semi合集-English.pdf - 第5691页

SEMI P10-0705 © SEMI 1990, 2005 186 RELATED INFORMATION 8 EXAMPLE OF A DATA FUNCTION NOTICE : The information contained in this rel ated information is not an offici al part of SEMI P10, and it is not intended to modify …

100%1 / 7923
SEMI P10-0705 © SEMI 1990, 2005 185
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 17-19;8-9
DATA_PATTERN_WINDOW 112600,-13000,-112600,13000
START_DATA_FRACTURE 1
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
DATA_SOURCE_FILE 4
DATA_FORMAT DATA_MANIPULATION
END_DATA_SOURCE_FILE 4
!
! Note: The final sizing, output address size, and data scale are shown
below.
!
START_DATA_FRACTURE 2
PATTERN_ADDRESS_SIZE .05
DATA_SCALE_FACTOR 5
END_DATA_FRACTURE 2
!
START_DATA_FRACTURE 3
SIZING .25
SIZING_RULE TWOSIDED
SIZING_BORDER_RULE PARAGON
END_DATA_FRACTURE 3
!
END_DATA_MANIPULATION 5
!----------------------------------------------------------------------------
---------------------------------
END_DATA_PATTERN_NAME METAL-1
SEMI P10-0705 © SEMI 1990, 2005 186
RELATED INFORMATION 8
EXAMPLE OF A DATA FUNCTION
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
The following is an excerpt of a P10 file which demonstrates how the
<data_function> capability might be applied.
START_DATA_FUNCTION CPL
DATA_FUNCTION_PURPOSE CPL Mask Synthesis for Poly-Gate Layer
SOFTWARE_NAME MaskWeaver
SOFTWARE_REVISION 1.2
RUNSET_NAME cpl090.mw
RUNSET_REVISION 1.4
DATA_LOCATION /n/raidhost/r5/mwlib/
PARAMETER_FILE_NAME cpl090.par
PARAMETER_FILE_REVISION 2.2
INPUT_FILE_NAME qtiac90_1.5.gds
INPUT_FILE_FORMAT gds
TOP_CELL MASTER
DATA_LOCATION /n/raidhost/r8/tapeouts/qtiac90_1.5/
RESULT_FILE_NAME qtiac90_1.5_cpl.o32
SUMMARY_FILE_NAME qtiac90_1.5_cpl.sum
LOG_FILE_NAME qtiac_90_1.5_cpl.log
END_DATA_FUNCTION CPL
SEMI P10-0705 © SEMI 1990, 2005 187
RELATED INFORMATION 9
SEMI PHOTOMASK MASK ORDER STRUCTURE TREE DIAGRAM
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the <mask_order> portion of the standard in XML format.
NOTE: All portions of the tree were scaled to fit within single pages. In cases where a portion of the tree is very long, this
causes the text to be very small. Such portions of the tree will be more easily read by viewing them with a text editor or text
viewer and using an increased magnification.
complexType AerialImageDataType
diagram
complexType BarcodeDataType
diagram