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SEMI G48-89 © SEMI 1989, 1996 8 Paragr aph 5.1 3 Paragr aph 5 .12 Figure 3 Figure 4 Paragraph 5.15 Figure 5 Paragraph 5.16 Surface Plate Parallel Flats Reference Gauge Block Dial Indicator Height Guage ∆ H Figure 6 Parag…

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SEMI G48-89 © SEMI 1989, 1996 7
Figure 1
Figure 2
SEMI G48-89 © SEMI 1989, 1996 8
Paragraph 5.13
Paragraph 5.12
Figure 3
Figure 4
Paragraph 5.15
Figure 5
Paragraph 5.16
Surface Plate
Parallel
Flats
Reference
Gauge Block
Dial Indicator
Height Guage
∆H
Figure 6
Paragraph 5.17
θ Paragraph 5.23
Seating Plane
(Surface Mount)
Paragraph 5.24
Paragraph 5.22.1
Figure 7
SEMI G48-89 © SEMI 1989, 1996 9
Paragraph 5.22.1
Paragraph 5.17
Figure 7A
Lens
Paragraph 5.15.2.2
{
Mirror
Light Source
Figure 8
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