific period or interval at which tests are p erformed. Syntax Notes: 1 …

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SEMI T6-0697 © SEMI 1997, 2004 31
Segment: REF Reference Numbers
Level: Detail
Loop: STA
Usage: Optional
Max Use: 10
Purpose: To specify identifying numbers.
Syntax Notes: 1 At lease one of REF02 or REF03 is required.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M REF01 128 Reference Number Qualifier M ID 2/2
Code qualifying the Reference Number.
Refer to 003050 Data Element Dictionary for acceptable code values.
X REF02 127 Reference Number X AN 1/30
Reference number or identification number as defined for a particular Transaction Set,
or as specified by the Reference Number Qualifier.
X REF03 352 Description X AN 1/80
A free-form description to clarify the related data elements and their content.
SEMI T6-0697 © SEMI 1997, 2004 32
Segment: TSP Test Period or Interval
Level: Detail
Loop: TSP
Usage: Optional
Max Use: 1
Purpose: To describe a specific period or interval at which tests are performed.
Syntax Notes: 1 If either TSP03 or TSP04 is present, then the other is required.
Comments: 1 TSP02 is used to further expand TSP01 as a qualifier.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M TSP01 1312 Test Period or Interval Qualifier M ID 2/2
Code indicating the type of period or interval as related to when a test event occurs.
TF Final Test Measurement or Read-point (Cumulative).
This code marks the end of the experiment under a specific test.
TI Intermediate Test Measurements or Read-point (Cumulative).
There may be a number of intermediate test points during an
experiment; this code would likely be combined with DE 350 to
indicate which intermediate test point it is.
TO Initial Test Measurement or Read-point (Cumulative).
This is the first test interval that a product or item is subjected to.
O TSP02 350 Assigned Identification O AN 1/11
Alphanumeric characters assigned for differentiation within a transaction set.
X TSP03 1313 Test Period or Interval Value X N0 1/6
Numeric value of period or interval signifying when a test event occurs.
X TSP04 344 Unit of Time Period or Interval X ID 2/2
Code indicating the time period or interval.
AD Average Daily
AM Average Monthly
AY Average Year
CY Calendar Year
DA Calendar Days
F1 Fiscal Year Plus One Year
F2 Fiscal Year Plus Two Years
FY Fiscal Year
MO Month
P
R
Preceding Six Months
Q1 First Quarter
Q2 Second Quarter
Q3 Third Quarter
Q4 Fourth Quarter
QY Quarter of a Year
SA Semiannual
WK Weeks
WW Work Week
SEMI T6-0697 © SEMI 1997, 2004 33
Segment: LM Code Source Information
Level: Detail
Loop: LM
Usage: Optional
Max Use: 1
Purpose: To transmit standard code list identification information.
Comments: 1 LM02 identifies the applicable industry code list source information.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M LM01 559 Agency Qualifier Code M ID 2/2
Code identifying the agency assigning the code values.
SM Semiconductor Equipment and Materials International
ZZ Mutually Defined
O LM02 822 Source Subqualifier O AN 1/15
A reference that indicates the table or text maintained by the Source Qualifier.